JPH0494116A - スピンコータ - Google Patents

スピンコータ

Info

Publication number
JPH0494116A
JPH0494116A JP21042490A JP21042490A JPH0494116A JP H0494116 A JPH0494116 A JP H0494116A JP 21042490 A JP21042490 A JP 21042490A JP 21042490 A JP21042490 A JP 21042490A JP H0494116 A JPH0494116 A JP H0494116A
Authority
JP
Japan
Prior art keywords
motor
wafer
casing
clearance
electromagnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21042490A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0568090B2 (enrdf_load_stackoverflow
Inventor
Fumio Kondo
文雄 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP21042490A priority Critical patent/JPH0494116A/ja
Publication of JPH0494116A publication Critical patent/JPH0494116A/ja
Publication of JPH0568090B2 publication Critical patent/JPH0568090B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP21042490A 1990-08-10 1990-08-10 スピンコータ Granted JPH0494116A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21042490A JPH0494116A (ja) 1990-08-10 1990-08-10 スピンコータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21042490A JPH0494116A (ja) 1990-08-10 1990-08-10 スピンコータ

Publications (2)

Publication Number Publication Date
JPH0494116A true JPH0494116A (ja) 1992-03-26
JPH0568090B2 JPH0568090B2 (enrdf_load_stackoverflow) 1993-09-28

Family

ID=16589087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21042490A Granted JPH0494116A (ja) 1990-08-10 1990-08-10 スピンコータ

Country Status (1)

Country Link
JP (1) JPH0494116A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0568090B2 (enrdf_load_stackoverflow) 1993-09-28

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