JPH0494116A - スピンコータ - Google Patents

スピンコータ

Info

Publication number
JPH0494116A
JPH0494116A JP21042490A JP21042490A JPH0494116A JP H0494116 A JPH0494116 A JP H0494116A JP 21042490 A JP21042490 A JP 21042490A JP 21042490 A JP21042490 A JP 21042490A JP H0494116 A JPH0494116 A JP H0494116A
Authority
JP
Japan
Prior art keywords
motor
wafer
casing
clearance
electromagnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21042490A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0568090B2 (enrdf_load_stackoverflow
Inventor
Fumio Kondo
文雄 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP21042490A priority Critical patent/JPH0494116A/ja
Publication of JPH0494116A publication Critical patent/JPH0494116A/ja
Publication of JPH0568090B2 publication Critical patent/JPH0568090B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)
JP21042490A 1990-08-10 1990-08-10 スピンコータ Granted JPH0494116A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21042490A JPH0494116A (ja) 1990-08-10 1990-08-10 スピンコータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21042490A JPH0494116A (ja) 1990-08-10 1990-08-10 スピンコータ

Publications (2)

Publication Number Publication Date
JPH0494116A true JPH0494116A (ja) 1992-03-26
JPH0568090B2 JPH0568090B2 (enrdf_load_stackoverflow) 1993-09-28

Family

ID=16589087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21042490A Granted JPH0494116A (ja) 1990-08-10 1990-08-10 スピンコータ

Country Status (1)

Country Link
JP (1) JPH0494116A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0568090B2 (enrdf_load_stackoverflow) 1993-09-28

Similar Documents

Publication Publication Date Title
US5142177A (en) Magnetically controlled bearing unit
US4483570A (en) Magnetic bearing arrangement for an artificial satellite
US8461735B2 (en) Magnetically levitated and controlled body of revolution
JPH06267823A (ja) 位置決め装置
US4785212A (en) Large angle magnetic suspension system
US4890027A (en) Dynamic motor controller
CN1605145A (zh) 反作用平衡旋转驱动机构
JPH0494116A (ja) スピンコータ
JPH03111096A (ja) アンバランス修正装置
WO2001057473A1 (en) Reactionless rotary drive mechanism
JPH11166532A (ja) 磁気軸受装置
JPH01154115A (ja) 回転体支持装置
JPH04300417A (ja) 磁気軸受装置
US6196502B1 (en) Attitude control of spinning spacecraft with counterspun controls platform
US6440320B1 (en) Substrate processing method and apparatus
JPH0137215Y2 (enrdf_load_stackoverflow)
JPH11193820A (ja) 磁気軸受
JP3042545B2 (ja) 磁気軸受装置
JPH0319766A (ja) 回転体の動的バランサ
JPH0587139A (ja) 回転機械用磁気軸受装置
JPH0637208Y2 (ja) 制振型空気軸受
JP2006300017A (ja) フライホイールエネルギ貯蔵装置
JPH04340353A (ja) 周波数発電機付きモータ装置
JPH031903B2 (enrdf_load_stackoverflow)
JP2000350402A (ja) 情報機器用小型モータ