JPH0492635U - - Google Patents

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Publication number
JPH0492635U
JPH0492635U JP40631390U JP40631390U JPH0492635U JP H0492635 U JPH0492635 U JP H0492635U JP 40631390 U JP40631390 U JP 40631390U JP 40631390 U JP40631390 U JP 40631390U JP H0492635 U JPH0492635 U JP H0492635U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP40631390U
Other versions
JP2518355Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990406313U priority Critical patent/JP2518355Y2/ja
Publication of JPH0492635U publication Critical patent/JPH0492635U/ja
Application granted granted Critical
Publication of JP2518355Y2 publication Critical patent/JP2518355Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Weting (AREA)
JP1990406313U 1990-12-28 1990-12-28 浸漬型基板処理装置 Expired - Fee Related JP2518355Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990406313U JP2518355Y2 (ja) 1990-12-28 1990-12-28 浸漬型基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990406313U JP2518355Y2 (ja) 1990-12-28 1990-12-28 浸漬型基板処理装置

Publications (2)

Publication Number Publication Date
JPH0492635U true JPH0492635U (ja) 1992-08-12
JP2518355Y2 JP2518355Y2 (ja) 1996-11-27

Family

ID=31883590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990406313U Expired - Fee Related JP2518355Y2 (ja) 1990-12-28 1990-12-28 浸漬型基板処理装置

Country Status (1)

Country Link
JP (1) JP2518355Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010182735A (ja) * 2009-02-03 2010-08-19 Tokyo Electron Ltd 処理装置、処理方法、コンピュータプログラムおよび記憶媒体

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59156457A (ja) * 1983-02-25 1984-09-05 Taikisha Ltd 塗装ブ−ス
JPH0210728A (ja) * 1988-06-29 1990-01-16 Oki Electric Ind Co Ltd 半導体ウエハのウエット処理装置
JPH0276227A (ja) * 1988-09-12 1990-03-15 Sugai:Kk 基板の洗浄乾燥方法及びその装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59156457A (ja) * 1983-02-25 1984-09-05 Taikisha Ltd 塗装ブ−ス
JPH0210728A (ja) * 1988-06-29 1990-01-16 Oki Electric Ind Co Ltd 半導体ウエハのウエット処理装置
JPH0276227A (ja) * 1988-09-12 1990-03-15 Sugai:Kk 基板の洗浄乾燥方法及びその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010182735A (ja) * 2009-02-03 2010-08-19 Tokyo Electron Ltd 処理装置、処理方法、コンピュータプログラムおよび記憶媒体

Also Published As

Publication number Publication date
JP2518355Y2 (ja) 1996-11-27

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