JPH0492632U - - Google Patents
Info
- Publication number
- JPH0492632U JPH0492632U JP40631590U JP40631590U JPH0492632U JP H0492632 U JPH0492632 U JP H0492632U JP 40631590 U JP40631590 U JP 40631590U JP 40631590 U JP40631590 U JP 40631590U JP H0492632 U JPH0492632 U JP H0492632U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990406315U JPH071794Y2 (ja) | 1990-12-28 | 1990-12-28 | 浸漬型基板処理槽 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990406315U JPH071794Y2 (ja) | 1990-12-28 | 1990-12-28 | 浸漬型基板処理槽 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0492632U true JPH0492632U (xx) | 1992-08-12 |
JPH071794Y2 JPH071794Y2 (ja) | 1995-01-18 |
Family
ID=31883592
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990406315U Expired - Lifetime JPH071794Y2 (ja) | 1990-12-28 | 1990-12-28 | 浸漬型基板処理槽 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH071794Y2 (xx) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59134834A (ja) * | 1983-01-21 | 1984-08-02 | Mitsubishi Electric Corp | 半導体ウエハの洗浄装置 |
JPS614186A (ja) * | 1984-06-15 | 1986-01-10 | 小泉 博 | 円弧状加熱体の製法 |
JPS6129522A (ja) * | 1984-07-20 | 1986-02-10 | Japan Styrene Paper Co Ltd | 熱可塑性樹脂発泡シ−トの製造方法 |
JPH0234823U (xx) * | 1988-08-30 | 1990-03-06 | ||
JPH0276837U (xx) * | 1988-11-30 | 1990-06-13 |
-
1990
- 1990-12-28 JP JP1990406315U patent/JPH071794Y2/ja not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59134834A (ja) * | 1983-01-21 | 1984-08-02 | Mitsubishi Electric Corp | 半導体ウエハの洗浄装置 |
JPS614186A (ja) * | 1984-06-15 | 1986-01-10 | 小泉 博 | 円弧状加熱体の製法 |
JPS6129522A (ja) * | 1984-07-20 | 1986-02-10 | Japan Styrene Paper Co Ltd | 熱可塑性樹脂発泡シ−トの製造方法 |
JPH0234823U (xx) * | 1988-08-30 | 1990-03-06 | ||
JPH0276837U (xx) * | 1988-11-30 | 1990-06-13 |
Also Published As
Publication number | Publication date |
---|---|
JPH071794Y2 (ja) | 1995-01-18 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |