JPH0492632U - - Google Patents

Info

Publication number
JPH0492632U
JPH0492632U JP40631590U JP40631590U JPH0492632U JP H0492632 U JPH0492632 U JP H0492632U JP 40631590 U JP40631590 U JP 40631590U JP 40631590 U JP40631590 U JP 40631590U JP H0492632 U JPH0492632 U JP H0492632U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP40631590U
Other languages
Japanese (ja)
Other versions
JPH071794Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990406315U priority Critical patent/JPH071794Y2/ja
Publication of JPH0492632U publication Critical patent/JPH0492632U/ja
Application granted granted Critical
Publication of JPH071794Y2 publication Critical patent/JPH071794Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990406315U 1990-12-28 1990-12-28 浸漬型基板処理槽 Expired - Lifetime JPH071794Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990406315U JPH071794Y2 (ja) 1990-12-28 1990-12-28 浸漬型基板処理槽

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990406315U JPH071794Y2 (ja) 1990-12-28 1990-12-28 浸漬型基板処理槽

Publications (2)

Publication Number Publication Date
JPH0492632U true JPH0492632U (cs) 1992-08-12
JPH071794Y2 JPH071794Y2 (ja) 1995-01-18

Family

ID=31883592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990406315U Expired - Lifetime JPH071794Y2 (ja) 1990-12-28 1990-12-28 浸漬型基板処理槽

Country Status (1)

Country Link
JP (1) JPH071794Y2 (cs)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134834A (ja) * 1983-01-21 1984-08-02 Mitsubishi Electric Corp 半導体ウエハの洗浄装置
JPS614186A (ja) * 1984-06-15 1986-01-10 小泉　博 円弧状加熱体の製法
JPS6129522A (ja) * 1984-07-20 1986-02-10 Japan Styrene Paper Co Ltd 熱可塑性樹脂発泡シ−トの製造方法
JPH0234823U (cs) * 1988-08-30 1990-03-06
JPH0276837U (cs) * 1988-11-30 1990-06-13

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134834A (ja) * 1983-01-21 1984-08-02 Mitsubishi Electric Corp 半導体ウエハの洗浄装置
JPS614186A (ja) * 1984-06-15 1986-01-10 小泉　博 円弧状加熱体の製法
JPS6129522A (ja) * 1984-07-20 1986-02-10 Japan Styrene Paper Co Ltd 熱可塑性樹脂発泡シ−トの製造方法
JPH0234823U (cs) * 1988-08-30 1990-03-06
JPH0276837U (cs) * 1988-11-30 1990-06-13

Also Published As

Publication number Publication date
JPH071794Y2 (ja) 1995-01-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term