JPH048783A - Hot-melt sheet - Google Patents
Hot-melt sheetInfo
- Publication number
- JPH048783A JPH048783A JP11114490A JP11114490A JPH048783A JP H048783 A JPH048783 A JP H048783A JP 11114490 A JP11114490 A JP 11114490A JP 11114490 A JP11114490 A JP 11114490A JP H048783 A JPH048783 A JP H048783A
- Authority
- JP
- Japan
- Prior art keywords
- paper
- sheet
- shellac
- workpiece
- hot melt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012943 hotmelt Substances 0.000 title claims abstract description 16
- 239000011347 resin Substances 0.000 claims abstract description 13
- 229920005989 resin Polymers 0.000 claims abstract description 13
- 239000000835 fiber Substances 0.000 claims abstract description 8
- 229920001800 Shellac Polymers 0.000 abstract description 26
- 239000004208 shellac Substances 0.000 abstract description 26
- ZLGIYFNHBLSMPS-ATJNOEHPSA-N shellac Chemical compound OCCCCCC(O)C(O)CCCCCCCC(O)=O.C1C23[C@H](C(O)=O)CCC2[C@](C)(CO)[C@@H]1C(C(O)=O)=C[C@@H]3O ZLGIYFNHBLSMPS-ATJNOEHPSA-N 0.000 abstract description 26
- 229940113147 shellac Drugs 0.000 abstract description 26
- 235000013874 shellac Nutrition 0.000 abstract description 26
- 238000010438 heat treatment Methods 0.000 abstract description 13
- 238000005498 polishing Methods 0.000 abstract description 8
- 239000007787 solid Substances 0.000 abstract description 3
- 239000004744 fabric Substances 0.000 abstract description 2
- 239000010437 gem Substances 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 abstract description 2
- 239000000025 natural resin Substances 0.000 abstract description 2
- 239000004745 nonwoven fabric Substances 0.000 abstract description 2
- 239000000123 paper Substances 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 239000000057 synthetic resin Substances 0.000 abstract description 2
- 229920003002 synthetic resin Polymers 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229920000298 Cellophane Polymers 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Adhesive Tapes (AREA)
- Adhesives Or Adhesive Processes (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、半導体ウェハやレンズ及び腕時計のカバーガ
ラス等硬詭材の表面を研磨加工するに際し、被加工物（
以後ワークと記す）を研磨板に貼付けるための固着部材
に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention is applicable to a workpiece (
This invention relates to a fixing member for attaching a workpiece (hereinafter referred to as a workpiece) to a polishing plate.
従来のワークの表面を研磨する工程を第３図の（（イ）
〜（ホ）で説明すると、同図（（イ）の平面図と（ロ）
の側面図はワークを貼付けるためのワーク盤１０で、同
図（ハ）の側面図はこのワーク盤１０を加熱して、その
表面に一般にホットメルト樹脂と総称されるもので、詳
しくは後述するがこのような樹脂２を溶融塗付する、こ
の塗付した上に同図に）の平面図に示すようにワーク７
を配置し、同図（ホ）の側面図のようにプレス盤８で紙
やセロファンなど介在物９を介してプレスする。このと
きワーク盤１０は加熱され樹脂２の溶融によりワーク７
は固着される。このワーク盤は図示してない研磨装置に
セントされ、回転してワーク７の表面を研磨し、研磨の
終了したワーク盤ＩＯは再び加熱してワーク７を剥がし
て、個々のワークとして次の工程に移行していた。The conventional process of polishing the surface of a workpiece is shown in Figure 3 ((a)
To explain in ~(e), the plan view of the same figure ((a) and (b)
The side view in (c) shows the work board 10 for pasting the workpiece, and the side view in the same figure (c) shows the work board 10 being heated to apply what is generally called hot melt resin to its surface, which will be described in detail later. Then, the resin 2 is melted and applied onto the workpiece 7 as shown in the plan view (see the same figure).
are placed and pressed with a press plate 8 through an intervening material 9 such as paper or cellophane, as shown in the side view of the same figure (E). At this time, the work plate 10 is heated and the workpiece 7 is melted by the resin 2.
is fixed. This work disk is placed in a polishing device (not shown), rotates and polishes the surface of the workpiece 7, and after polishing, the work disk IO is heated again and the workpiece 7 is peeled off to be processed as an individual workpiece in the next process. was transitioning to.
上記のようなワークの固着方法のため、プレスや剥がし
などのときワークとワーク盤が直接接触するため、硬脆
材よりなるワークのエンヂ部に欠けやキズが発生し、ま
た剥がす作業も個々のワークを対象にしていて問題があ
った。本発明はこれらの問題を解決するに好適なワーク
固着部材を提供することを目的とするものである。Due to the workpiece fixation method described above, the workpiece comes into direct contact with the workpiece plate during pressing and peeling, resulting in chips and scratches on the edges of the workpiece made of hard and brittle materials, and the peeling process requires individual work. There was a problem because it was targeted at work. An object of the present invention is to provide a workpiece fixing member suitable for solving these problems.
本発明は上記問題を解決するために、繊維よりなるシー
ト面にホットメルト樹脂を熱融着させたホットメルトシ
ートを固着部材として提供するものである。In order to solve the above-mentioned problems, the present invention provides a hot-melt sheet, in which a hot-melt resin is thermally fused to a sheet surface made of fibers, as a fixing member.
本発明によるホットメルトシートは、繊維よりなるシー
トの面に樹脂を溶融付着させであるので、ワークの固着
に際し、繊維に備わる緩衝作用と、そのシート状に係わ
り、ワークの欠けや作業性の悪さを改善するものである
。Since the hot melt sheet according to the present invention is made by melting and adhering the resin to the surface of the sheet made of fibers, when the workpiece is fixed, the buffering effect of the fibers and the sheet shape are related to the problem of chipping of the workpiece and poor workability. It is intended to improve the
まず、本発明の「ホットメルトシート」を構成する素材
について説明をし、ここで解説した一般的な用語で実施
例の説明をする。First, the material constituting the "hot melt sheet" of the present invention will be explained, and examples will be explained using the general terms explained here.
構成材のホットメルト樹脂は詳しくは、天然及び合成樹
脂よりなり、常温とそれ以下では固形で、加熱により粘
性のある液状となり、加熱を解除すると固形化に戻る特
性を持つもので、前述した産業分野では主に「セラック
」と称呼されている。More specifically, the hot melt resin used as a constituent material is made of natural and synthetic resins, and has the property of being solid at room temperature and below, becoming a viscous liquid when heated, and returning to solidity when heating is removed. In the field, it is mainly called "shellac".
以後の実施例で「ホットメルト樹脂２」を「セラック２
」と同し符番で説明する。In the following examples, "hot melt resin 2" is replaced with "shellac 2".
” and will be explained using the same reference number.
また、繊維よりなるシートとは、詳しくは紙、布、及び
不織布などを指すが、以後の実施例では「紙」を使い、
その称呼を「ペーパー４」として説明する。そして、上
記「セラック２」と「ペーパー４」とで合成されたシー
トを「七ランクペーパー５」と表現して説明する。In addition, the sheet made of fiber specifically refers to paper, cloth, nonwoven fabric, etc., but in the following examples, "paper" will be used,
The name will be explained as "Paper 4". A sheet composed of the above-mentioned "shellac 2" and "paper 4" will be described as "7-rank paper 5."
では、本発明のセラックペーパーの製造方法の一例につ
いて第１図（（イ）〜（ト）の断面図で説明する。Now, an example of the method for manufacturing shellac paper of the present invention will be explained with reference to cross-sectional views of FIGS. 1 (A) to (G).
同図（（イ）は発熱していない熱台１の平面上に、セラ
ックを粉末状にしたセラツク粉２゛を篩３に入れ、振動
させて熱台１の上に均一に散布し、同図（ロ）のように
熱台１を加熱しセラック２を溶融状態にする。次に同図
ｆｉに示すように、溶融したセラック２の上に適宜に選
択されたペーパー４の一端部４゛を熱台１からはみ出し
て載せ、セラック２をペーパー４に浸透させる。このと
き必要ならば熱ローラ６を矢示ａのようにかけて浸看を
強化してもよい。次に同図に）に示すようにペーパー４
の端部４”を挟持して矢示すのように熱台１の表面より
下方に引摺りながら取り出す。このとき熱台ｌのコーナ
ーエンヂ１”と、ペーパー４の離れ際に、セラック２の
表面張力と、引摺り速度の均衡で均一で、かつ膜厚の制
御されたセラック２の被膜ができる。In the same figure ((a), on the flat surface of the heating table 1 which is not generating heat, shellac powder 2'' made by pulverizing shellac is placed in the sieve 3, and it is spread evenly on the heating table 1 by vibration. As shown in Figure (B), heat the heating table 1 to melt the shellac 2.Next, as shown in Figure fi, one end 4 of the appropriately selected paper 4 is placed on top of the melted shellac 2. The shellac 2 is placed on the paper 4 so as to protrude from the heating plate 1. At this time, if necessary, the heat roller 6 may be applied as shown by the arrow a to strengthen the penetration. like paper 4
Hold the edge 4'' of the paper 4 and take it out by dragging it downward from the surface of the heating plate 1 as shown by the arrow. At this time, the corner edge 1'' of the heating plate 1 and the surface of the shellac 2 as the paper 4 is separated. A shellac 2 coating with a uniform and controlled thickness can be produced by balancing tension and dragging speed.
このペーパー４を常温まで冷却すると、セラックペーパ
ーが完成するが、両面にセラック２を施す場合は、さら
に前述した（（イ）、＠図の工程の熱台１の上に、同図
（ホ）に示すように、セラック２を施してない面を下に
載置しセラック２゛を浸着させ、同図（へ）に示すよう
に上記に）図の説明と同じように制御しながら引摺り出
す、そして冷却を施したものが同図（ト）に示すように
ペーパー４の両面にセラック２と２°を熱融着した七ラ
ックペーパー５となる。When this paper 4 is cooled to room temperature, shellac paper is completed, but if shellac 2 is to be applied to both sides, it is necessary to apply shellac 2 on both sides as described above. As shown in the figure, place the surface without shellac 2 down and soak the shellac 2, and as shown in the figure (f), drag it under control in the same manner as explained in the figure above. After being taken out and cooled, a seven-lacquer paper 5 is obtained, as shown in FIG.
このセラックペーパー５は必要に応して各種の大きさが
得られるが、その特性として常温ではシート状で若干の
可撓性を備えている。This shellac paper 5 can be obtained in various sizes as required, but its characteristic is that it is sheet-like and has some flexibility at room temperature.
上記のようにして得た七ランクペーパー５は、前述した
第３図の（（イ）〜（ホ）の工程をたどるにおいて、同
図（ハ）の樹脂２を溶融塗付する工程がない、したがっ
てこの工程の加熱はなく、この塗付に代わってセラック
ペーパー５を載置し、その上に同図に）のようにワーク
７を配置する。次の同図（ホ）と同しようにワーク盤１
０を加熱しながらプレス盤８でプレスする。本発明のセ
ラックペーパー５の備える特徴の一つはこの加熱で溶融
しワーク７とワーク盤１０に圧接されながら間隙を保持
する。すなわちセラックペーパー５は、少なくともペー
パー４に備わる繊維質の部分はスペーサとしての機能を
もたらす、この圧着の状態で加熱を断ち、セラックペー
パー５にワーク７が固定され、位置が定まった条件とな
るまで冷却してからプレスを解除し、さらにワーク盤１
０を冷却し固着を強化する。次に図示してない研磨装置
にワーク盤１０をセントし、回転を加えながらワーク７
の表面を研磨する。The seventh rank paper 5 obtained as described above follows the steps ((a) to (e) in FIG. 3 described above) without the step of melting and applying the resin 2 shown in FIG. 3(c). Therefore, there is no heating in this step, and instead of this coating, a shellac paper 5 is placed and a workpiece 7 is placed on top of it as shown in the figure. Work board 1 as shown in the next figure (E).
0 is pressed using a press plate 8 while heating. One of the characteristics of the shellac paper 5 of the present invention is that it is melted by this heating and maintains a gap while being pressed against the workpiece 7 and the workpiece plate 10. In other words, the shellac paper 5, at least the fibrous portion of the paper 4, functions as a spacer.The heating is cut off in this crimped state until the workpiece 7 is fixed to the shellac paper 5 and the position is determined. After cooling, release the press, and then press work plate 1.
0 to strengthen its adhesion. Next, the work plate 10 is placed in a polishing device (not shown), and the work plate 7 is rotated.
Polish the surface.
本発明の七ランクペーパー５による特徴の一つは、研磨
の終わったワーク７をワーク盤１０から取りはずすに際
し、第２図の側面図に示すように、再び加熱したワーク
盤１０から、セラックペーパー５はワーク７を搭載した
まま矢示Ｃのように＃ＩＨし、ワーク７は一括して取り
出せることである。One of the features of the seventh rank paper 5 of the present invention is that when removing the polished work 7 from the work plate 10, as shown in the side view of FIG. #IH is performed as shown by arrow C with the workpiece 7 loaded, and the workpiece 7 can be taken out all at once.
このように作業性に優れていることと共に、この状態に
あって、このワーク７はセラックペーパ５によって連装
され、位置が定まっているので、次の剥離、洗浄などの
工程での作業にも有益である。In addition to being excellent in workability, in this state, the workpiece 7 is connected with shellac paper 5 and its position is fixed, so it is useful for the work in the next process such as peeling and cleaning. It is.
以上の説明でセラック材やペーパー材を特定していない
が、この素材の選択はワークの材質、寸法、形状、及び
研磨装置や砥材等により任意に選定されるものである。Although shellac material and paper material are not specified in the above description, the selection of these materials is arbitrary depending on the material, size, shape, polishing device, abrasive material, etc. of the workpiece.
本発明のホットメルトシートでワークとワーク盤を固着
することにより硬脆材質に発生しやすい欠けや、キズの
発生が防止できるとともに、作業性が一段と向上し、貴
石や半導体ウェハなどを歩留まりよく研磨加工ができる
など大きな効果をもたらすものである。By fixing the workpiece and workpiece plate using the hot melt sheet of the present invention, it is possible to prevent chips and scratches that tend to occur in hard and brittle materials, and further improve workability, polishing precious stones, semiconductor wafers, etc. with a high yield. It has great effects such as being able to be processed.
ペーパーを通用する側面図、第３図（（イ）〜（ホ）は
従来のホットメルト樹脂による固着を示す断面図である
。FIGS. 3(A) to 3(E) are sectional views showing fixation using conventional hot melt resin.
・・熱台
２′・・・ホットメルト樹脂（セラック）・・繊維より
なるシート（ペーパー）
・・ホットメルトシート （セラックペーパー）・・ワ
ーク
・・ワーク盤・・Hot melt resin (shellac) ・・Sheet made of fibers (paper) ・・Hot melt sheet (shellac paper) ・・Work・Work board
Claims (1)
せたことを特徴とするホットメルトシート。A hot-melt sheet characterized by having hot-melt resin heat-sealed to the surface of a sheet made of fibers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11114490A JPH048783A (en) | 1990-04-26 | 1990-04-26 | Hot-melt sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11114490A JPH048783A (en) | 1990-04-26 | 1990-04-26 | Hot-melt sheet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH048783A true JPH048783A (en) | 1992-01-13 |
Family
ID=14553574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11114490A Pending JPH048783A (en) | 1990-04-26 | 1990-04-26 | Hot-melt sheet |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH048783A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995011111A1 (en) * | 1993-10-19 | 1995-04-27 | Minnesota Mining And Manufacturing Company | Abrasive articles comprising a make coat transferred by lamination |
| JP2000311873A (en) * | 1999-02-26 | 2000-11-07 | The Inctec Inc | Dicing sheet |
-
1990
- 1990-04-26 JP JP11114490A patent/JPH048783A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995011111A1 (en) * | 1993-10-19 | 1995-04-27 | Minnesota Mining And Manufacturing Company | Abrasive articles comprising a make coat transferred by lamination |
| JP2000311873A (en) * | 1999-02-26 | 2000-11-07 | The Inctec Inc | Dicing sheet |
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