JPH0487774U - - Google Patents
Info
- Publication number
- JPH0487774U JPH0487774U JP40045790U JP40045790U JPH0487774U JP H0487774 U JPH0487774 U JP H0487774U JP 40045790 U JP40045790 U JP 40045790U JP 40045790 U JP40045790 U JP 40045790U JP H0487774 U JPH0487774 U JP H0487774U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40045790U JPH0487774U (ja) | 1990-12-12 | 1990-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40045790U JPH0487774U (ja) | 1990-12-12 | 1990-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487774U true JPH0487774U (ja) | 1992-07-30 |
Family
ID=31878700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP40045790U Pending JPH0487774U (ja) | 1990-12-12 | 1990-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487774U (ja) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5830371A (ja) * | 1981-08-17 | 1983-02-22 | Toshiba Corp | 塗装方法 |
| JPS59168639A (ja) * | 1983-03-15 | 1984-09-22 | Mitsubishi Electric Corp | レジスト材塗布装置 |
| JPS60110118A (ja) * | 1983-11-18 | 1985-06-15 | Toshiba Corp | レジスト塗布方法および装置 |
| JPS62221464A (ja) * | 1986-03-19 | 1987-09-29 | Mitsubishi Electric Corp | 回転塗布用真空吸着台 |
| JPS6457620A (en) * | 1987-08-27 | 1989-03-03 | Seiko Epson Corp | Rotary table for spinner |
| JPH01282819A (ja) * | 1988-05-09 | 1989-11-14 | Nec Corp | 回転塗布装置 |
| JPH02198131A (ja) * | 1989-01-27 | 1990-08-06 | Fuji Xerox Co Ltd | 基板に付着した不要なレジストの除去方法及びスピンコート装置 |
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1990
- 1990-12-12 JP JP40045790U patent/JPH0487774U/ja active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5830371A (ja) * | 1981-08-17 | 1983-02-22 | Toshiba Corp | 塗装方法 |
| JPS59168639A (ja) * | 1983-03-15 | 1984-09-22 | Mitsubishi Electric Corp | レジスト材塗布装置 |
| JPS60110118A (ja) * | 1983-11-18 | 1985-06-15 | Toshiba Corp | レジスト塗布方法および装置 |
| JPS62221464A (ja) * | 1986-03-19 | 1987-09-29 | Mitsubishi Electric Corp | 回転塗布用真空吸着台 |
| JPS6457620A (en) * | 1987-08-27 | 1989-03-03 | Seiko Epson Corp | Rotary table for spinner |
| JPH01282819A (ja) * | 1988-05-09 | 1989-11-14 | Nec Corp | 回転塗布装置 |
| JPH02198131A (ja) * | 1989-01-27 | 1990-08-06 | Fuji Xerox Co Ltd | 基板に付着した不要なレジストの除去方法及びスピンコート装置 |