JPH0487635U - - Google Patents
Info
- Publication number
- JPH0487635U JPH0487635U JP13024890U JP13024890U JPH0487635U JP H0487635 U JPH0487635 U JP H0487635U JP 13024890 U JP13024890 U JP 13024890U JP 13024890 U JP13024890 U JP 13024890U JP H0487635 U JPH0487635 U JP H0487635U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- motor
- surface treatment
- reactor
- inverter device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004381 surface treatment Methods 0.000 claims description 3
- 238000007664 blowing Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13024890U JPH0487635U (OSRAM) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13024890U JPH0487635U (OSRAM) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487635U true JPH0487635U (OSRAM) | 1992-07-30 |
Family
ID=31877604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13024890U Pending JPH0487635U (OSRAM) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487635U (OSRAM) |
-
1990
- 1990-11-30 JP JP13024890U patent/JPH0487635U/ja active Pending
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