JPH0247044U - - Google Patents

Info

Publication number
JPH0247044U
JPH0247044U JP12564288U JP12564288U JPH0247044U JP H0247044 U JPH0247044 U JP H0247044U JP 12564288 U JP12564288 U JP 12564288U JP 12564288 U JP12564288 U JP 12564288U JP H0247044 U JPH0247044 U JP H0247044U
Authority
JP
Japan
Prior art keywords
wafer
wafer transfer
transfer device
carrier
lifting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12564288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12564288U priority Critical patent/JPH0247044U/ja
Publication of JPH0247044U publication Critical patent/JPH0247044U/ja
Pending legal-status Critical Current

Links

JP12564288U 1988-09-28 1988-09-28 Pending JPH0247044U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12564288U JPH0247044U (OSRAM) 1988-09-28 1988-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12564288U JPH0247044U (OSRAM) 1988-09-28 1988-09-28

Publications (1)

Publication Number Publication Date
JPH0247044U true JPH0247044U (OSRAM) 1990-03-30

Family

ID=31376427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12564288U Pending JPH0247044U (OSRAM) 1988-09-28 1988-09-28

Country Status (1)

Country Link
JP (1) JPH0247044U (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001237306A (ja) * 2000-02-25 2001-08-31 Nikon Corp 基板ハンド、搬送装置、検査装置および平面基板収納装置
CN113799097A (zh) * 2020-06-16 2021-12-17 电装波动株式会社 板状工件的夹持装置和板状工件的夹持方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001237306A (ja) * 2000-02-25 2001-08-31 Nikon Corp 基板ハンド、搬送装置、検査装置および平面基板収納装置
CN113799097A (zh) * 2020-06-16 2021-12-17 电装波动株式会社 板状工件的夹持装置和板状工件的夹持方法
CN113799097B (zh) * 2020-06-16 2024-11-12 电装波动株式会社 板状工件的夹持装置和板状工件的夹持方法
US12208511B2 (en) 2020-06-16 2025-01-28 Denso Wave Incorporated Gripping apparatus for plate-shaped workpiece and gripping method for plate-shaped workpiece

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