JPH0487409A - Chip type piezoelectric resonator - Google Patents
Chip type piezoelectric resonatorInfo
- Publication number
- JPH0487409A JPH0487409A JP20363890A JP20363890A JPH0487409A JP H0487409 A JPH0487409 A JP H0487409A JP 20363890 A JP20363890 A JP 20363890A JP 20363890 A JP20363890 A JP 20363890A JP H0487409 A JPH0487409 A JP H0487409A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- groove
- piezoelectric substrate
- motherboard
- body substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 238000007789 sealing Methods 0.000 claims abstract description 23
- 239000000565 sealant Substances 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 abstract description 6
- 239000003795 chemical substances by application Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000003860 storage Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
り栗上夏■月金で
本発明は、発振回路、フィルタ回路等に使用されるチッ
プ型圧電共振子に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a chip-type piezoelectric resonator used in oscillation circuits, filter circuits, etc.
従迷!」0Lと!舅
従来、この種のチップ型圧電共振子としては、第7図及
び第8図に示すエネルギー閉じ込め型厚みすべり振動の
共振子が知られている。この共振子は1枚の圧電体基板
16を収納ケース19に収納した後、封止蓋25を収納
ケース19の開口端に固着させたものである。圧電体基
板16はその表裏面に振動電極17a、 17bが設け
られている。収納ケース19の両端部には引出し電極2
3a、 23bが設けられ、この電極23a、 23b
に圧電体基板16の振動電極17a。Obedience! ”0L! 2. Description of the Related Art Conventionally, as this type of chip-type piezoelectric resonator, energy-trap type thickness-shear vibration resonators shown in FIGS. 7 and 8 have been known. In this resonator, one piezoelectric substrate 16 is housed in a storage case 19, and then a sealing lid 25 is fixed to the open end of the storage case 19. The piezoelectric substrate 16 is provided with vibrating electrodes 17a and 17b on its front and back surfaces. Extracting electrodes 2 are provided at both ends of the storage case 19.
3a, 23b are provided, and these electrodes 23a, 23b
and a vibrating electrode 17a of the piezoelectric substrate 16.
17bが半田24を介して固定され、電気的に接続され
ている。この共振子の両端部に、外部電極(A〉。17b is fixed via solder 24 and electrically connected. External electrodes (A) are placed at both ends of this resonator.
(B)がそれぞれ引出し電極23a、 23bに接した
状態で設けられている。(B) are provided in contact with the extraction electrodes 23a and 23b, respectively.
以上のように、従来の圧電共振子は、圧電体基板16の
長さに収納ケース19の側壁の厚み分を加えた寸法が、
長手方向の寸法となる構造をしていたので、小型化には
限界があった。As described above, in the conventional piezoelectric resonator, the dimension is the length of the piezoelectric substrate 16 plus the thickness of the side wall of the storage case 19.
Since the structure had a longitudinal dimension, there was a limit to miniaturization.
そこで、本発明の課題は、圧電共振子の小型化を図るこ
とができる構造を有するチップ型圧電共振子を提供する
ことにある。Therefore, an object of the present invention is to provide a chip-type piezoelectric resonator having a structure that allows the piezoelectric resonator to be miniaturized.
を 決するための手段
以上の課題を解決するため、本発明に係るチップ型圧電
共振子は、マザーボードに圧電体基板を収納するための
溝と、該溝にオーバラップする振動空間形成用凹部とを
設け、振動電極を設けた圧電体基板を前記マザーボード
の溝に圧電体基板の両端部を溝の底面で支持する状態で
収納し、前記マザーボードの凹部と前記圧電体基板の両
端部に付与した封止剤と前記凹部の開口面を覆う封止板
とで密閉された振動空間を形成し、圧電体基板の両端面
が切出し面に露出するように、前記マザーボードと封止
板を圧電体基板毎に切り出したことを特徴とする。In order to solve the problem more than a means for determining, the chip-type piezoelectric resonator according to the present invention has a groove for accommodating a piezoelectric substrate in a motherboard, and a recess for forming a vibration space that overlaps the groove. A piezoelectric substrate provided with a vibrating electrode is housed in a groove of the motherboard with both ends of the piezoelectric substrate supported by the bottom of the groove, and a seal is applied to a recess of the motherboard and both ends of the piezoelectric substrate. A sealed vibration space is formed by the sealing agent and a sealing plate that covers the opening surface of the recess, and the motherboard and the sealing plate are attached to each piezoelectric substrate so that both end surfaces of the piezoelectric substrate are exposed to the cutout surface. It is characterized by being cut out.
作−F
以上の構成において、圧電体基板の両端面が切出し面に
露出するようにマザーボードと封止板とを切り出したた
め、圧電体基板がチップ型圧電共振子の側面に露出する
構造となり、この露出部において振動電極が外部電極に
接続きれる。従って、従来のように収納ケースの側壁の
厚み分を圧電共振子の長きに加えなくてすみ、圧電共振
子の長ξと圧電体基板の長きとが略等しくなる。Construction-F In the above configuration, the motherboard and the sealing plate were cut out so that both end surfaces of the piezoelectric substrate were exposed on the cut-out surfaces, resulting in a structure in which the piezoelectric substrate was exposed on the sides of the chip-type piezoelectric resonator. The vibrating electrode can be connected to the external electrode at the exposed portion. Therefore, it is not necessary to add the thickness of the side wall of the storage case to the length of the piezoelectric resonator as in the conventional case, and the length ξ of the piezoelectric resonator and the length of the piezoelectric substrate become approximately equal.
衷施り
以下、本発明に係る圧電共振子の一実施例を添付図面を
参照して説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, one embodiment of a piezoelectric resonator according to the present invention will be described with reference to the accompanying drawings.
第1図は、本実施例に係るチップ型圧電共振子のマザー
ボード状態の分解斜視図を示す。マザーボード1は、そ
の上面に圧電体基板を収納するための溝2を2本形成し
ている。この溝2にオーバラップして振動空間形成用凹
部3が一定の間隔で配置されている。マザーボード1の
材質には、セラミックスや樹脂等の耐熱性、耐溶剤性の
優れた絶縁材を使用する。FIG. 1 shows an exploded perspective view of a chip-type piezoelectric resonator in a motherboard state according to this embodiment. The motherboard 1 has two grooves 2 formed on its upper surface for accommodating piezoelectric substrates. Vibration space forming recesses 3 are arranged overlapping the groove 2 at regular intervals. The motherboard 1 is made of an insulating material with excellent heat resistance and solvent resistance, such as ceramics or resin.
圧電体基板5は、共振子毎に既に切断きれており、その
表裏面に振動電極6a、 6bが形成されている。圧電
体基板5の材質にはBaTio sやPb(ZrTi)
Onのセラミックス基板等が使用される。この圧電体基
板5は、マザーボード1の溝2に水平に縦列に収納され
ている。即ち、圧電体基板5の両端部を溝2の底面2a
で支持する状態で収納きれている。The piezoelectric substrate 5 has already been cut for each resonator, and vibrating electrodes 6a and 6b are formed on its front and back surfaces. The material of the piezoelectric substrate 5 is BaTios or Pb (ZrTi).
A ceramic substrate or the like is used. The piezoelectric substrates 5 are housed horizontally in the grooves 2 of the motherboard 1 in vertical rows. That is, both ends of the piezoelectric substrate 5 are connected to the bottom surface 2a of the groove 2.
It is fully stored with support.
圧電体基板5相互は若干離れていても、あるいは接して
いてもよい。さらに、各圧電体基板5の両端部には封止
剤7が付与される(第2図参照)。The piezoelectric substrates 5 may be slightly apart from each other or may be in contact with each other. Furthermore, a sealant 7 is applied to both ends of each piezoelectric substrate 5 (see FIG. 2).
この封止剤は、絶縁材料、導電材料いずれであってもよ
い。This sealant may be either an insulating material or a conductive material.
次に、圧電体基板5が収納されたマザーボード1は、上
側から封止板8で覆われる。こうして、マザーボード1
の凹部3と封止剤7と封止板8とで密閉きれた振動空間
が形成きれる。Next, the motherboard 1 containing the piezoelectric substrate 5 is covered with a sealing plate 8 from above. In this way, motherboard 1
A completely sealed vibration space is formed by the recess 3, the sealant 7, and the sealing plate 8.
第2150に示すように、組み立てられたマザーボード
1は当て板材9に仮付けきれた後、カッター10により
圧電体基板5の両端面5aが切出し面に露出するように
圧電体基板5毎に切り出きれる。As shown in No. 2150, after the assembled motherboard 1 is temporarily attached to the backing plate material 9, the piezoelectric substrate 5 is cut out by the cutter 10 so that both end surfaces 5a of the piezoelectric substrate 5 are exposed on the cutting surface. I can do it.
第3図に切り出された後のチップ型圧電共振子の外観を
示す、切り出きれることによって、マザーボード1及び
封止板8は、収納ケース12及び封止蓋13を構成する
こととなる。収納ケース12の側面には圧電体基板5の
端面5a及び振動電極6a、 6bが露出している。FIG. 3 shows the appearance of the chip-type piezoelectric resonator after being cut out. By cutting out the motherboard 1 and the sealing plate 8, the motherboard 1 and the sealing plate 8 constitute a storage case 12 and a sealing lid 13. The end surface 5a of the piezoelectric substrate 5 and the vibrating electrodes 6a and 6b are exposed on the side surface of the storage case 12.
次に、第4図及び第5図に示すように、このチップ型圧
電共振子の両端部に外部電極(A)、(B)がそれぞれ
圧電共振子の側面に露出した振動電極6g、6bに電気
的に接続した状態で形成される。外部電極(A)、(B
)はAg、 Ag−Pd等のペーストを塗布して焼付け
たり、スパッタ、蒸着、めっき等の方法により形成され
る。Next, as shown in FIGS. 4 and 5, external electrodes (A) and (B) are attached to the vibrating electrodes 6g and 6b exposed on the sides of the piezoelectric resonator, respectively, at both ends of the chip-type piezoelectric resonator. Formed in an electrically connected state. External electrodes (A), (B
) is formed by coating and baking a paste such as Ag or Ag-Pd, or by sputtering, vapor deposition, plating, or other methods.
こうして得られた圧電共振子は、その長さが圧電体基板
5の長さと略等しく、従来の圧電共振子と比較して寸法
が/J\さくなっている。The length of the thus obtained piezoelectric resonator is approximately equal to the length of the piezoelectric substrate 5, and the dimensions are smaller than the conventional piezoelectric resonator.
なお、本発明に係るチップ型圧電共振子は、前記実施例
に限定きれるものではなく、その要旨の範囲内で種々に
変更することができる。Note that the chip-type piezoelectric resonator according to the present invention is not limited to the embodiments described above, and can be variously modified within the scope of the gist.
密閉した振動空間を形成する方法としては、前記実施例
に限定されるものではない。例えば、封止剤7を付与す
る前に、第6図に示す封止板8をマザーボード1の上面
に貼り合わせ、封止板8゛に設けた孔8aから封止剤7
を注入して圧電体基板5の両端部を封止してもよい。こ
の孔8aは後でカット時に除去きれる。ただし、封止剤
注入用孔はマザーボード1と封止板8の少なくともいず
れか一方に設けられていればよい。The method of forming a sealed vibration space is not limited to the above embodiment. For example, before applying the sealant 7, a sealing plate 8 shown in FIG.
Alternatively, both ends of the piezoelectric substrate 5 may be sealed by injecting the same. This hole 8a can be removed later during cutting. However, the sealant injection hole may be provided in at least one of the motherboard 1 and the sealing plate 8.
また、圧電体基板はマザーボードに必ずしも水平に並べ
る必要はなく、垂直に(圧電体基板の幅方向をマザーボ
ードの厚き方向にセットして)並べてもよい。この場合
、マザーボードは板厚の厚いモノを準備し、マザーボー
ドに設ける溝や振動空間形成用凹部は前記実施例より深
くする必要がある。Further, the piezoelectric substrates do not necessarily need to be arranged horizontally on the motherboard, but may be arranged vertically (with the width direction of the piezoelectric substrate set in the thickness direction of the motherboard). In this case, it is necessary to prepare a thick motherboard, and to make the grooves and recesses for forming the vibration space deeper in the motherboard than in the above embodiments.
さらに、圧電体基板は、複数個の共振子を縦列配置した
ユニット基板の状態で、マザーボードに収納してもよい
。Further, the piezoelectric substrate may be housed in the motherboard in the form of a unit substrate in which a plurality of resonators are arranged in tandem.
え肌二匁玉
以上のように、本発明によれば、圧電体基板の両端面が
切出し面に露出するようにマザーボートド封止基板とを
切り出したため、圧電体基板がチップ型圧電共振子の側
面に露出する構造となり、圧電共振子の長諮と圧電体基
板の長さとが略等しい寸法になる。従って、従来のよう
に収納ケースの側壁の厚み分を圧電共振子の長きに加え
なくてすみ、圧電共振子の小型化を図ることができる。As described above, according to the present invention, the piezoelectric substrate is cut out from the motherboard sealing substrate so that both end surfaces of the piezoelectric substrate are exposed on the cutout surface, so that the piezoelectric substrate can be used as a chip-type piezoelectric resonator. The structure is exposed on the side, and the length of the piezoelectric resonator and the length of the piezoelectric substrate are approximately equal. Therefore, it is not necessary to add the thickness of the side wall of the storage case to the length of the piezoelectric resonator as in the conventional case, and the piezoelectric resonator can be made smaller.
第1図ないし第5図は本発明に係るチップ型圧電共振子
の一実施例を示すもので、第1図はマザーボード状態の
分解斜視図、第2図は切出し方法を説明する垂直断面図
、第3図は切り出した後の圧電共振子を示す斜視図、第
4図は製品の外観を示す斜視図、第5図は第4図のx−
x’の垂直断面図である。第6図は封止板の他の変形例
を示す斜視図である。第7図及び第8図はそれぞれ従来
のチップ型圧電共振子を示す分解斜視図及び垂直断面図
である。
1・・・マザーボード、2・・・溝、2a・・・溝底面
、3・・・振動空間形成用凹部、5・・・圧電体基板、
5a・・・圧i体基板端面、6a、 6b・・・振動電
極、7・・・封止剤、8゜8゛・・・封止板、12・・
・収納ケース、13・・・封止蓋。
特許出願人 株式会社村田製作所1 to 5 show an embodiment of a chip-type piezoelectric resonator according to the present invention, in which FIG. 1 is an exploded perspective view of a motherboard state, FIG. 2 is a vertical sectional view illustrating a cutting method, and FIG. Figure 3 is a perspective view showing the piezoelectric resonator after cutting out, Figure 4 is a perspective view showing the external appearance of the product, and Figure 5 is the x-
It is a vertical cross-sectional view of x'. FIG. 6 is a perspective view showing another modification of the sealing plate. FIGS. 7 and 8 are an exploded perspective view and a vertical cross-sectional view, respectively, showing a conventional chip-type piezoelectric resonator. DESCRIPTION OF SYMBOLS 1... Motherboard, 2... Groove, 2a... Groove bottom surface, 3... Recessed part for forming vibration space, 5... Piezoelectric substrate,
5a... end face of pressure i-type substrate, 6a, 6b... vibrating electrode, 7... sealing agent, 8゜8゛... sealing plate, 12...
・Storage case, 13...Sealing lid. Patent applicant Murata Manufacturing Co., Ltd.
Claims (1)
該溝にオーバラップする振動空間形成用凹部とを設け、
振動電極を設けた圧電体基板を前記マザーボードの溝に
圧電体基板の両端部を溝の底面で支持する状態で収納し
、前記マザーボードの凹部と前記圧電体基板の両端部に
付与した封止剤と前記凹部の開口面を覆う封止板とで密
閉された振動空間を形成し、圧電体基板の両端面が切出
し面に露出するように、前記マザーボードと封止板を圧
電体基板毎に切り出したことを特徴とするチップ型圧電
共振子。1. A groove for storing the piezoelectric substrate on the motherboard,
a recess for forming a vibration space that overlaps the groove;
A piezoelectric substrate provided with a vibrating electrode is stored in a groove of the motherboard with both ends of the piezoelectric substrate supported by the bottom of the groove, and a sealant is applied to the recess of the motherboard and both ends of the piezoelectric substrate. and a sealing plate that covers the opening surface of the recess to form a sealed vibration space, and the motherboard and the sealing plate are cut out for each piezoelectric substrate so that both end surfaces of the piezoelectric substrate are exposed to the cutout surface. A chip-type piezoelectric resonator characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20363890A JPH0487409A (en) | 1990-07-30 | 1990-07-30 | Chip type piezoelectric resonator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20363890A JPH0487409A (en) | 1990-07-30 | 1990-07-30 | Chip type piezoelectric resonator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0487409A true JPH0487409A (en) | 1992-03-19 |
Family
ID=16477366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20363890A Pending JPH0487409A (en) | 1990-07-30 | 1990-07-30 | Chip type piezoelectric resonator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0487409A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59110217A (en) * | 1982-12-14 | 1984-06-26 | Murata Mfg Co Ltd | Piezoelectric oscillating parts in chip shape and its manufacture |
JPS61234611A (en) * | 1985-04-10 | 1986-10-18 | Matsushita Electric Ind Co Ltd | Ceramic vibrator |
JPH025929B2 (en) * | 1984-03-08 | 1990-02-06 | Musashi Seimitsu Kogyo Kk |
-
1990
- 1990-07-30 JP JP20363890A patent/JPH0487409A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59110217A (en) * | 1982-12-14 | 1984-06-26 | Murata Mfg Co Ltd | Piezoelectric oscillating parts in chip shape and its manufacture |
JPH025929B2 (en) * | 1984-03-08 | 1990-02-06 | Musashi Seimitsu Kogyo Kk | |
JPS61234611A (en) * | 1985-04-10 | 1986-10-18 | Matsushita Electric Ind Co Ltd | Ceramic vibrator |
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