JPH03247010A - Piezoelectric resonator - Google Patents

Piezoelectric resonator

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Publication number
JPH03247010A
JPH03247010A JP4387590A JP4387590A JPH03247010A JP H03247010 A JPH03247010 A JP H03247010A JP 4387590 A JP4387590 A JP 4387590A JP 4387590 A JP4387590 A JP 4387590A JP H03247010 A JPH03247010 A JP H03247010A
Authority
JP
Japan
Prior art keywords
electrode
electrodes
internal
capacitance
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4387590A
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Japanese (ja)
Inventor
Yasuhiro Tanaka
田中 康廣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
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Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP4387590A priority Critical patent/JPH03247010A/en
Publication of JPH03247010A publication Critical patent/JPH03247010A/en
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To suppress generation of migration and solder bridge and to conform to miniaturization by forming capacitance with an input output electrode and a common electrode and an internal electrode and the common electrode respectively. CONSTITUTION:Input output electrodes A, B and a common electrode C are formed to left/right ends of an oscillator 1 and in the middle respectively, an electrode 4a and internal electrodes 6a, 7a are connected to the electrode A and a leadout electrode 4b and internal electrodes 6b, 7b are connected to the other electrode B. Moreover, the electrode C is formed in stripes in the middle, the electrodes A-C are used as mount electrodes to a printed circuit board or the like and the function as the capacitance electrode is provided. That is, static capacitances C1, C2 are formed between the electrodes A-C and between the electrodes B-C. Furthermore, the common electrode C and the internal electrodes 6a, 6b, 7a, 7b and sealing bases 5, 8 form capacitance to obtain synthesized capacitances Ca, Cb. Thus, production of migration or solder bridge is suppressed conforming to miniaturization of components.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、発振回路やフィルタ回路等に使用されるコン
デンサ内蔵タイプの圧電共振子に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a piezoelectric resonator with a built-in capacitor used in oscillation circuits, filter circuits, and the like.

λ肌凶責1 圧電共振子を使用した回路として、例えば第10図に示
す発振回路が知られている。この回路は入出力電極(A
)、(B)間に圧電共振子を接続すると共に、入出力電
極(A)、(B)と共通電極(C)の間にそれぞれ静電
容量C1,C2を接続したものである。
As a circuit using a piezoelectric resonator, for example, an oscillation circuit shown in FIG. 10 is known. This circuit consists of input and output electrodes (A
), (B), and capacitances C1, C2 are connected between the input/output electrodes (A), (B) and the common electrode (C), respectively.

第10図に示す回路を構成するには、第11図〜第13
図に示すコンデンサ内蔵発振子30が考えられる。この
発振子30は1枚の圧電体基板31と2枚の封止基板3
4.35から成る。
To configure the circuit shown in FIG. 10, the circuit shown in FIGS.
A condenser built-in oscillator 30 shown in the figure can be considered. This oscillator 30 includes one piezoelectric substrate 31 and two sealing substrates 3.
Consists of 4.35.

圧電体基板31は圧電セラミックス基板等が使用されて
いる。基板31の中央上下面に振動電極32a。
As the piezoelectric substrate 31, a piezoelectric ceramic substrate or the like is used. Vibrating electrodes 32a are provided on the upper and lower surfaces of the center of the substrate 31.

32bが対向して形成きれている。振動電極32a93
2bはそれぞれ引出し電極33a、 33bに接続きれ
ている。この基板31と、板厚方向に重ねられた封止基
板34.35とが接着剤37.37によって固着され、
接着層の厚みによって密閉された振動空間を形成してい
る(第13図)。封止基板34.35は誘電体基板が使
用されている。
32b are formed facing each other. Vibrating electrode 32a93
2b are connected to extraction electrodes 33a and 33b, respectively. This substrate 31 and a sealing substrate 34.35 stacked in the thickness direction are fixed with an adhesive 37.37,
The thickness of the adhesive layer forms a sealed vibration space (Fig. 13). Dielectric substrates are used as the sealing substrates 34 and 35.

第12図に接着剤37.37で固着された発振子30の
外観を示す。入出力電極(A)、(B)がそれぞれ引出
し電極33a、 33bに接続された状態で形成されて
いる。同様にして共通電極(C)が発振子30の中央部
に帯状に形成されている。これらの電極(A)。
FIG. 12 shows the appearance of the oscillator 30 fixed with adhesive 37.37. Input/output electrodes (A) and (B) are formed connected to extraction electrodes 33a and 33b, respectively. Similarly, a common electrode (C) is formed in a strip shape at the center of the oscillator 30. These electrodes (A).

(B)、(C)はプリント配線板等への取付は用電極と
して使用されると共に、容量電極としての機能をも有し
ている。即ち、電極(A)−(C)間及び電極(B)−
(C)間に静電容量C1,C2が形成される。
(B) and (C) are used as electrodes when attached to a printed wiring board, etc., and also have a function as a capacitive electrode. That is, between electrodes (A) and (C) and between electrodes (B) and
(C) Capacitances C1 and C2 are formed between them.

通常、このコンデンサ内蔵発振子30が有する容量C1
,C2は実用上使用され得る容量である。
Usually, the capacitance C1 that this capacitor built-in oscillator 30 has
, C2 are capacities that can be used practically.

ところで、さらにDIE容量C1,C2を大きくする必
要がある場合には電極(A)−(C)間及び電極(B)
−(C)間のギャップを狭くするか、あるいは電極(A
)、(B)、(C)が形成する対向面積を大きくする必
要がある。しかし、ギャップを狭くするとマイグレーシ
ョンが発生しやすく、また、半田付けの際に半田ブリッ
ジ等が生じてショートを起こすおそれがある。また、対
向面積を大きくすると、部品が大型化するという問題が
生じる。
By the way, if it is necessary to further increase the DIE capacitances C1 and C2, the distance between electrodes (A) and (C) and between electrodes (B)
- (C) or narrow the gap between the electrodes (A
), (B), and (C) need to increase the opposing area formed by them. However, when the gap is narrowed, migration is likely to occur, and there is also a risk that solder bridges may occur during soldering, resulting in a short circuit. Furthermore, if the opposing area is increased, a problem arises in that the parts become larger.

登肌卑晟l そこで、本発明の課題は、静電容量を大きくしてもマイ
グレーションや半田ブリッジ等が発生しにくく、しかも
部品の小型化に対応できるコンデンサ内蔵タイプの圧電
共振子を提供することにある。
Therefore, an object of the present invention is to provide a piezoelectric resonator with a built-in capacitor that is less likely to cause migration or solder bridging even when the capacitance is increased, and that can accommodate miniaturization of components. It is in.

課題を解決するための手段 以上の課題を解決するため、本発明に係る圧電共振子は
、誘電体封止部材の振動空間形成側表面に入出力電極と
接続する内部電極を設け、前記入出力電極と前記共通電
極、前記内部電極と前記共通電極とでそれぞれ容量部を
形成したことを特徴とする。
Means for Solving the Problems In order to solve the problems above, the piezoelectric resonator according to the present invention is provided with an internal electrode connected to the input/output electrode on the vibration space forming side surface of the dielectric sealing member. The electrode and the common electrode, and the internal electrode and the common electrode each form a capacitor part.

作用 以上の構成において、容量は入出力電極と共通電極との
間で得られると共に、共通電極と内部電極との間でも得
られるため、容量がアップする。
Effect In the above configuration, capacitance is obtained not only between the input/output electrode and the common electrode, but also between the common electrode and the internal electrode, so that the capacitance increases.

従って、入出力電極と共通電極間のギャップを狭くする
ことなく、大きな容量が得られるため、マイグレーショ
ンや半田ブリッジ等の心配がなくなる。また、部品の外
形寸法を小キくシても実用上充分な容量が得られる。
Therefore, a large capacitance can be obtained without narrowing the gap between the input/output electrode and the common electrode, eliminating concerns about migration, solder bridging, etc. Further, even if the external dimensions of the parts are reduced, a practically sufficient capacity can be obtained.

叉扇忽 以下、本発明に係る圧電共振子の実施例をその製造方法
と共に説明する。圧電共振子として、発振回路に使用さ
れる発振子を例にして説明するが、本発明はこれに限定
きれるものではなく、フィルタ回路等に使用される共振
子であってもよい。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a piezoelectric resonator according to the present invention will be described together with a method for manufacturing the same. Although the piezoelectric resonator will be described using an oscillator used in an oscillation circuit as an example, the present invention is not limited to this, and may be a resonator used in a filter circuit or the like.

[第1実施例、第1図〜第4図] 第1図にコンデンサ内蔵三端子発振子1の分解斜視図を
示す。この発振子1は1枚の圧電体基板と2枚の誘電体
封止基板から構成きれている。圧電体基板2は上下面に
振動電極3a、 3bが形成されている。さらに、電極
3aは基板2の左辺に形成されている引出し電極4aに
接続され、電極3bは基板2の右辺に形成きれている引
出し電極4bに接続されている。圧電体基板2にはPb
(ZrTi)On 、 Bal10mのセラミックス基
板等が使用される。
[First Embodiment, FIGS. 1 to 4] FIG. 1 shows an exploded perspective view of a three-terminal resonator 1 with a built-in capacitor. This oscillator 1 is composed of one piezoelectric substrate and two dielectric sealing substrates. The piezoelectric substrate 2 has vibrating electrodes 3a and 3b formed on its upper and lower surfaces. Further, the electrode 3a is connected to an extraction electrode 4a formed on the left side of the substrate 2, and the electrode 3b is connected to an extraction electrode 4b formed on the right side of the substrate 2. The piezoelectric substrate 2 contains Pb
(ZrTi)On, Bal10m ceramic substrates, etc. are used.

封止基板5,8はBariOs等の誘電体基板が使用き
れる。封止基板5の下面の左右には2個の内部電極6a
、 6bが形成されている。内部電極6aの一端は基板
5の左辺に露出し、内部電極6bの一端は基板5の右辺
に露出している。封止基板8の上面左右には2個の内部
電極7a、7bが形成されている。
Dielectric substrates such as BariOs can be used as the sealing substrates 5 and 8. Two internal electrodes 6a are provided on the left and right sides of the bottom surface of the sealing substrate 5.
, 6b are formed. One end of the internal electrode 6a is exposed on the left side of the substrate 5, and one end of the internal electrode 6b is exposed on the right side of the substrate 5. Two internal electrodes 7a and 7b are formed on the left and right sides of the upper surface of the sealing substrate 8.

内部電極7a、 7bの一端はそれぞれ基板8の左辺、
右辺に露出している。
One end of the internal electrodes 7a and 7b is the left side of the substrate 8, respectively.
It is exposed on the right side.

なお、これら基板2,5.8は、実際の量産工程では広
面積のものを用い、積層後に所定寸法にカットする。
In the actual mass production process, these substrates 2, 5.8 have a wide area and are cut into predetermined dimensions after being laminated.

こうして準備された基板2,5.8は塗布された接着剤
12によって互いに直接接触しないように距離を保って
固着され、密閉された振動空間を形成する(第3図参照
)。圧電体基板2と封止基板5.8とが形成する密閉さ
れた振動空間形成側に内部電極6a、 6b、 7a、
 7bが設けられている。
The substrates 2, 5.8 prepared in this way are fixed to each other by the applied adhesive 12 at a distance so as not to come into direct contact with each other, thereby forming a sealed vibration space (see FIG. 3). Internal electrodes 6a, 6b, 7a, on the side where a sealed vibration space is formed by the piezoelectric substrate 2 and the sealing substrate 5.8
7b is provided.

第2図に発振子1の外観を示す。発振子1の左右の端部
及び中央部にそれぞれ入出力電極(A)。
FIG. 2 shows the appearance of the resonator 1. Input and output electrodes (A) are provided at the left and right ends and the center of the oscillator 1, respectively.

(B)並びに共通電極(C)が形成されている。電極(
A)には、引出し電極4a及び内部電極6a、 7aが
接続されている。他方の電極(B)には、引出し電極4
b及び内部電極6b、 7bが接続されている。さらに
、電極(C)が発振子1の中央部に帯状に形成されてい
る。これらの電極(A)、(B)、(C)はプリント配
線板等への取付は用電極として使用されると共に、容量
電極としての機能をも有している。即ち、電極(A)−
(C)間に静電容量C1が形成され、電極(B)−(C
)間に静電容量C2が形成される。さらに、共通電極(
C)と内部電極6a、 6b、 7a、 7bと封止基
板5.8とでコンデンサが形成され、電極(C)−内部
電極68間及び電極(C)−内部電極7a間に形成され
る静電容量Ca ’ 、 Ca”を合成した合成容量C
a、 ’It極(C)−内部電極6b間及び電極(C)
−内部電極7b間に形成される静電容量Cb’、Cb“
を合成した合成容量cbが得られる。従って、外部電極
間のギャップを狭くすることなく、大きな容量が得られ
るため、マイグレーションや半田ブリッジ等のおそれが
なく、電気的な信頼性の高い部品が得られる。
(B) and a common electrode (C) are formed. electrode(
A) is connected to an extraction electrode 4a and internal electrodes 6a and 7a. The other electrode (B) has an extraction electrode 4.
b and internal electrodes 6b and 7b are connected. Further, an electrode (C) is formed in a band shape at the center of the oscillator 1. These electrodes (A), (B), and (C) are used as electrodes for attachment to a printed wiring board, etc., and also have a function as capacitive electrodes. That is, electrode (A)-
A capacitance C1 is formed between electrodes (B) and (C).
) A capacitance C2 is formed between the two. In addition, a common electrode (
A capacitor is formed by C), the internal electrodes 6a, 6b, 7a, 7b, and the sealing substrate 5.8, and static electricity is formed between the electrode (C) and the internal electrode 68 and between the electrode (C) and the internal electrode 7a. Composite capacitance C that combines capacitances Ca' and Ca''
a, 'It electrode (C) - internal electrode 6b and electrode (C)
- Capacitance Cb', Cb" formed between internal electrodes 7b
A composite capacitance cb is obtained by combining the . Therefore, a large capacitance can be obtained without narrowing the gap between the external electrodes, so that there is no risk of migration, solder bridges, etc., and a component with high electrical reliability can be obtained.

また、部品の外形寸法を小さくしても実用上充分な容量
が得られる。なお、得られる容量は電極(A)−(C)
間、並びに電極(B)−(C)間のギャップ、内部電極
6a、 6b、 7a、 7bの電極面積、封止基板5
.8の厚み等でフントロールされる。
Further, even if the external dimensions of the components are reduced, a practically sufficient capacity can be obtained. Note that the obtained capacity is between electrodes (A)-(C)
and the gap between electrodes (B) and (C), the electrode area of internal electrodes 6a, 6b, 7a, and 7b, and the sealing substrate 5
.. 8 thickness etc. will be hunt rolled.

以上の構成をした発振子1は第4図で示した電気回路と
同様の回路を有する。入出力電極(A”)−(B)間に
共振子が挿入され、静電容量C1,C2及び合成容量C
a、Cbがそれぞれ入出力電極(A)−共通電極(C)
間、入出力電極(B)−共通電極(C)間に挿入されて
いる。
The oscillator 1 having the above configuration has a circuit similar to the electric circuit shown in FIG. A resonator is inserted between the input and output electrodes (A”) and (B), and the capacitances C1 and C2 and the combined capacitance C
a and Cb are input and output electrodes (A) and common electrode (C), respectively.
It is inserted between the input/output electrode (B) and the common electrode (C).

[第2実施例、第5図及び第6図] 第5図に三端子発振子15の垂直断面図を示す。[Second Example, Figures 5 and 6] FIG. 5 shows a vertical cross-sectional view of the three-terminal oscillator 15.

この発振子15は1枚の圧電体基板と2枚の封止基板か
ら構成されている。圧電体基板16は上下面中央部に振
動電極17a、 17bが形成されている。さらに、振
動電極17aは圧電体基板16の左辺に形成されている
引出し電極18aに接続きれ、振動電極17bは圧電体
基板16の右辺に形成されている引出し電極18bに接
続されている。
This oscillator 15 is composed of one piezoelectric substrate and two sealing substrates. The piezoelectric substrate 16 has vibrating electrodes 17a and 17b formed at the center of its upper and lower surfaces. Further, the vibrating electrode 17a is connected to an extraction electrode 18a formed on the left side of the piezoelectric substrate 16, and the vibrating electrode 17b is connected to an extraction electrode 18b formed on the right side of the piezoelectric substrate 16.

封止基板19.22は誘電体基板が使用される。第6図
に示すように、封止基板19の上面中央部には円形の振
動空間形成用凹部19aが設けられ、その回りに円環形
状のパターンを有する内部電極20が形成きれている。
A dielectric substrate is used as the sealing substrate 19, 22. As shown in FIG. 6, a circular vibration space forming recess 19a is provided at the center of the upper surface of the sealing substrate 19, and an internal electrode 20 having an annular pattern is formed around the recess 19a.

内部電極20の一端は基板19の右辺に露出している。One end of the internal electrode 20 is exposed on the right side of the substrate 19.

同様に封止基板22の下面中央部には振動空間形成用凹
部22aが設けられ、その回りに円環形状のパターンを
有する内部電極23が形成されている。内部電極23の
一端は基板22の左辺に露出している。
Similarly, a vibration space forming recess 22a is provided at the center of the lower surface of the sealing substrate 22, and an internal electrode 23 having an annular pattern is formed around the recess 22a. One end of the internal electrode 23 is exposed on the left side of the substrate 22.

基板16.19.22は塗布された接着剤27によって
固着され、密閉された振動空間を形成している。このと
き、内部電極20.23はそれぞれ引出し電極18a、
 18bに直に接触している。但し、必ずしも内部電極
20.23と引出し電極18a、18bは接触している
必要はない。
The substrates 16, 19, 22 are fixed by an applied adhesive 27 to form a sealed vibration space. At this time, the internal electrodes 20 and 23 are the extraction electrodes 18a and 23, respectively.
18b. However, the internal electrodes 20.23 and the extraction electrodes 18a, 18b do not necessarily need to be in contact with each other.

発振子15の左右の端部及び中央部にはそれぞれ入出力
電極(A)、(B)並びに共通電極(C)が形成されて
いる。一方、入出力電極(A)には、引出し電極18a
及び内部電極23が接続されている。他方の入出力電極
(B)には、引出し電極18b及び内部電極20が接続
されている。きらに、共通電極(C)が発振子15の中
央部に帯状に形成されている。
Input/output electrodes (A), (B) and a common electrode (C) are formed at the left and right ends and the center of the oscillator 15, respectively. On the other hand, the input/output electrode (A) has a lead electrode 18a.
and internal electrodes 23 are connected. The extraction electrode 18b and the internal electrode 20 are connected to the other input/output electrode (B). Furthermore, a common electrode (C) is formed in the shape of a strip at the center of the oscillator 15.

得られた発振子15は、共通電極(C)と内部電極20
.23と封止基板19.22とでコンデンサが形成され
ている。従って、発振子15は電極(A)−(C)間に
静電容量C1、電極(B)−(C)間に静電容量C2、
さらに電極(C)−内部電極23間に静電容量Ca、 
を極(C)−内部電極20間に静電容量0が形成される
The obtained oscillator 15 has a common electrode (C) and an internal electrode 20.
.. 23 and the sealing substrates 19 and 22 form a capacitor. Therefore, the oscillator 15 has a capacitance C1 between electrodes (A) and (C), a capacitance C2 between electrodes (B) and (C),
Further, capacitance Ca between the electrode (C) and the internal electrode 23,
A capacitance of 0 is formed between the pole (C) and the internal electrode 20.

従って、発振子15は第4図で示した電気回路と同様の
回路を有する。
Therefore, the oscillator 15 has a circuit similar to the electrical circuit shown in FIG.

[第3実施例、第7区] 第7図は、本発明の第3実施例の発振子30を示す垂直
断面図である。圧電体基板31は表裏面に振動電極32
a、 32bが形成されている。振動電極32a。
[Third Embodiment, Section 7] FIG. 7 is a vertical sectional view showing an oscillator 30 according to a third embodiment of the present invention. The piezoelectric substrate 31 has vibrating electrodes 32 on the front and back surfaces.
a, 32b are formed. Vibrating electrode 32a.

32bの一方の端は反対面に回り込んでいる。One end of 32b wraps around to the opposite surface.

誘電体ケース33は収納容器34と封止蓋40とに2分
割されている。収納容器34は凹部34aを有し、この
凹部34aの左右の両側壁面に切込み35.35が設け
られ、この切込み35.35をガイドにして圧電体基板
31が横長の状態で水平に収納される。凹部34aの底
面の左右両側には段差36.36が設けられ、圧電体基
板31の両端部を支持して振動電極32a。
The dielectric case 33 is divided into two parts: a storage container 34 and a sealing lid 40. The storage container 34 has a recess 34a, and cutouts 35.35 are provided on the left and right side walls of the recess 34a, and the piezoelectric substrate 31 is stored horizontally in a horizontally long state using the cutouts 35.35 as a guide. . Steps 36, 36 are provided on both left and right sides of the bottom surface of the recess 34a, and support both ends of the piezoelectric substrate 31 to form the vibrating electrode 32a.

32bの振動部分が底壁面に接触しないようにしている
。収納容器34の左右両側、切込み35.35の部分並
びに凹部34a底面の左右両側部分にはスパッタ、ある
いは蒸着等の方法により導電パターン37゜38が形成
されている。さらに、収納容器34の中央部外面には共
通電極(C)が形成されている。振動電極32a、 3
2bは半田39.39を介して導電パターン37、38
に接続する。封止蓋40は収納容器34の開口端に接着
剤によって固着され、圧電体基板31は収納容器34と
封止蓋40によって密閉された振動空間に収納された状
態となる。
The vibrating portion of 32b is prevented from coming into contact with the bottom wall surface. Conductive patterns 37 and 38 are formed on both left and right sides of the storage container 34, at the notches 35 and 35, and on both left and right sides of the bottom surface of the recess 34a by a method such as sputtering or vapor deposition. Furthermore, a common electrode (C) is formed on the outer surface of the central portion of the storage container 34. Vibrating electrodes 32a, 3
2b is a conductive pattern 37, 38 via solder 39, 39.
Connect to. The sealing lid 40 is fixed to the open end of the storage container 34 with an adhesive, and the piezoelectric substrate 31 is housed in the vibration space sealed by the storage container 34 and the sealing lid 40.

こうして得られた発振子30は、導電パターン37゜3
8のうち凹部34a底面に形成されている内部電極部3
7a、 38aと共通電極(C)と収納容器34とでコ
ンデンサを形成している。また導電パターン37.38
のうち収納容器の左右端部外面に形成きれている入出力
電極部(A)、(B)は、共通電極(C)と共に容量電
極としての機能とプリント配線板等への取付は用電極と
しての機能を合わせもっている。従って、発振子30は
、電極部(A)−電極(C)間に静電容量C1、電極部
(B)−電極(C)間に静電容量C2、さらに、電極(
C)−内部電極部37a間に静電容量Ca、 v:極(
C)−内部電極部38a間に静電容量Cbが形成きれる
。従って、発振子30は第4図で示した電気回路と同様
の回路を有する。
The thus obtained oscillator 30 has a conductive pattern 37°3.
8, the internal electrode portion 3 formed on the bottom surface of the recess 34a
7a, 38a, the common electrode (C), and the storage container 34 form a capacitor. Also conductive pattern 37.38
Of these, the input/output electrodes (A) and (B) that are completely formed on the outer surface of the left and right ends of the storage container, together with the common electrode (C), function as capacitive electrodes and can be attached to printed wiring boards, etc. as electrodes. It has the following functions. Therefore, the oscillator 30 has a capacitance C1 between the electrode part (A) and the electrode (C), a capacitance C2 between the electrode part (B) and the electrode (C), and a capacitance C2 between the electrode part (B) and the electrode (C).
C) - electrostatic capacitance Ca between the internal electrode part 37a, v: pole (
C) A capacitance Cb is completely formed between the internal electrode portion 38a and the internal electrode portion 38a. Therefore, the oscillator 30 has a circuit similar to the electrical circuit shown in FIG.

[他の実施例] なお、本発明に係る圧電共振子は前記実施例に限定する
ものではなく、その要旨の範囲内で種々に変形すること
ができる。
[Other Examples] Note that the piezoelectric resonator according to the present invention is not limited to the above embodiments, and can be variously modified within the scope of the gist.

前記第1実施例及び第2実施例では2枚の封止基板の両
方に内部電極を形成した圧電共振子を示したが、必要な
静電容量が得られるのであれば、一方の封止基板にのみ
内部電極を形成するものでもよい。
In the first and second embodiments, a piezoelectric resonator is shown in which internal electrodes are formed on both of the two sealing substrates, but if the necessary capacitance can be obtained, one sealing substrate may be used. It is also possible to form internal electrodes only on the surface.

きらに、前記実施例では、誘電体封止部材の固着に接着
剤を使用しているが、かしめ等の手段を使用して固着す
るものであってもよい。
Furthermore, in the embodiment described above, an adhesive is used to fix the dielectric sealing member, but it may be fixed using means such as caulking.

また、封止部材に形成される内部電極はその配置、形状
は任意であって、例えば第2実施例の内部電極20は、
第8図あるいは第9図に示す内部電極20Aあるいは2
0Bであってよい。
Further, the arrangement and shape of the internal electrodes formed on the sealing member are arbitrary. For example, the internal electrodes 20 of the second embodiment are
Internal electrode 20A or 2 shown in FIG. 8 or 9
It may be 0B.

λ里OS+ 本発明は、容量が入出力電極と共通i極間及び共通電極
と内部電極との間で得られるため、容量がアップする。
λriOS+ In the present invention, the capacitance is increased because the capacitance is obtained between the input/output electrode and the common i electrode and between the common electrode and the internal electrode.

そのため、外部電極間のギャップを狭くすることなく、
大きな容量が得られ、マイグレーションや半田ブリッジ
等のおそれがなく、電気的な信頼性が高いコンデンサ内
蔵タイプの圧電共振子が得られる。
Therefore, without narrowing the gap between external electrodes,
A piezoelectric resonator with a built-in capacitor that has a large capacitance, is free from migration, solder bridges, etc., and has high electrical reliability can be obtained.

逆に、同じ外形寸法の部品で、同じ容量のコンデンサ内
蔵圧電共振子の場合、容量電極間のギャップをより広く
することができ、マイグレーションや半田ブリッジ等に
対する信頼性の向上が図れる。
Conversely, in the case of a piezoelectric resonator with a built-in capacitor having the same external dimensions and the same capacitance, the gap between the capacitor electrodes can be made wider, and reliability against migration, solder bridging, etc. can be improved.

さらに、部品の外形寸法を小さくしても実用上充分な容
量が得られる。
Furthermore, even if the external dimensions of the components are reduced, a practically sufficient capacity can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図ないし第4図は本発明に係る圧電共振子の第1実
施例を示すもので、第1図は分解斜視図、第2図は外観
を示す斜視図、第3図は第2図のX−X゛の垂直断面図
、第4図は電気等価回路図である。第5図及び第6図は
本発明に係る圧電共振子の第2実施例を示すもので、第
5図は垂直断面図、第6図は誘電体基板を内部電極形成
面側から見た平面図である。第7図は本発明に係る圧電
共振子の第3実施例を示す垂直断面図である。第8図及
び第9図は第6図で示した誘電体基板の変形例を示す平
面図である。第10図は発振回路図である。第11図、
第12図、第13図は本発明に先行する技術を示し、第
11図は圧電共振子の分解斜視図、第12図は圧電共振
子の外観を示す斜視図、第13図は第12図のx−x’
の垂直断面図である。 1・・・圧電共振子(発振子)、2・・・圧電体基板、
3a、 3b・・・振動電極、5・・・誘電体封止部材
(封止基板)、6a、 6b、 7a、 7b・・・内
部電極、8・・・誘電体封止部材(封止基板)、15・
・・圧電共振子(発振子)、16・・・圧電体基板、1
7a、 17b・・・振動電極、19・・・誘電体封止
部材(封止基板)、20.2OA、 20B・・・内部
電極、22・・・誘電体封止部材(封止基板)、23・
・・内部電極、30・・・圧電共振子(発振子)、31
・・・圧電体基板、32a、 32b・・・振動電極、
33・・・誘電体封止部材(封止ケース)、37a、3
8a ・−・内部電極、(A)、(B)・・・入出力電
極、<C>−・・共通電極、Ca、Ca’、Ca″、c
b、cb’。 cb“・・・容量。
1 to 4 show a first embodiment of a piezoelectric resonator according to the present invention, in which FIG. 1 is an exploded perspective view, FIG. 2 is a perspective view showing the external appearance, and FIG. 3 is a second embodiment. FIG. 4 is a vertical cross-sectional view taken along line X-X'' of FIG. 4, and is an electrical equivalent circuit diagram. 5 and 6 show a second embodiment of the piezoelectric resonator according to the present invention, FIG. 5 is a vertical sectional view, and FIG. 6 is a plan view of the dielectric substrate viewed from the internal electrode forming surface side. It is a diagram. FIG. 7 is a vertical sectional view showing a third embodiment of the piezoelectric resonator according to the present invention. 8 and 9 are plan views showing modified examples of the dielectric substrate shown in FIG. 6. FIG. FIG. 10 is an oscillation circuit diagram. Figure 11,
12 and 13 show technology prior to the present invention, FIG. 11 is an exploded perspective view of a piezoelectric resonator, FIG. 12 is a perspective view showing the external appearance of the piezoelectric resonator, and FIG. x-x'
FIG. 1... piezoelectric resonator (oscillator), 2... piezoelectric substrate,
3a, 3b... Vibrating electrode, 5... Dielectric sealing member (sealing substrate), 6a, 6b, 7a, 7b... Internal electrode, 8... Dielectric sealing member (sealing substrate) ), 15・
...Piezoelectric resonator (oscillator), 16...Piezoelectric substrate, 1
7a, 17b... Vibration electrode, 19... Dielectric sealing member (sealing substrate), 20.2OA, 20B... Internal electrode, 22... Dielectric sealing member (sealing substrate), 23・
... Internal electrode, 30 ... Piezoelectric resonator (oscillator), 31
... piezoelectric substrate, 32a, 32b... vibrating electrode,
33...Dielectric sealing member (sealing case), 37a, 3
8a --- Internal electrode, (A), (B) --- Input/output electrode, <C> --- Common electrode, Ca, Ca', Ca'', c
b, cb'. cb"...Capacity.

Claims (1)

【特許請求の範囲】[Claims] 1.振動電極を設けた圧電体基板と、該圧電体基板を封
止して振動空間を形成する誘電体封止部材とで積層体を
形成し、前記積層体の外側表面に入出力電極及び共通電
極を設けた圧電共振子において、 前記封止部材の振動空間形成側表面に前記入出力電極と
接続する内部電極を設け、前記入出力電極と前記共通電
極、前記内部電極と前記共通電極とでそれぞれ容量部を
形成したことを特徴とする圧電共振子。
1. A laminate is formed of a piezoelectric substrate provided with a vibrating electrode and a dielectric sealing member that seals the piezoelectric substrate to form a vibration space, and an input/output electrode and a common electrode are provided on the outer surface of the laminate. In the piezoelectric resonator provided with the above, an internal electrode connected to the input/output electrode is provided on the vibration space forming side surface of the sealing member, and the input/output electrode and the common electrode are connected to each other, and the internal electrode and the common electrode are connected to each other. A piezoelectric resonator characterized by forming a capacitive part.
JP4387590A 1990-02-23 1990-02-23 Piezoelectric resonator Pending JPH03247010A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4387590A JPH03247010A (en) 1990-02-23 1990-02-23 Piezoelectric resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4387590A JPH03247010A (en) 1990-02-23 1990-02-23 Piezoelectric resonator

Publications (1)

Publication Number Publication Date
JPH03247010A true JPH03247010A (en) 1991-11-05

Family

ID=12675875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4387590A Pending JPH03247010A (en) 1990-02-23 1990-02-23 Piezoelectric resonator

Country Status (1)

Country Link
JP (1) JPH03247010A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5532542A (en) * 1994-02-16 1996-07-02 Murata Manufacturing Co., Ltd. Energy-trap chip-type piezoelectric resonance component
US6037698A (en) * 1995-10-20 2000-03-14 Fujitsu Limited Acoustic surface wave device
US6046529A (en) * 1997-05-07 2000-04-04 Murata Manufacturing Co., Ltd. Electronic component having structure for preventing separation at adhered portions
US6744179B2 (en) 1999-12-20 2004-06-01 Murata Manufacturing Co., Ltd. Piezoelectric resonator and piezoelectric oscillator
US7893600B2 (en) 2005-08-31 2011-02-22 Kyocera Corporation Piezoelectric resonator

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5532542A (en) * 1994-02-16 1996-07-02 Murata Manufacturing Co., Ltd. Energy-trap chip-type piezoelectric resonance component
US6037698A (en) * 1995-10-20 2000-03-14 Fujitsu Limited Acoustic surface wave device
US6046529A (en) * 1997-05-07 2000-04-04 Murata Manufacturing Co., Ltd. Electronic component having structure for preventing separation at adhered portions
US6744179B2 (en) 1999-12-20 2004-06-01 Murata Manufacturing Co., Ltd. Piezoelectric resonator and piezoelectric oscillator
US7893600B2 (en) 2005-08-31 2011-02-22 Kyocera Corporation Piezoelectric resonator

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