JPH0486228U - - Google Patents
Info
- Publication number
- JPH0486228U JPH0486228U JP13071590U JP13071590U JPH0486228U JP H0486228 U JPH0486228 U JP H0486228U JP 13071590 U JP13071590 U JP 13071590U JP 13071590 U JP13071590 U JP 13071590U JP H0486228 U JPH0486228 U JP H0486228U
- Authority
- JP
- Japan
- Prior art keywords
- target
- magneto
- utility
- scope
- disposed below
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001755 magnetron sputter deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13071590U JPH0486228U (en, 2012) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13071590U JPH0486228U (en, 2012) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0486228U true JPH0486228U (en, 2012) | 1992-07-27 |
Family
ID=31878032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13071590U Pending JPH0486228U (en, 2012) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0486228U (en, 2012) |
-
1990
- 1990-11-30 JP JP13071590U patent/JPH0486228U/ja active Pending
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