JPH048439U - - Google Patents
Info
- Publication number
- JPH048439U JPH048439U JP4873290U JP4873290U JPH048439U JP H048439 U JPH048439 U JP H048439U JP 4873290 U JP4873290 U JP 4873290U JP 4873290 U JP4873290 U JP 4873290U JP H048439 U JPH048439 U JP H048439U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- insulating film
- electrostatic chuck
- coated
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000019353 potassium silicate Nutrition 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 1
Description
第１図は本考案の実施例を示す図、第２図は従
来の実施例を示す図、第３図は一般的な静電チヤ
ツクの構造を示す図である。
１……電極、２……絶縁皮膜、３……電源、４
……試料、５……気孔、６……接触面、７……水
ガラスや樹脂。
FIG. 1 is a diagram showing an embodiment of the present invention, FIG. 2 is a diagram showing a conventional embodiment, and FIG. 3 is a diagram showing the structure of a general electrostatic chuck. 1... Electrode, 2... Insulating film, 3... Power supply, 4
... Sample, 5 ... Pore, 6 ... Contact surface, 7 ... Water glass or resin.
Claims (1)
と前記電極と試料との間に電位差を生じさせる電
源とからなる静電チヤツクにおいて、 前記絶縁皮膜に水ガラスや樹脂をコーテイング
したことを特徴とする静電チヤツク。[Claims for Utility Model Registration] In an electrostatic chuck consisting of an electrode, an insulating film coated on the electrode, and a power source for generating a potential difference between the electrode and a sample, the insulating film is coated with water glass or resin. An electrostatic chuck characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4873290U JPH048439U (en) | 1990-05-10 | 1990-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4873290U JPH048439U (en) | 1990-05-10 | 1990-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH048439U true JPH048439U (en) | 1992-01-27 |
Family
ID=31565812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4873290U Pending JPH048439U (en) | 1990-05-10 | 1990-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH048439U (en) |
-
1990
- 1990-05-10 JP JP4873290U patent/JPH048439U/ja active Pending