JPH0482839U - - Google Patents

Info

Publication number

JPH0482839U

JPH0482839U JP12793390U JP12793390U JPH0482839U JP H0482839 U JPH0482839 U JP H0482839U JP 12793390 U JP12793390 U JP 12793390U JP 12793390 U JP12793390 U JP 12793390U JP H0482839 U JPH0482839 U JP H0482839U

Authority

JP

Japan

Prior art keywords

reaction tube

semiconductor laser

manufacturing apparatus

heating

laser manufacturing

Prior art date

1990-11-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims description 3
• 238000004519 manufacturing process Methods 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims description 3
• 239000013078 crystal Substances 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 241000700560 Molluscum contagiosum virus Species 0.000 claims 1
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
• 229910052799 carbon Inorganic materials 0.000 description 1
• 239000000498 cooling water Substances 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 239000012495 reaction gas Substances 0.000 description 1

Cited By (1)