JPH0479421U - - Google Patents

Info

Publication number
JPH0479421U
JPH0479421U JP1990123396U JP12339690U JPH0479421U JP H0479421 U JPH0479421 U JP H0479421U JP 1990123396 U JP1990123396 U JP 1990123396U JP 12339690 U JP12339690 U JP 12339690U JP H0479421 U JPH0479421 U JP H0479421U
Authority
JP
Japan
Prior art keywords
glass window
substrate
light
reaction vessel
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1990123396U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990123396U priority Critical patent/JPH0479421U/ja
Priority to US07/796,618 priority patent/US5252132A/en
Publication of JPH0479421U publication Critical patent/JPH0479421U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP1990123396U 1990-11-22 1990-11-22 Pending JPH0479421U (cg-RX-API-DMAC10.html)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1990123396U JPH0479421U (cg-RX-API-DMAC10.html) 1990-11-22 1990-11-22
US07/796,618 US5252132A (en) 1990-11-22 1991-11-22 Apparatus for producing semiconductor film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990123396U JPH0479421U (cg-RX-API-DMAC10.html) 1990-11-22 1990-11-22

Publications (1)

Publication Number Publication Date
JPH0479421U true JPH0479421U (cg-RX-API-DMAC10.html) 1992-07-10

Family

ID=31871106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990123396U Pending JPH0479421U (cg-RX-API-DMAC10.html) 1990-11-22 1990-11-22

Country Status (1)

Country Link
JP (1) JPH0479421U (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09326365A (ja) * 1996-06-04 1997-12-16 Nippon Pillar Packing Co Ltd 縦型加熱処理装置
JPWO2022065079A1 (cg-RX-API-DMAC10.html) * 2020-09-23 2022-03-31

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09326365A (ja) * 1996-06-04 1997-12-16 Nippon Pillar Packing Co Ltd 縦型加熱処理装置
JPWO2022065079A1 (cg-RX-API-DMAC10.html) * 2020-09-23 2022-03-31

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