JPH0479419U - - Google Patents

Info

Publication number
JPH0479419U
JPH0479419U JP12129890U JP12129890U JPH0479419U JP H0479419 U JPH0479419 U JP H0479419U JP 12129890 U JP12129890 U JP 12129890U JP 12129890 U JP12129890 U JP 12129890U JP H0479419 U JPH0479419 U JP H0479419U
Authority
JP
Japan
Prior art keywords
sample
leak
gas
chamber
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12129890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12129890U priority Critical patent/JPH0479419U/ja
Publication of JPH0479419U publication Critical patent/JPH0479419U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP12129890U 1990-11-21 1990-11-21 Pending JPH0479419U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12129890U JPH0479419U (enrdf_load_stackoverflow) 1990-11-21 1990-11-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12129890U JPH0479419U (enrdf_load_stackoverflow) 1990-11-21 1990-11-21

Publications (1)

Publication Number Publication Date
JPH0479419U true JPH0479419U (enrdf_load_stackoverflow) 1992-07-10

Family

ID=31869158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12129890U Pending JPH0479419U (enrdf_load_stackoverflow) 1990-11-21 1990-11-21

Country Status (1)

Country Link
JP (1) JPH0479419U (enrdf_load_stackoverflow)

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