JPH0479418U - - Google Patents
Info
- Publication number
- JPH0479418U JPH0479418U JP12131390U JP12131390U JPH0479418U JP H0479418 U JPH0479418 U JP H0479418U JP 12131390 U JP12131390 U JP 12131390U JP 12131390 U JP12131390 U JP 12131390U JP H0479418 U JPH0479418 U JP H0479418U
- Authority
- JP
- Japan
- Prior art keywords
- detected
- marks
- workpiece
- printing
- detect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12131390U JPH0479418U (enExample) | 1990-11-21 | 1990-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12131390U JPH0479418U (enExample) | 1990-11-21 | 1990-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0479418U true JPH0479418U (enExample) | 1992-07-10 |
Family
ID=31869173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12131390U Pending JPH0479418U (enExample) | 1990-11-21 | 1990-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0479418U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010199453A (ja) * | 2009-02-27 | 2010-09-09 | Nikon Corp | 検出方法、光学特性計測方法、露光方法及び露光装置、並びにデバイス製造方法 |
-
1990
- 1990-11-21 JP JP12131390U patent/JPH0479418U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010199453A (ja) * | 2009-02-27 | 2010-09-09 | Nikon Corp | 検出方法、光学特性計測方法、露光方法及び露光装置、並びにデバイス製造方法 |