JPS63200109U - - Google Patents
Info
- Publication number
- JPS63200109U JPS63200109U JP8942687U JP8942687U JPS63200109U JP S63200109 U JPS63200109 U JP S63200109U JP 8942687 U JP8942687 U JP 8942687U JP 8942687 U JP8942687 U JP 8942687U JP S63200109 U JPS63200109 U JP S63200109U
- Authority
- JP
- Japan
- Prior art keywords
- alignment mark
- alignment
- pattern
- intensity
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8942687U JPS63200109U (enExample) | 1987-06-09 | 1987-06-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8942687U JPS63200109U (enExample) | 1987-06-09 | 1987-06-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63200109U true JPS63200109U (enExample) | 1988-12-23 |
Family
ID=30948401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8942687U Pending JPS63200109U (enExample) | 1987-06-09 | 1987-06-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63200109U (enExample) |
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1987
- 1987-06-09 JP JP8942687U patent/JPS63200109U/ja active Pending