JPH0477251U - - Google Patents
Info
- Publication number
- JPH0477251U JPH0477251U JP12150690U JP12150690U JPH0477251U JP H0477251 U JPH0477251 U JP H0477251U JP 12150690 U JP12150690 U JP 12150690U JP 12150690 U JP12150690 U JP 12150690U JP H0477251 U JPH0477251 U JP H0477251U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- walking beam
- backward
- wafer
- movements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12150690U JPH0477251U (enExample) | 1990-11-20 | 1990-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12150690U JPH0477251U (enExample) | 1990-11-20 | 1990-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0477251U true JPH0477251U (enExample) | 1992-07-06 |
Family
ID=31869359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12150690U Pending JPH0477251U (enExample) | 1990-11-20 | 1990-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0477251U (enExample) |
-
1990
- 1990-11-20 JP JP12150690U patent/JPH0477251U/ja active Pending