JPH0477243B2 - - Google Patents
Info
- Publication number
- JPH0477243B2 JPH0477243B2 JP21042787A JP21042787A JPH0477243B2 JP H0477243 B2 JPH0477243 B2 JP H0477243B2 JP 21042787 A JP21042787 A JP 21042787A JP 21042787 A JP21042787 A JP 21042787A JP H0477243 B2 JPH0477243 B2 JP H0477243B2
- Authority
- JP
- Japan
- Prior art keywords
- slider
- axis direction
- base
- origin
- base body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 20
- 239000000700 radioactive tracer Substances 0.000 claims description 20
- 230000007935 neutral effect Effects 0.000 description 16
- 241001422033 Thestylus Species 0.000 description 11
- 239000000523 sample Substances 0.000 description 10
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21042787A JPS6453109A (en) | 1987-08-24 | 1987-08-24 | Tracer for surface shape measurement |
GB8818659A GB2208934B (en) | 1987-08-24 | 1988-08-05 | Surface contour measuring tracer |
US07/235,360 US4899456A (en) | 1987-08-24 | 1988-08-23 | Surface contour measuring tracer |
DE3828713A DE3828713A1 (de) | 1987-08-24 | 1988-08-24 | Oberflaechenkontur-messtastereinrichtung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21042787A JPS6453109A (en) | 1987-08-24 | 1987-08-24 | Tracer for surface shape measurement |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6453109A JPS6453109A (en) | 1989-03-01 |
JPH0477243B2 true JPH0477243B2 (nl) | 1992-12-07 |
Family
ID=16589134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21042787A Granted JPS6453109A (en) | 1987-08-24 | 1987-08-24 | Tracer for surface shape measurement |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6453109A (nl) |
-
1987
- 1987-08-24 JP JP21042787A patent/JPS6453109A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6453109A (en) | 1989-03-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |