JPH047657U - - Google Patents
Info
- Publication number
- JPH047657U JPH047657U JP4822490U JP4822490U JPH047657U JP H047657 U JPH047657 U JP H047657U JP 4822490 U JP4822490 U JP 4822490U JP 4822490 U JP4822490 U JP 4822490U JP H047657 U JPH047657 U JP H047657U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film growth
- light source
- ultraviolet light
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims 1
- 238000002474 experimental method Methods 0.000 description 3
- 239000002131 composite material Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4822490U JPH0650540Y2 (ja) | 1990-05-09 | 1990-05-09 | 薄膜成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4822490U JPH0650540Y2 (ja) | 1990-05-09 | 1990-05-09 | 薄膜成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH047657U true JPH047657U (cs) | 1992-01-23 |
| JPH0650540Y2 JPH0650540Y2 (ja) | 1994-12-21 |
Family
ID=31564842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4822490U Expired - Lifetime JPH0650540Y2 (ja) | 1990-05-09 | 1990-05-09 | 薄膜成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0650540Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51108927U (cs) * | 1975-02-25 | 1976-08-31 |
-
1990
- 1990-05-09 JP JP4822490U patent/JPH0650540Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51108927U (cs) * | 1975-02-25 | 1976-08-31 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0650540Y2 (ja) | 1994-12-21 |
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