JPH0476509B2 - - Google Patents

Info

Publication number
JPH0476509B2
JPH0476509B2 JP3619885A JP3619885A JPH0476509B2 JP H0476509 B2 JPH0476509 B2 JP H0476509B2 JP 3619885 A JP3619885 A JP 3619885A JP 3619885 A JP3619885 A JP 3619885A JP H0476509 B2 JPH0476509 B2 JP H0476509B2
Authority
JP
Japan
Prior art keywords
amorphous silicon
type
semiconductor
ray
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3619885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61196571A (ja
Inventor
Hidehiko Maehata
Hiroshi Kamata
Hiroyuki Daiku
Masahiko Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Zosen Corp
Original Assignee
Hitachi Zosen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Zosen Corp filed Critical Hitachi Zosen Corp
Priority to JP60036198A priority Critical patent/JPS61196571A/ja
Publication of JPS61196571A publication Critical patent/JPS61196571A/ja
Publication of JPH0476509B2 publication Critical patent/JPH0476509B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/36—Measuring spectral distribution of X-rays or of nuclear radiation spectrometry
    • G01T1/362—Measuring spectral distribution of X-rays or of nuclear radiation spectrometry with scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/115—Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Light Receiving Elements (AREA)
  • Measurement Of Radiation (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP60036198A 1985-02-25 1985-02-25 アモルフアスシリコンｘ線センサ Granted JPS61196571A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60036198A JPS61196571A (ja) 1985-02-25 1985-02-25 アモルフアスシリコンｘ線センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60036198A JPS61196571A (ja) 1985-02-25 1985-02-25 アモルフアスシリコンｘ線センサ

Publications (2)

Publication Number Publication Date
JPS61196571A JPS61196571A (ja) 1986-08-30
JPH0476509B2 true JPH0476509B2 (de) 1992-12-03

Family

ID=12463031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60036198A Granted JPS61196571A (ja) 1985-02-25 1985-02-25 アモルフアスシリコンｘ線センサ

Country Status (1)

Country Link
JP (1) JPS61196571A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL96561A0 (en) * 1989-12-28 1991-09-16 Minnesota Mining & Mfg Amorphous silicon sensor
CA2034118A1 (en) * 1990-02-09 1991-08-10 Nang Tri Tran Solid state radiation detector
JP4364553B2 (ja) * 2002-08-30 2009-11-18 シャープ株式会社 光電変換装置及びその製造方法

Also Published As

Publication number Publication date
JPS61196571A (ja) 1986-08-30

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