JPH0476386U - - Google Patents

Info

Publication number
JPH0476386U
JPH0476386U JP11783190U JP11783190U JPH0476386U JP H0476386 U JPH0476386 U JP H0476386U JP 11783190 U JP11783190 U JP 11783190U JP 11783190 U JP11783190 U JP 11783190U JP H0476386 U JPH0476386 U JP H0476386U
Authority
JP
Japan
Prior art keywords
substrate
substrate holding
supply device
jigs
link mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11783190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11783190U priority Critical patent/JPH0476386U/ja
Publication of JPH0476386U publication Critical patent/JPH0476386U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Specific Conveyance Elements (AREA)
JP11783190U 1990-11-10 1990-11-10 Pending JPH0476386U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11783190U JPH0476386U (enrdf_load_stackoverflow) 1990-11-10 1990-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11783190U JPH0476386U (enrdf_load_stackoverflow) 1990-11-10 1990-11-10

Publications (1)

Publication Number Publication Date
JPH0476386U true JPH0476386U (enrdf_load_stackoverflow) 1992-07-03

Family

ID=31865737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11783190U Pending JPH0476386U (enrdf_load_stackoverflow) 1990-11-10 1990-11-10

Country Status (1)

Country Link
JP (1) JPH0476386U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59152084A (ja) * 1983-02-17 1984-08-30 松下電器産業株式会社 物体つかみ装置
JPS61241092A (ja) * 1985-04-17 1986-10-27 株式会社日立製作所 位置矯正装置を備えたロボツトハンド

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59152084A (ja) * 1983-02-17 1984-08-30 松下電器産業株式会社 物体つかみ装置
JPS61241092A (ja) * 1985-04-17 1986-10-27 株式会社日立製作所 位置矯正装置を備えたロボツトハンド

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