JPH0476083A - Ultraviolet-screening film - Google Patents

Ultraviolet-screening film

Info

Publication number
JPH0476083A
JPH0476083A JP18875990A JP18875990A JPH0476083A JP H0476083 A JPH0476083 A JP H0476083A JP 18875990 A JP18875990 A JP 18875990A JP 18875990 A JP18875990 A JP 18875990A JP H0476083 A JPH0476083 A JP H0476083A
Authority
JP
Japan
Prior art keywords
oxide
ultraviolet
film
cerium
ultraviolet shielding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18875990A
Other languages
Japanese (ja)
Inventor
Yoshiki Senoo
与志木 妹尾
Yasuyuki Kageyama
恭行 景山
Yasunori Taga
康訓 多賀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Priority to JP18875990A priority Critical patent/JPH0476083A/en
Publication of JPH0476083A publication Critical patent/JPH0476083A/en
Pending legal-status Critical Current

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  • Surface Treatment Of Glass (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)

Abstract

PURPOSE:To obtain the title film having sufficient ability to transmit visible light and excellent in the ability to screen ultraviolet rays in the region near the visible light region by incorporating a specified metal oxide into cerium oxide. CONSTITUTION:An ultraviolet-screening film made of a compound oxide consisting of cerium oxide and an oxide of a metal having a valence higher than that of cerium, with the content of this metal oxide being 5-50wt.%. It can sufficiently screen ultraviolet rays of a wavelength of 380nm or shorter and sufficiently transmit visible light of a wavelength in the range from 380-780nm. Since it is obtained as a film, not a powder, it is not necessary to care about, e.g. the particle diameter of a product; further, when it is used as ultraviolet-screening material, it is not necessary to pay attention to, e.g. dispersion in a dispersant.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、酸化セリウムを主体とした酸化物からなる紫
外線遮蔽膜に関し、さらに詳しくは、十分な可視光の透
過性を有するとともに、紫外線の可視光域に近い領域の
紫外線遮蔽能に優れた紫外線遮蔽膜に関するものである
Detailed Description of the Invention [Field of Industrial Application] The present invention relates to an ultraviolet shielding film made of an oxide mainly composed of cerium oxide, and more specifically, it has sufficient visible light transparency and ultraviolet ray shielding film. The present invention relates to an ultraviolet shielding film that has excellent ultraviolet shielding ability in a region close to the visible light region.

〔従来技術およびその問題点〕[Prior art and its problems]

従来より、自動車の内装品に使われている高分子材料は
、長時間太陽光に晒されるため、耐紫外線性等の非常に
強い耐候性が要求されている。しかしながら、この高分
子材料は、一般に紫外線に対して弱いため、該材料に耐
紫外線遮蔽性を付加したり、あるいは該材料に太陽光か
晒される前に紫外線による影響を防止することか望まれ
ている。
Conventionally, polymer materials used in automobile interior parts are required to have very strong weather resistance such as ultraviolet resistance because they are exposed to sunlight for long periods of time. However, this polymeric material is generally sensitive to UV rays, so it is desirable to add UV shielding properties to the material or to prevent the effects of UV rays before the material is exposed to sunlight. There is.

なお、前者の場合には、紫外線遮蔽能に優れた高分子材
料を用いたり、該高分子材料を紫外線遮蔽能に優れた機
能材料で被覆したりする必要かあるなど、高分子材料の
適用が制限されることになる。
In the former case, the application of the polymer material may be affected, such as the need to use a polymer material with excellent ultraviolet shielding ability or to coat the polymer material with a functional material that has excellent ultraviolet shielding ability. will be restricted.

後者の場合は、例えば窓ガラスやスカイルーフに紫外線
遮蔽膜を付着させるなどして、内装部品に光が照射され
る前に紫外線を遮蔽することにより、高分子材料の適用
範囲をより広くすることができる。
In the latter case, the range of application of polymeric materials can be expanded by, for example, attaching a UV-shielding film to window glass or a sky roof to block UV rays before the interior components are irradiated with the light. I can do it.

これら紫外線遮蔽能を有する物質としては、有機物質や
無機物質など種々のものがあり、これら物質を用いて紫
外線遮蔽能を付与した材料の開発か活発に行われている
。しかしなから、これを自動車用の窓ガラスやスカイル
ーフ等に適用する場合、有機物質は紫外線遮蔽効果か十
分に得られないうえに、耐候性の面から種々の制約か多
く、これら要求を十分に満足できない。
There are various substances such as organic substances and inorganic substances that have ultraviolet shielding ability, and materials having ultraviolet shielding ability using these substances are actively being developed. However, when applying this to automobile window glass, sky roofs, etc., organic substances do not have a sufficient ultraviolet shielding effect, and there are many restrictions in terms of weather resistance, making it difficult to meet these requirements. I'm not satisfied with that.

一方、無機物質を採用した例としては、酸化チタンある
いは酸化セリウム等を基板表面へコーティングして基板
表面のぬれ性および紫外線遮蔽性を改善した「光学機能
素子」 (特開昭63−104028号公報)か提案さ
れている。しかしながら、この光学機能素子は、波長か
360nm以下の領域の紫外線遮蔽能には優れているも
のの、波長か360〜380 nmの可視光域に近接し
た領域の紫外線遮蔽能は不十分であるという問題があっ
た。
On the other hand, an example of using an inorganic material is an "optical functional element" in which the substrate surface is coated with titanium oxide, cerium oxide, etc. to improve the wettability and ultraviolet shielding properties of the substrate surface (Japanese Patent Laid-Open No. 104028/1983). ) has been proposed. However, although this optical functional element has an excellent ability to block ultraviolet rays in the wavelength range of 360 nm or less, it has an insufficient ability to block ultraviolet rays in the wavelength range of 360 to 380 nm, which is close to the visible light range. was there.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、波長380nm以下の紫外線を十分に
遮蔽し、かつ波長380〜780nmの範囲の可視光を
十分に透過する性質を有する紫外線遮蔽膜を提供するに
ある。
An object of the present invention is to provide an ultraviolet shielding film that has the property of sufficiently blocking ultraviolet rays having a wavelength of 380 nm or less and sufficiently transmitting visible light having a wavelength of 380 to 780 nm.

本発明者らは、上述の従来技術の問題に関し、以下のこ
とに着眼した。すなわち、先ず、紫外線遮蔽能に優れか
つ耐候性にも優れた物質としての酸化セリウムの光透過
率特性に着目した。しかしながら、この酸化セリウムは
、波長か380nm〜780 nmの可視光領域の光透
過性に優れ、かつ波長か360nm以下領域での紫外線
遮蔽能に優れているものの、360〜380nmの可視
光に近接する紫外線領域の紫外線遮蔽能か低い。そこで
、該可視光に近接する紫外線領域の紫外線遮蔽能を改善
するために、第二の酸化物を添加することに着目した。
The present inventors have focused on the following regarding the problems of the prior art described above. That is, first, we focused on the light transmittance characteristics of cerium oxide, which is a material that has excellent ultraviolet shielding ability and excellent weather resistance. However, although this cerium oxide has excellent light transmittance in the visible light range of wavelengths from 380 nm to 780 nm and excellent UV shielding ability in the wavelength range of 360 nm or less, it UV shielding ability in the ultraviolet region is low. Therefore, in order to improve the ability to shield ultraviolet light in the ultraviolet region close to visible light, we focused on adding a second oxide.

そして、セリウムの価数よりも価数か大きい金属との複
合酸化物に着眼し、酸化セリウムと、酸化ニオブ、酸化
バナジウム、酸化タングステンの少なくとも一種の金属
酸化物とからなる複合材料で紫外線遮蔽膜を構成するこ
とにより、360〜380nmの可視光に近接する紫外
線領域での紫外線遮蔽能に優れたものを実現するに至っ
た。
Then, we focused on a composite oxide with a metal whose valence is higher than that of cerium, and created a UV-shielding film using a composite material consisting of cerium oxide and at least one metal oxide among niobium oxide, vanadium oxide, and tungsten oxide. By configuring this, we have achieved an excellent ultraviolet shielding ability in the ultraviolet region of 360 to 380 nm, which is close to visible light.

〔第1発明の説明〕 発明の構成 本第1発明の紫外線遮蔽膜は、酸化セリウムとセリウム
より価数の大きい金属の酸化物とからなる複合酸化物で
あって、該金属の酸化物の含有量か5〜50重量96で
あることを特徴とする。
[Description of the first invention] Structure of the invention The ultraviolet shielding film of the first invention is a composite oxide consisting of cerium oxide and an oxide of a metal having a higher valence than cerium, and contains the oxide of the metal. It is characterized by a weight of 5 to 50 and a weight of 96.

発明の作用 本発明の紫外線遮蔽膜が優れた紫外線遮蔽能を発揮する
メカニズムについては、未だ必ずしも十分に明らかでは
ないか、次のように考えられる。
Effect of the Invention The mechanism by which the ultraviolet ray shielding film of the present invention exhibits excellent ultraviolet ray shielding ability is not yet fully clear, or may be considered as follows.

すなわち、本発明の紫外線遮蔽膜は、酸化セリウムとセ
リウムより価数の大きい金属の酸化物とからなる。この
酸化セリウムは、波長が380nm〜780nmの可視
光領域の光透過性に優れ、かつ波長が360nm以下領
域での紫外線遮蔽能に優れているものの、360〜38
0nmの可視光に近接する紫外線領域の紫外線遮蔽能か
低い。
That is, the ultraviolet shielding film of the present invention is made of cerium oxide and an oxide of a metal having a higher valence than cerium. Although this cerium oxide has excellent light transmittance in the visible light range with a wavelength of 380 nm to 780 nm and excellent ultraviolet shielding ability in the wavelength range of 360 nm or less,
The ability to block ultraviolet rays in the ultraviolet region close to 0 nm visible light is low.

しかしなから、紫外線遮蔽膜を、この酸化セリウムと該
セリウムの価数よりも価数が大きくかつ可視光域での光
透過性を阻害しない金属としてのニオブ、バナジウム、
タングステン等の金属との複合酸化物で構成することに
より、酸化セリウムたけ、あるいはセリウムより価数の
大きい金属の酸化物だけては存在しない準位のところに
新たなエネルギー準位を作り出すことかできる。その結
果、準位のすれたエネルギーギャップのひとつが紫外線
を吸収し、360〜380nmの可視光に近接する紫外
線領域の紫外線を効果的に遮蔽することかできるという
顕著な効果を奏することかできるものと思われる。これ
より、本発明の紫外線遮蔽膜は、波長380nm以下の
紫外線を十分に遮蔽することかできるとともに、波長3
80〜780nmの範囲の可視光を十分に透過するとい
う有用な膜を実現できたものと思われる。
However, the ultraviolet shielding film is made of cerium oxide, niobium, vanadium, which is a metal whose valence is higher than that of cerium, and which does not inhibit light transmittance in the visible light range.
By forming a composite oxide with a metal such as tungsten, it is possible to create a new energy level at a level that does not exist only with cerium oxide or with oxides of metals with a higher valence than cerium. . As a result, one of the energy gaps in the level absorbs ultraviolet rays, producing the remarkable effect of effectively blocking ultraviolet rays in the ultraviolet region close to visible light of 360 to 380 nm. I think that the. From this, the ultraviolet shielding film of the present invention can sufficiently block ultraviolet rays with a wavelength of 380 nm or less, and
It seems that a useful film that sufficiently transmits visible light in the range of 80 to 780 nm could be realized.

すなわち、可視光の短波長限界は380nmであり、こ
の波長はエネルギに換算し、3.26eVのバンドギャ
ップに相当する。Ce O2にNb2O5、へ1205
、WO3などのセリウムより価数の大きい金属の酸化物
を添加することにより、波長限界を360 nm (3
,44eV)から380nm(3,26eV)に近づけ
るへく新しい紫外線吸収準位を形成する。一方、可視光
においては、380nm(3,26eV) 〜780n
m (1,58eV)で、酸化セリウム−セリウムより
価数の大きい金属の酸化物の複合酸化物、すなわちCe
O□−Nb205系や、Ce(L−V2O3系、CeO
2−WO3系に吸収はなく、透明である。つまり、可視
域での光学特性に変化はない。
That is, the short wavelength limit of visible light is 380 nm, and this wavelength corresponds to a band gap of 3.26 eV when converted into energy. Ce O2 to Nb2O5, to 1205
By adding an oxide of a metal with a higher valence than cerium such as WO3, the wavelength limit can be increased to 360 nm (3
, 44 eV) to approach 380 nm (3,26 eV). On the other hand, in visible light, 380nm (3,26eV) ~780n
m (1,58 eV), a composite oxide of cerium oxide-an oxide of a metal with a higher valence than cerium, that is, Ce
O□-Nb205 system, Ce (L-V2O3 system, CeO
The 2-WO3 system has no absorption and is transparent. In other words, there is no change in optical characteristics in the visible range.

発明の効果 本発明の紫外線遮蔽膜は、波長380nm以下の紫外線
を十分に遮蔽することかできるとともに、波長380〜
780 nmの範囲の可視光を十分に透過する性質を有
する膜である。
Effects of the Invention The ultraviolet shielding film of the present invention can sufficiently block ultraviolet rays with a wavelength of 380 nm or less, and can
This film has the property of sufficiently transmitting visible light in the 780 nm range.

また、粉末ではなく膜として得るので、製品の粒径等に
留意する必要かなく、さらに紫外線遮蔽材として用いる
場合、分散媒への分散といったことを気をつける必要も
ない。
Furthermore, since it is obtained as a film rather than a powder, there is no need to pay attention to the particle size of the product, and when used as an ultraviolet shielding material, there is no need to pay attention to dispersion in a dispersion medium.

〔第2発明の説明〕 以下に、前記第1発明をさらに具体的にした第2発明を
説明する。
[Description of the second invention] Below, a second invention that is a more specific version of the first invention will be described.

本発明の紫外線遮蔽膜は、酸化セリウムとセリウムより
価数の大きい金属の酸化物とからなる複合酸化物であっ
て、該セリウムより価数の大きい金属の酸化物のa有量
か5〜50重量06である。
The ultraviolet shielding film of the present invention is a composite oxide consisting of cerium oxide and an oxide of a metal with a higher valence than cerium, and the a content of the oxide of a metal with a higher valence than cerium is 5 to 50. The weight is 06.

セリウムより価数の大きい金属の酸化物は、酸化ニオブ
、酸化バナジウム、酸化タングステンの少なくとも一種
以上であることか好ましい。
The oxide of a metal having a higher valence than cerium is preferably at least one of niobium oxide, vanadium oxide, and tungsten oxide.

該セリウムより価数の大きい金属の酸化物として酸化ニ
オブを用いる場合、該酸化ニオブの含有量は10〜40
重量%であることか好ましい。これは、該酸化ニオブの
含有量が10重量%未満の場合には、波長か360〜3
80nmの可視光域に近接する紫外線領域の紫外線遮蔽
能を十分に向上することができないからである。また、
該含有量か40重量%を越える場合には、波長360〜
・380nmの紫外線領域における紫外線遮蔽能が低下
するからである。なお、該酸化ニオブの含有量を、25
〜35重量96とした場合、紫外線領域全体の紫外線遮
蔽能及び波長が360〜380nmの可視光域に近接す
る紫外線領域の紫外線遮蔽能をともに十分に向上するこ
とかできるとともに、可視光域の光透過性を良好ならし
めることができるので、より好ましい。また、この含有
量を30重量96程度とし、しかも酸化セリウムおよび
酸化ニオブを均一に分散させた場合、遮蔽領域か本系の
複合物としては最大になるので、特に好ましい。
When niobium oxide is used as an oxide of a metal having a higher valence than cerium, the content of niobium oxide is 10 to 40
Preferably, it is % by weight. When the content of the niobium oxide is less than 10% by weight, the wavelength is 360~3
This is because the ability to block ultraviolet light in the ultraviolet region close to the visible light region of 80 nm cannot be sufficiently improved. Also,
If the content exceeds 40% by weight, the wavelength is 360~
- This is because the ultraviolet shielding ability in the 380 nm ultraviolet region decreases. In addition, the content of the niobium oxide is 25
When the weight is 96 to 35, it is possible to sufficiently improve both the ultraviolet shielding ability in the entire ultraviolet region and the ultraviolet shielding ability in the ultraviolet region with a wavelength of 360 to 380 nm, which is close to the visible light region. It is more preferred because it can improve permeability. Further, it is particularly preferable that the content is about 30% by weight and that cerium oxide and niobium oxide are uniformly dispersed because the shielding area becomes the maximum for the composite of the present system.

また、前記セリウムより価数の大きい金属の酸化物とし
て酸化バtジウムを用いる場合、該酸化バナジウムの含
有量は5〜50重量96であることが好ましい。また、
酸化タングステンを用いる場合、該酸化タングステンの
含有量は10〜30重106であることが好ましい。こ
れら含有量か下限未満の場合には、波長か360〜38
0nmの可視光域に近接する紫外線領域の紫外線遮蔽能
を十分に向」ニすることができないからで、また該含有
量か上限を越える場合には、波長360〜380nmの
紫外線領域における紫外線遮蔽能か低下するからである
。特に、酸化バナジウムの含有量を10重量96程度、
または酸化タングステンの含有量を25重量96程度と
し、しかも酸化セリウムと酸化バナジウムまたは酸化タ
ングステンを均一に分散させた場合、遮蔽領域が本系の
複合物としては最大になるので、特に好ましい。
Further, when using batdium oxide as the oxide of a metal having a higher valence than cerium, the content of the vanadium oxide is preferably 5 to 50% by weight. Also,
When using tungsten oxide, it is preferable that the content of the tungsten oxide is 10 to 30% by weight. If the content is below the lower limit, the wavelength is 360 to 38
This is because the UV shielding ability in the ultraviolet region close to the visible light region of 0 nm cannot be sufficiently enhanced, and if the content exceeds the upper limit, the ultraviolet shielding ability in the ultraviolet region with a wavelength of 360 to 380 nm cannot be sufficiently enhanced. This is because the value decreases. In particular, the content of vanadium oxide is about 10% by weight, 96%,
Alternatively, when the content of tungsten oxide is about 25% by weight and cerium oxide and vanadium oxide or tungsten oxide are uniformly dispersed, it is particularly preferable because the shielding area is maximized for the composite of this system.

また、紫外線遮蔽膜の膜厚は、膜厚か厚いほど紫外線遮
蔽効果は良好となるか、同時に可視光の透過能が低下す
るので、50〜500nm程度か好ましい。これは、5
0nm未満では遮蔽効果は期待できない。また、500
nmを越えると、これ以上膜厚を厚くしても、遮蔽能の
膜厚に対する効率は悪くなるばかりだからである。なお
、特に、該膜厚が、100〜200nmである場合、そ
れぞれの要素のバランスがとれ、より好ましい。
Further, the thickness of the ultraviolet shielding film is preferably about 50 to 500 nm, since the thicker the film, the better the ultraviolet shielding effect will be, or at the same time, the visible light transmittance will be lowered. This is 5
If the thickness is less than 0 nm, no shielding effect can be expected. Also, 500
This is because, if the thickness exceeds 100 nm, even if the film thickness is increased further, the efficiency of the shielding ability relative to the film thickness will only deteriorate. In particular, when the film thickness is 100 to 200 nm, each element is well balanced, which is more preferable.

次に、本発明の紫外線遮蔽膜の用途の一つとして、紫外
線遮蔽性を有する高機能複合材料かある。
Next, one of the uses of the ultraviolet shielding film of the present invention is as a highly functional composite material having ultraviolet shielding properties.

二の複合材料は、ガラスまたは樹脂材料などからなる基
板と、該基板の表面に形成した酸化セリウムと該セリウ
ムより価数の大きい金属の酸化物である酸化ニオブ、酸
化バナジウム、酸化タングステンの少な(とも一種以」
−の酸化物との複合酸化物からなり該金属酸化物の含有
量が5〜50重量9イである紫外線遮蔽層と、からなる
ことを特徴とする。この複合材料は、紫外線遮蔽能に優
れ、基板と紫外線遮蔽層が容易に剥離することかなく、
また100°C程度の対しても該紫外線遮蔽性能か劣化
することかない。なお、透明なガラスを基板としてこの
紫外線遮蔽膜を成膜した場合、該複合材料は十分な透明
度を保っているか、薄く着色されている。色は赤紫ない
し青である。
The second composite material consists of a substrate made of glass or resin material, cerium oxide formed on the surface of the substrate, and a small amount of niobium oxide, vanadium oxide, and tungsten oxide, which are oxides of metals with a higher valence than the cerium. It is one kind of thing.”
- an ultraviolet shielding layer comprising a composite oxide with an oxide, and the content of the metal oxide is 5 to 50% by weight. This composite material has excellent UV-shielding ability, and the substrate and UV-shielding layer do not separate easily.
Furthermore, the ultraviolet shielding performance does not deteriorate even at temperatures of about 100°C. Note that when this ultraviolet shielding film is formed using transparent glass as a substrate, the composite material maintains sufficient transparency or is lightly colored. The color is reddish-purple or blue.

本発明の紫外線遮蔽膜は、ガラスや陶磁器なとの無機材
料や樹脂なとの有機材料からなる基板に該膜を形成する
ことにより得られる。
The ultraviolet shielding film of the present invention can be obtained by forming the film on a substrate made of an inorganic material such as glass or ceramics, or an organic material such as resin.

この本発明の紫外線遮蔽膜の製造方法について、その具
体的−例を簡単に説明すると、以下のようになる。
A specific example of the method for producing the ultraviolet shielding film of the present invention will be briefly described below.

先ず、基板としてのガラスや陶磁器などの無機材料や樹
脂なとの有機材料を用意する。次に、該基板の」二に、
スパッタリング法、真空蒸着法、イオンブレーティング
法なとの物理的蒸着法により、酸化セリウムとセリウム
より価数の大きい金属の酸化物からなる複合酸化物膜を
形成する。
First, an inorganic material such as glass or ceramics, or an organic material such as resin is prepared as a substrate. Next, on the second part of the substrate,
A composite oxide film consisting of cerium oxide and an oxide of a metal having a higher valence than cerium is formed by a physical vapor deposition method such as a sputtering method, a vacuum evaporation method, or an ion blating method.

このうち、該紫外線遮蔽膜をスパッタリング法により形
成する場合は、最初に該基板を洗浄した後、該基板を多
元同時スパッタ装置なとの真空処理装置内に配設し、1
0−6Torr程度まで真空排気する。次いで、アルゴ
ンガスなとの希ガスを3〜5 X 10−3Torr程
度まで導入し、基板表面にRFイオンエツチングを行う
。このエツチング条件としては、30〜100Wで5分
程度行えば十分である。なお、基板か有機材料の場合は
、耐熱性が低いため、2分以下であることか好ましい。
Among these methods, when the ultraviolet shielding film is formed by sputtering, the substrate is first cleaned and then placed in a vacuum processing apparatus such as a multi-sputtering apparatus.
Evacuate to about 0-6 Torr. Next, a rare gas such as argon gas is introduced to a pressure of about 3 to 5.times.10@-3 Torr, and RF ion etching is performed on the substrate surface. As for the etching conditions, it is sufficient to perform the etching at 30 to 100 W for about 5 minutes. Note that if the substrate is an organic material, the heat resistance is low, so it is preferable that the heating time be 2 minutes or less.

なお、このイオンエツチングは省略してもよい。次いで
、アルゴンガスまたはアルゴンガスと酸素ガスとの混合
ガス等のスパッタ雰囲気ガスを導入し、本発明のターゲ
ットとじての酸化セリウムおよびセリウムより価数の大
きい金属の酸化物をRFスパッタによって所望の膜厚の
複合酸化物を被覆する。
Note that this ion etching may be omitted. Next, a sputtering atmosphere gas such as argon gas or a mixed gas of argon gas and oxygen gas is introduced, and cerium oxide as the target of the present invention and an oxide of a metal having a higher valence than cerium are sputtered into a desired film by RF sputtering. Coat with thick composite oxide.

また、真空蒸着法やイオンブレーティング法では、本発
明の前記複合酸化物膜、すなわち酸化セリウムおよびセ
リウムより価数の大きい金属の酸化物の原料となる金属
ペレッI・を用い、基板に前記複合金属酸化物を被覆す
る。
In addition, in the vacuum evaporation method or the ion blating method, metal pellets I, which are raw materials for the composite oxide film of the present invention, that is, cerium oxide and an oxide of a metal with a higher valence than cerium, are used to coat the substrate with the composite oxide film. Coat metal oxide.

なお、これら物理的蒸着法のほか、化学蒸着法やゾル−
ゲル法によっても前記複合酸化物膜の形成が可能である
In addition to these physical vapor deposition methods, chemical vapor deposition methods and sol
The composite oxide film can also be formed by a gel method.

なお、そのなかでも、スパッタリング法による場合は、
以下の理由により好ましい。すなわち、ターゲットに酸
化物を直接用いることかでき、成膜過程に酸化反応を含
める必要がなく、簡便である。
Among them, when using the sputtering method,
This is preferable for the following reasons. That is, an oxide can be used directly as a target, and there is no need to include an oxidation reaction in the film formation process, which is convenient.

以上により、本発明にかかる紫外線遮蔽膜が得られる。Through the above steps, the ultraviolet shielding film according to the present invention can be obtained.

これより得られた本発明の紫外線遮蔽膜は、該膜を被覆
することにより紫外線の遮蔽か効果的に行えるので、さ
らに可視光の光透過性をも利用して自動車用窓ガラス、
スカイルーフ、ミラー、住宅用窓ガラス、ザンルーフ、
眼鏡用レンズといった材料や、主として紫外線遮蔽能を
活かして自動車用内装部品や薬品の容器などの材料に利
用できる。
The ultraviolet shielding film of the present invention thus obtained can effectively block ultraviolet rays by coating the film, and can also be used as a window glass for automobiles by utilizing its visible light transmittance.
Sky roofs, mirrors, residential window glass, Zanroofs,
It can be used in materials such as eyeglass lenses, as well as automobile interior parts and drug containers, mainly due to its ability to block ultraviolet rays.

〔実施例〕〔Example〕

以下に、本発明の詳細な説明する。 The present invention will be explained in detail below.

第1実施例 基板として透明石英ガラスを用い、該基板表面に酸化セ
リウム(CeO□)と酸化ニオブ(N b 2○5) 
とからなる複合酸化物膜を被覆して本発明にかかる複合
材料を製造し、該材料の性能評価試験を実施した。
First Example A transparent quartz glass was used as the substrate, and cerium oxide (CeO□) and niobium oxide (N b 2○5) were added to the surface of the substrate.
A composite material according to the present invention was manufactured by coating a composite oxide film consisting of the following, and a performance evaluation test of the material was conducted.

先ず、基板として、厚さ2mmの透明石英を用意し、該
基板を十分に乾燥させた。
First, transparent quartz with a thickness of 2 mm was prepared as a substrate, and the substrate was sufficiently dried.

次に、用意した基板を4元同時スパッタリング装置に配
設し、二酸化セリウム焼結体と五酸化ニオブ焼結体をタ
ーゲットとじて装着しく装置の残りの二元はシャッター
を閉じておいた)、1.2X10−6Torrまで装置
内を真空に引いた後、アルゴンガスを5.0 X 10
−”Torrまで導入し、R,F。
Next, the prepared substrate was placed in a four-element simultaneous sputtering device, and the cerium dioxide sintered body and the niobium pentoxide sintered body were attached as targets, and the shutters of the remaining two elements of the device were closed). After evacuating the inside of the device to 1.2 x 10-6 Torr, argon gas was pumped to 5.0 x 10 Torr.
-”Introduce up to Torr, R,F.

マグネトロンスパッタ法で二元同時スパッタを行った。Two-dimensional simultaneous sputtering was performed using magnetron sputtering.

二酸化セリウムは、500W、五酸化ニオブは200W
の電力を投入した。基板の加熱は行っていない。これに
より、本実施例の基板と膜厚が約1100nの紫外線遮
蔽膜とからなる複合材料を得た(試料番号1)。
Cerium dioxide is 500W, niobium pentoxide is 200W
of electricity was input. The substrate was not heated. As a result, a composite material consisting of the substrate of this example and an ultraviolet shielding film having a film thickness of approximately 1100 nm was obtained (sample number 1).

得られた複合材料の性能評価試験を、光透過特性評価試
験および物質同定試験により行った。
A performance evaluation test of the obtained composite material was performed by a light transmission property evaluation test and a substance identification test.

先ず、この試料の光透過率を、(掬日立製作所製の33
0型自記分光光度計を用いて測定した。その結果を、第
1図に示す。なお、第1図中のNJが、本実施例の結果
を示す。
First, the light transmittance of this sample was determined by
It was measured using a type 0 self-recording spectrophotometer. The results are shown in FIG. Note that NJ in FIG. 1 indicates the results of this example.

次いて、この試料の組成をラザフオード後方散乱を用い
て測定したところ、五酸化ニオブか約30重量96含よ
れていた。
Next, the composition of this sample was measured using Rutherford backscattering, and it was found that it contained about 30% by weight of niobium pentoxide.

比較のために、ターデッドを二酸化セリウムのみに変え
たほかは、前記実施例と同様にして比較用膜を作製I、
7(厚さ約10100n、、前記と同様に該比較用試料
の分光特性を測定した。ぞの結果を、第1図に併せて示
す。なお、同図中「C1」か、この比較用膜を示す。ま
た、何も堆積させていない前記と同様の透明石英基板の
分光特性を、第1図に併せて示す。同図中「C21か透
明基板の分光曲線を示す。
For comparison, a comparative film was prepared in the same manner as in the above example except that cerium dioxide was used instead of tarded.
7 (thickness: approximately 10,100 nm).The spectral characteristics of the comparison sample were measured in the same manner as above.The results are also shown in Figure 1. In addition, the spectral characteristics of a transparent quartz substrate similar to that described above on which nothing is deposited are also shown in Fig. 1. In the same figure, "C21" shows the spectral curve of a transparent substrate.

第1図より明らかのごとく、五酸化ニオブを混入させた
本実施例にかかる「1」の曲線か最も高い紫外線遮蔽能
を示していることが分る。
As is clear from FIG. 1, it can be seen that the curve "1" according to this example in which niobium pentoxide is mixed shows the highest ultraviolet shielding ability.

紫外光、可視光の境界付近である波長380nmにおけ
る透過率は、二酸化セリウムを堆積させた比較用膜rc
Nで63%であるのに対し、本実施例の膜「1」では3
3%であり、五酸化ニオブを混入させることにより、紫
外、可視光境界付近での紫外線遮蔽能か著しく向上して
いることか分る。
The transmittance at a wavelength of 380 nm, which is near the boundary between ultraviolet light and visible light, is that of the comparative film rc deposited with cerium dioxide.
While it is 63% for N, it is 3% for film “1” of this example.
3%, and it can be seen that by mixing niobium pentoxide, the ultraviolet shielding ability near the boundary between ultraviolet and visible light is significantly improved.

また、波長380〜780nmの可視光での光透過能は
、平均して二酸化セリウムだけの比較用膜「CI」では
82%であるに対して、本実施例の膜NJては74%と
、著しい低下は見出せない。
In addition, the light transmittance of visible light in the wavelength range of 380 to 780 nm is 82% on average for the comparison film "CI" made of only cerium dioxide, while it is 74% for the film NJ of this example. No significant decrease was found.

以」二のように、本実施例の紫外線遮蔽膜は波長380
nm未満ては遮蔽、それ以上では透過という微妙な要求
を満足する顕著な効果を有する膜である。
As shown in 2 below, the ultraviolet shielding film of this example has a wavelength of 380.
This film has a remarkable effect in satisfying the delicate requirements of shielding at wavelengths less than nm and transmitting at wavelengths larger than nm.

第2実施例 五酸化ニオブの添加量を変えて紫外線遮蔽膜を作成し、
該遮蔽膜の性能評価試験を実施して、五酸化ニオブの添
加量による分光曲線の違いについて調へた。以下、第1
実施例との相違点を中心に説明する。
Second Example A UV-shielding film was created by changing the amount of niobium pentoxide added.
A performance evaluation test of the shielding film was conducted to investigate differences in spectral curves depending on the amount of niobium pentoxide added. Below, the first
The explanation will focus on the differences from the embodiment.

基板、ガス、ターゲット、および該基板への複合酸化物
膜を被覆方法等は、前記第1実施例と同様である。五酸
化二オツの添加量は、投入電力によって制御した。各試
料の投入電力と組成を、第1表に示す。膜厚は、何れも
約1100nである。
The substrate, gas, target, method of coating the substrate with the composite oxide film, etc. are the same as in the first embodiment. The amount of diotide pentoxide added was controlled by the input power. Table 1 shows the input power and composition of each sample. The thickness of each film is approximately 1100 nm.

なお、五酸化ニオブの添加量か本発明外のものについて
も併せて示す。
The amount of niobium pentoxide added is also shown below.

第1表 これら試料の光透過率のうぢ、とくに可視−紫外境界域
付近を第2図および第3図に示す。第1表の試料番号は
、第2図および第3図の試料番号と対応している。
Table 1 The light transmittance of these samples, especially near the visible-ultraviolet boundary region, is shown in FIGS. 2 and 3. The sample numbers in Table 1 correspond to the sample numbers in FIGS. 2 and 3.

第2図および第3図より明らかのごとく、五酸化ニオブ
か28重量%含まれる「4」の試料か最高の紫外線遮蔽
能を示している。五酸化ニオブの添加量かこれよりも増
加しても減少しても試料の紫外線遮蔽能は低下している
。第2図の「2」は、10重量%の五酸化ニオブを含ん
でいるが、紫外線遮蔽能はそれほど高くなく、これ以下
の添加量では、紫外線遮蔽の機能はほとんど期待てきな
い。
As is clear from FIGS. 2 and 3, sample "4" containing 28% by weight of niobium pentoxide exhibits the highest ultraviolet shielding ability. No matter whether the amount of niobium pentoxide added is increased or decreased, the ultraviolet shielding ability of the sample decreases. Although "2" in FIG. 2 contains 10% by weight of niobium pentoxide, its ultraviolet shielding ability is not so high, and if the amount added is less than this, hardly any ultraviolet shielding function can be expected.

一方、第3図の「6」は、43重量%もの五酸化ニオブ
を含んでいるか、紫外線遮蔽能はすでに相当落ちており
、特に低波長側では、五酸化ニオブを含まない試料「C
3」よりも遮蔽能は低下している。
On the other hand, "6" in Figure 3 contains 43% by weight of niobium pentoxide, and its ultraviolet shielding ability has already decreased considerably, especially on the low wavelength side.
The shielding ability is lower than that of ``3''.

これらの結果より、本実施例において、五酸化ニオブの
添加量は10〜40重量96の範囲が好ましいことか分
る。
From these results, it can be seen that in this example, the amount of niobium pentoxide added is preferably in the range of 10 to 40% by weight.

第3実施例 基板として透明石英ガラスを用い、該基板表面に酸化セ
リウム(CaC2)と五酸化バナジウム(V2O3) 
 とからなる複合酸化物膜を第2実施例と同様に被覆し
て本発明にかかる複合材料を製造し、該材料の性能評価
試験を第2実施例と同様に実施した。
Third Example A transparent quartz glass was used as the substrate, and cerium oxide (CaC2) and vanadium pentoxide (V2O3) were added to the surface of the substrate.
A composite material according to the present invention was produced by coating a composite oxide film consisting of the following in the same manner as in the second example, and a performance evaluation test of the material was conducted in the same manner as in the second example.

すなわち、五酸化バナジウムの添加量を変えて紫外線遮
蔽膜を作成し、該遮蔽膜の性能評価試験を実施して、五
酸化バナジウムの添加量による分光曲線の違いについて
調べた。以下、第2実施例との相違点を中心に説明する
That is, ultraviolet shielding films were prepared with varying amounts of vanadium pentoxide added, and a performance evaluation test of the shielding films was conducted to examine differences in spectral curves depending on the amount of vanadium pentoxide added. Hereinafter, the differences from the second embodiment will be mainly explained.

基板、ガス、ターゲット、および該基板への複合酸化物
膜の被覆方法等は、前記第2実施例と同様である。五酸
化バナジウムの添加量は、投入電力によって制御した。
The substrate, gas, target, method of coating the substrate with a composite oxide film, etc. are the same as in the second embodiment. The amount of vanadium pentoxide added was controlled by input power.

各試料の投入電力と組成を、第2表に示す。膜厚は、何
れも約1100nである。なお、五酸化バナジウムの添
加量が本発明外のものについても併せて示す。
Table 2 shows the input power and composition of each sample. The thickness of each film is approximately 1100 nm. In addition, cases in which the amount of vanadium pentoxide added is outside the scope of the present invention are also shown.

第2表 これら試料の光透過率のうち、とくに可視−紫外境界域
付近を第4図に示す。第2表の試料番号は、第4図の試
料番号と対応している。
Table 2 Of the light transmittances of these samples, especially near the visible-ultraviolet boundary region is shown in FIG. The sample numbers in Table 2 correspond to the sample numbers in FIG.

第4図より明らかのごとく、五酸化バナジウムか10重
量%含まれる「7」の試料か最も広い紫外線遮蔽能を示
している。試料番号「8」、「9」と五酸化バナジウム
の濃度が高くなるに従って紫外線遮蔽領域は狭くなって
いく。ただし、五酸化バナジウムか30重量%程度含ま
れる試料番号「9」でも、五酸化バナジウムを含まない
比較試料「C4」よりは紫外線遮蔽領域はかなり広い。
As is clear from FIG. 4, sample "7" containing 10% by weight of vanadium pentoxide exhibits the widest ultraviolet shielding ability. In sample numbers "8" and "9", as the concentration of vanadium pentoxide increases, the ultraviolet shielding area becomes narrower. However, even sample number "9" containing about 30% by weight of vanadium pentoxide has a considerably wider ultraviolet shielding area than comparative sample "C4" which does not contain vanadium pentoxide.

これらの結果より、本実施例において五酸化バナジウム
の添加量が5〜50重量96程度の濃度範囲の場合、紫
外線遮蔽材として良好であることが分る。
From these results, it can be seen that in this example, when the amount of vanadium pentoxide added is in the concentration range of about 5 to 50% by weight, it is good as an ultraviolet shielding material.

第4実施例 基板として透明石英ガラスを用い、該基板表面に酸化セ
リウム(Ce02)と三酸化タングステン(WO,) 
 とからなる複合酸化物膜を第3実施例と同様に被覆し
て本発明にかかる複合材料を製造し、該材料の性能評価
試験を第3実施例と同様に実施した。
Fourth Example A transparent quartz glass was used as the substrate, and cerium oxide (Ce02) and tungsten trioxide (WO,) were used on the surface of the substrate.
A composite material according to the present invention was produced by coating a composite oxide film consisting of the following in the same manner as in the third example, and a performance evaluation test of the material was conducted in the same manner as in the third example.

すなわち、三酸化タングステンの添加量を変えて紫外線
遮蔽膜を作成し、該遮蔽膜の性能評価試験を実施して、
三酸化タングステンの添加量による分光曲線の違いにつ
いて調へた。以下、第3実施例との相違点を中心に説明
する。
That is, a UV shielding film was created by varying the amount of tungsten trioxide added, and a performance evaluation test of the shielding film was conducted.
We investigated the difference in spectral curves depending on the amount of tungsten trioxide added. Hereinafter, the explanation will focus on the differences from the third embodiment.

基板、ガス、ターゲット、および該基板への複合酸化物
膜の被覆方法等は、前記第3実施例と同様である。三酸
化タングステンの添加量は、投入電力によって制御した
。各試料の投入電力と組成を、第3表に示す。膜厚は、
何れも約1100nである。なお、三酸化タングステン
の添加量か本発明外のものについても併せて示す。
The substrate, gas, target, method of coating the substrate with a composite oxide film, etc. are the same as in the third embodiment. The amount of tungsten trioxide added was controlled by input power. Table 3 shows the input power and composition of each sample. The film thickness is
Both are about 1100n. Note that the amount of tungsten trioxide added is also shown, which is outside the scope of the present invention.

第3表 これら試料の光透過率のうち、とくに可視−紫外境界域
付近を第5図に示す。第3表の試料番号は、第5図の試
料番号と対応している。
Table 3 Among the light transmittances of these samples, especially the vicinity of the visible-ultraviolet boundary region is shown in FIG. The sample numbers in Table 3 correspond to the sample numbers in FIG.

第5図より明らかのごとく、三酸化タングステンが25
重量%含まれる川l」の試料か最も広い紫外線遮蔽能を
示している。試料番号「10」のように三酸化タングス
テンの濃度か低くなるに従って紫外線遮蔽領域は狭くな
っていく。ただし、三酸化タングステンか13重量%程
度含まれる試料番号「10」でも、三酸化タングステン
を含まない比較試料「C5」よりは紫外線遮蔽領域はか
なり広い。
As is clear from Figure 5, tungsten trioxide is 25
The sample containing 1% by weight showed the widest UV-shielding ability. As shown in sample number "10", as the concentration of tungsten trioxide decreases, the ultraviolet shielding area becomes narrower. However, even sample number "10" containing about 13% by weight of tungsten trioxide has a considerably wider ultraviolet shielding area than comparative sample "C5" which does not contain tungsten trioxide.

これらの結果より、本実施例において三酸化タングステ
ンの添加量か10〜30重量96程度の濃度範囲の場合
、紫外線遮蔽膜として良好であることか分る。
From these results, it can be seen that in this example, when the amount of tungsten trioxide added is in the concentration range of about 10 to 30% by weight, it is good as an ultraviolet shielding film.

2、3.4、5、6 ・・・ 第2実施例の紫外線遮蔽膜 C3・・・ 第2実施例の比較用膜 7.8.9 ・・・ 第3実施例の紫外線遮蔽膜C4・
・・ 第3実施例の比較用膜 10.11 ・・・ 第4実施例の紫外線遮蔽膜C5・
・・ 第4実施例の比較用膜
2, 3.4, 5, 6... Ultraviolet shielding film C3 of the second example... Comparative film of the second example 7.8.9... Ultraviolet shielding film C4 of the third example
... Comparative film 10.11 of the third example ... Ultraviolet shielding film C5 of the fourth example
... Comparative membrane of the fourth example

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の第1実施例にかかる紫外線遮蔽膜の光
透過特性を示す線図、第2図および第3図は本発明の第
2実施例にかかる紫外線遮蔽膜の光透過特性を示す線図
、第4図は本発明の第3実施例にかかる紫外線遮蔽膜の
光透過特性を示す線図、第5図は本発明の第4実施例に
かかる紫外線遮蔽膜の光透過特性を示す線図である。
FIG. 1 is a diagram showing the light transmission characteristics of the ultraviolet shielding film according to the first embodiment of the present invention, and FIGS. 2 and 3 are diagrams showing the light transmission characteristics of the ultraviolet shielding film according to the second embodiment of the present invention. FIG. 4 is a diagram showing the light transmission characteristics of the ultraviolet shielding film according to the third embodiment of the present invention, and FIG. 5 is a diagram showing the light transmission characteristics of the ultraviolet shielding film according to the fourth embodiment of the present invention. FIG.

Claims (1)

【特許請求の範囲】[Claims] (1)酸化セリウムとセリウムより価数の大きい金属の
酸化物とからなる複合酸化物であって、該金属の酸化物
の含有量が5〜50重量%であることを特徴とする紫外
線遮蔽膜。
(1) A composite oxide consisting of cerium oxide and an oxide of a metal with a higher valence than cerium, and the ultraviolet shielding film is characterized in that the content of the metal oxide is 5 to 50% by weight. .
JP18875990A 1990-07-17 1990-07-17 Ultraviolet-screening film Pending JPH0476083A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18875990A JPH0476083A (en) 1990-07-17 1990-07-17 Ultraviolet-screening film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18875990A JPH0476083A (en) 1990-07-17 1990-07-17 Ultraviolet-screening film

Publications (1)

Publication Number Publication Date
JPH0476083A true JPH0476083A (en) 1992-03-10

Family

ID=16229277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18875990A Pending JPH0476083A (en) 1990-07-17 1990-07-17 Ultraviolet-screening film

Country Status (1)

Country Link
JP (1) JPH0476083A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5618626A (en) * 1992-11-09 1997-04-08 Central Glass Company, Limited Glass plate with ultraviolet absorbing multilayer coating
JP2000179069A (en) * 1998-12-17 2000-06-27 Inax Corp Ultraviolet absorbing building material
FR2830529A1 (en) * 2001-10-10 2003-04-11 Rhodia Elect & Catalysis New rare earth metal tungstates useful as ultraviolet protection agents in plastic, paint, glass, textile or cosmetic products

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5618626A (en) * 1992-11-09 1997-04-08 Central Glass Company, Limited Glass plate with ultraviolet absorbing multilayer coating
JP2000179069A (en) * 1998-12-17 2000-06-27 Inax Corp Ultraviolet absorbing building material
FR2830529A1 (en) * 2001-10-10 2003-04-11 Rhodia Elect & Catalysis New rare earth metal tungstates useful as ultraviolet protection agents in plastic, paint, glass, textile or cosmetic products

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