JPH0474467U - - Google Patents

Info

Publication number
JPH0474467U
JPH0474467U JP11874690U JP11874690U JPH0474467U JP H0474467 U JPH0474467 U JP H0474467U JP 11874690 U JP11874690 U JP 11874690U JP 11874690 U JP11874690 U JP 11874690U JP H0474467 U JPH0474467 U JP H0474467U
Authority
JP
Japan
Prior art keywords
silicon
chamber
substrate
silicon substrate
communication hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11874690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11874690U priority Critical patent/JPH0474467U/ja
Publication of JPH0474467U publication Critical patent/JPH0474467U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP11874690U 1990-11-13 1990-11-13 Pending JPH0474467U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11874690U JPH0474467U (enrdf_load_stackoverflow) 1990-11-13 1990-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11874690U JPH0474467U (enrdf_load_stackoverflow) 1990-11-13 1990-11-13

Publications (1)

Publication Number Publication Date
JPH0474467U true JPH0474467U (enrdf_load_stackoverflow) 1992-06-30

Family

ID=31866699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11874690U Pending JPH0474467U (enrdf_load_stackoverflow) 1990-11-13 1990-11-13

Country Status (1)

Country Link
JP (1) JPH0474467U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010501810A (ja) * 2006-08-29 2010-01-21 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 流体流を制御するためのモジュールの製造方法および該方法により製造されたモジュール

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010501810A (ja) * 2006-08-29 2010-01-21 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 流体流を制御するためのモジュールの製造方法および該方法により製造されたモジュール

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