JPS63149554U - - Google Patents

Info

Publication number
JPS63149554U
JPS63149554U JP4283687U JP4283687U JPS63149554U JP S63149554 U JPS63149554 U JP S63149554U JP 4283687 U JP4283687 U JP 4283687U JP 4283687 U JP4283687 U JP 4283687U JP S63149554 U JPS63149554 U JP S63149554U
Authority
JP
Japan
Prior art keywords
recess
pressure sensor
semiconductor
semiconductor substrate
semiconductor pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4283687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4283687U priority Critical patent/JPS63149554U/ja
Publication of JPS63149554U publication Critical patent/JPS63149554U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP4283687U 1987-03-24 1987-03-24 Pending JPS63149554U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4283687U JPS63149554U (enrdf_load_stackoverflow) 1987-03-24 1987-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4283687U JPS63149554U (enrdf_load_stackoverflow) 1987-03-24 1987-03-24

Publications (1)

Publication Number Publication Date
JPS63149554U true JPS63149554U (enrdf_load_stackoverflow) 1988-10-03

Family

ID=30859133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4283687U Pending JPS63149554U (enrdf_load_stackoverflow) 1987-03-24 1987-03-24

Country Status (1)

Country Link
JP (1) JPS63149554U (enrdf_load_stackoverflow)

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