JPH0474425U - - Google Patents
Info
- Publication number
- JPH0474425U JPH0474425U JP11812690U JP11812690U JPH0474425U JP H0474425 U JPH0474425 U JP H0474425U JP 11812690 U JP11812690 U JP 11812690U JP 11812690 U JP11812690 U JP 11812690U JP H0474425 U JPH0474425 U JP H0474425U
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- aluminum wiring
- aluminum
- tungsten silicide
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 claims description 2
- 229910021342 tungsten silicide Inorganic materials 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
第１図は本考案の一実施例のアルミニウム配線
構造の断面図、第２図は従来のアルミニウム配線
構造の一例の断面図である。
１……第１のアルミニウム、２……タングステ
ンシリサイド、３……第２のアルミニウム、４…
…層間絶縁膜、５……シリコン基板。
FIG. 1 is a sectional view of an aluminum wiring structure according to an embodiment of the present invention, and FIG. 2 is a sectional view of an example of a conventional aluminum wiring structure. 1...First aluminum, 2...Tungsten silicide, 3...Second aluminum, 4...
...Interlayer insulating film, 5...Silicon substrate.
Claims (1)
アルミニウム配線がその配線の断面の中心部にタ
ングステンシリサイドを有することを特徴とする
半導体装置。 1. An aluminum wiring for a semiconductor device, wherein the aluminum wiring has tungsten silicide in the center of a cross section of the wiring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11812690U JPH0474425U (en) | 1990-11-09 | 1990-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11812690U JPH0474425U (en) | 1990-11-09 | 1990-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0474425U true JPH0474425U (en) | 1992-06-30 |
Family
ID=31866036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11812690U Pending JPH0474425U (en) | 1990-11-09 | 1990-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0474425U (en) |
-
1990
- 1990-11-09 JP JP11812690U patent/JPH0474425U/ja active Pending