JPH0474327A - Optical disk manufacturing device - Google Patents

Abstract

PURPOSE:To simply vary the film thickness in the radial direction irrespective of the diameter of a substrate and the kind of a substance for forming a film by making each shielding plate movable linearly in one direction extending from the outermost peripheral part to the center of each substrate for rotating by setting the disk center as an axis. CONSTITUTION:Between a substance for forming a film and a one piece or more of substrates 3 on which a film is formed, a shielding plate 7 for preventing the film from being accumulated on the substrate is provided, and the shielding plate 7 shields the substrates 3, respectively, and also, can move linearly in one direction extending from the outermost peripheral part to the center of each substrate 3 for rotating by setting the disk center as an axis. That is, the optical disk substrate 3 is covered with the shielding plate 8 first, and the shielding plate 7 is opened gradually in the course of forming a film. In this case, it is necessary that the optical disk substrate 3 rotates by setting the disk center as an axis in a substrate holder 6. In such a way, thickness of the film formed on the optical disk substrate 3 is uniform in the circular direction of the disk, and also, it is possible to thicken the film toward the direction.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an optical disc manufacturing apparatus, and particularly to an optical disc manufacturing apparatus that records and reproduces information using light.

[Conventional technology]

2. Description of the Related Art Conventional optical disc manufacturing apparatuses have a structure in which an optical disc that records and reproduces information using light has a recording film, a reflective film, a protective film, etc. formed on a transparent substrate such as glass or plastic.

Usually, a vapor deposition device or a substrate is used to deposit a film on a substrate.

A vacuum film-forming device such as a vacuum film-forming device is used.

1. When creating an optical disc using a vacuum film forming device,
To continuously change the V thickness in the radial direction of the disk during film formation, investigate the deposition distribution of each material to be deposited on the substrate, and adjust the distribution to obtain the desired film thickness distribution in the radial direction of the disk. It is necessary to adjust the board.

[Problem to be solved by the invention]

However, the above-mentioned conventional optical disc method has the disadvantage that when the diameter of the disc changes, it is necessary to prepare a new distribution plate and readjust it. [Means for Solving the Problem] The optical disc manufacturing apparatus of the present invention has the disadvantage that it is necessary to examine and readjust the distribution. A shielding plate is provided between the substrates to prevent film deposition on the substrate, and the shielding plate individually shields the substrate, and each shielding plate is connected to each substrate rotating around the center of the disk. is configured to be movable linearly in at least one direction from the outermost periphery to the center.

〔Example〕

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a sectional view showing one embodiment of the present invention.

The optical disk manufacturing device shown in FIG. 1 is an example in which a sputtering device is used as a vacuum film forming device, and an optical disk substrate 3 made of brass stick is set in a substrate holder 6 installed in a vacuum chamber 5 of the sputtering device. Then, film formation begins.

The optical disc substrate 3 is initially covered with a shielding plate 7,
The shielding plate 7 gradually opens during film formation.

At this time, it is necessary that the optical disc substrate 3 is rotating within the substrate holder 6 around the center of the disc. Thereby, the thickness of the film formed on the optical disc substrate 3 can be uniform in the circumferential direction of the disc, and can be made thicker at the outer periphery.

2(a) and 2(b) are both explanatory views of the operation of the shielding plate shown in FIG. 1.

Before film formation begins, the shielding plate 7 is closed as shown in FIG. 2(a).
A movable part 2 on a base part 1 completely covers an optical disc substrate 3. In this case, the substances flying from the target 4 cannot be deposited on the optical disc substrate l. Next, as shown in FIG. 2(b), when the movable part 2 is gradually moved during film formation, the film is formed on the optical disk substrate 3 gradually from the outer periphery toward the inner periphery. Become.

For this reason, the film forming time is longer on the outer periphery, and the material to be formed is deposited thicker on the outer periphery.

〔Effect of the invention〕

The optical disc manufacturing apparatus of the present invention has the advantage that the film thickness can be easily changed in the radial direction of the disc, regardless of the diameter of the substrate or the type of material to be deposited.

[Brief explanation of drawings]

Figure 1 is a sectional view showing one embodiment of the present invention, Figure 2 (a)
, (b) are both explanatory views of the operation of the shielding plate shown in FIG. 1. l... Base part, 2... Movable part, 3...
...Optical disk board, 4...Target,
5... Vacuum chamber, 6... Substrate holder, 7... Shielding plate. Agent Patent Attorney Susumu Uchihara

Claims (1)

[Claims] In an optical disk manufacturing apparatus having a shielding plate between a substance to be deposited and at least one or more substrates to be deposited, the shielding plate may individually shield the substrates. An optical disk manufacturing apparatus characterized in that each shielding plate is movable linearly in at least one direction from the outermost periphery to the center of each substrate rotating about the center of the disk.