JPH0473844B2 - - Google Patents
Info
- Publication number
- JPH0473844B2 JPH0473844B2 JP14205984A JP14205984A JPH0473844B2 JP H0473844 B2 JPH0473844 B2 JP H0473844B2 JP 14205984 A JP14205984 A JP 14205984A JP 14205984 A JP14205984 A JP 14205984A JP H0473844 B2 JPH0473844 B2 JP H0473844B2
- Authority
- JP
- Japan
- Prior art keywords
- lens
- refractive power
- lens group
- meniscus
- convex
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000004075 alteration Effects 0.000 description 19
- 206010010071 Coma Diseases 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 125000001475 halogen functional group Chemical group 0.000 description 3
- 230000004304 visual acuity Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000000295 emission spectrum Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Lenses (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14205984A JPS6120919A (ja) | 1984-07-09 | 1984-07-09 | 投影レンズ |
| GB08432300A GB2153543B (en) | 1983-12-28 | 1984-12-20 | A projection exposure apparatus |
| DE3447489A DE3447489C2 (de) | 1983-12-28 | 1984-12-27 | Verfahren und Vorrichtung zur Projektionsbelichtung |
| US07/212,148 US4977426A (en) | 1983-12-28 | 1988-06-24 | Projection exposure apparatus |
| US07/212,081 US4891663A (en) | 1983-12-28 | 1988-06-24 | Projection exposure apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14205984A JPS6120919A (ja) | 1984-07-09 | 1984-07-09 | 投影レンズ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6120919A JPS6120919A (ja) | 1986-01-29 |
| JPH0473844B2 true JPH0473844B2 (ko) | 1992-11-24 |
Family
ID=15306459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14205984A Granted JPS6120919A (ja) | 1983-12-28 | 1984-07-09 | 投影レンズ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6120919A (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5031245B2 (ja) * | 2006-02-23 | 2012-09-19 | 三菱重工環境・化学エンジニアリング株式会社 | ロータリーアトマイザ |
-
1984
- 1984-07-09 JP JP14205984A patent/JPS6120919A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6120919A (ja) | 1986-01-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |