JPH0473828U - - Google Patents
Info
- Publication number
- JPH0473828U JPH0473828U JP11537390U JP11537390U JPH0473828U JP H0473828 U JPH0473828 U JP H0473828U JP 11537390 U JP11537390 U JP 11537390U JP 11537390 U JP11537390 U JP 11537390U JP H0473828 U JPH0473828 U JP H0473828U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- base
- sensing means
- concentrating
- pressure sensing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000005452 bending Methods 0.000 claims 1
- 230000007423 decrease Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990115373U JP2530735Y2 (ja) | 1990-11-05 | 1990-11-05 | 力学量センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990115373U JP2530735Y2 (ja) | 1990-11-05 | 1990-11-05 | 力学量センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0473828U true JPH0473828U (fr) | 1992-06-29 |
| JP2530735Y2 JP2530735Y2 (ja) | 1997-03-26 |
Family
ID=31863139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990115373U Expired - Lifetime JP2530735Y2 (ja) | 1990-11-05 | 1990-11-05 | 力学量センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2530735Y2 (fr) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4932562U (fr) * | 1972-06-20 | 1974-03-22 | ||
| JPS618348U (ja) * | 1984-06-19 | 1986-01-18 | 三洋電機株式会社 | 大小比較回路 |
| JPS63146734U (fr) * | 1987-03-17 | 1988-09-28 |
-
1990
- 1990-11-05 JP JP1990115373U patent/JP2530735Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4932562U (fr) * | 1972-06-20 | 1974-03-22 | ||
| JPS618348U (ja) * | 1984-06-19 | 1986-01-18 | 三洋電機株式会社 | 大小比較回路 |
| JPS63146734U (fr) * | 1987-03-17 | 1988-09-28 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2530735Y2 (ja) | 1997-03-26 |
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