JPH034269U - - Google Patents
Info
- Publication number
- JPH034269U JPH034269U JP6416889U JP6416889U JPH034269U JP H034269 U JPH034269 U JP H034269U JP 6416889 U JP6416889 U JP 6416889U JP 6416889 U JP6416889 U JP 6416889U JP H034269 U JPH034269 U JP H034269U
- Authority
- JP
- Japan
- Prior art keywords
- hinge portion
- single crystal
- silicon single
- acceleration sensor
- crystal substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
- 239000013078 crystal Substances 0.000 claims 4
- 229910052710 silicon Inorganic materials 0.000 claims 4
- 239000010703 silicon Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 230000005484 gravity Effects 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 239000005388 borosilicate glass Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6416889U JPH034269U (fr) | 1989-05-31 | 1989-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6416889U JPH034269U (fr) | 1989-05-31 | 1989-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH034269U true JPH034269U (fr) | 1991-01-17 |
Family
ID=31594865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6416889U Pending JPH034269U (fr) | 1989-05-31 | 1989-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH034269U (fr) |
-
1989
- 1989-05-31 JP JP6416889U patent/JPH034269U/ja active Pending
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