JPS63146734U - - Google Patents
Info
- Publication number
- JPS63146734U JPS63146734U JP3877987U JP3877987U JPS63146734U JP S63146734 U JPS63146734 U JP S63146734U JP 3877987 U JP3877987 U JP 3877987U JP 3877987 U JP3877987 U JP 3877987U JP S63146734 U JPS63146734 U JP S63146734U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- chamber
- outer frame
- pressure
- thin plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002131 composite material Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3877987U JPS63146734U (fr) | 1987-03-17 | 1987-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3877987U JPS63146734U (fr) | 1987-03-17 | 1987-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63146734U true JPS63146734U (fr) | 1988-09-28 |
Family
ID=30851344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3877987U Pending JPS63146734U (fr) | 1987-03-17 | 1987-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63146734U (fr) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02151277A (ja) * | 1988-09-30 | 1990-06-11 | Rockwell Internatl Corp | ピエゾ電気駆動装置及び方法 |
| JPH0473828U (fr) * | 1990-11-05 | 1992-06-29 | ||
| WO2003087747A1 (fr) * | 2002-04-12 | 2003-10-23 | Hokuriku Electric Industry Co.,Ltd. | Capteur de force a semi-conducteur |
| JP2004004069A (ja) * | 2002-04-12 | 2004-01-08 | Hokuriku Electric Ind Co Ltd | 半導体力センサ |
| JP2017022783A (ja) * | 2016-10-20 | 2017-01-26 | 京セラ株式会社 | 音発生器 |
-
1987
- 1987-03-17 JP JP3877987U patent/JPS63146734U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02151277A (ja) * | 1988-09-30 | 1990-06-11 | Rockwell Internatl Corp | ピエゾ電気駆動装置及び方法 |
| JPH0473828U (fr) * | 1990-11-05 | 1992-06-29 | ||
| WO2003087747A1 (fr) * | 2002-04-12 | 2003-10-23 | Hokuriku Electric Industry Co.,Ltd. | Capteur de force a semi-conducteur |
| JP2004004069A (ja) * | 2002-04-12 | 2004-01-08 | Hokuriku Electric Ind Co Ltd | 半導体力センサ |
| JP2004003934A (ja) * | 2002-04-12 | 2004-01-08 | Hokuriku Electric Ind Co Ltd | 半導体力センサ |
| JP2017022783A (ja) * | 2016-10-20 | 2017-01-26 | 京セラ株式会社 | 音発生器 |