JPH0471871B2 - - Google Patents

Info

Publication number
JPH0471871B2
JPH0471871B2 JP58074577A JP7457783A JPH0471871B2 JP H0471871 B2 JPH0471871 B2 JP H0471871B2 JP 58074577 A JP58074577 A JP 58074577A JP 7457783 A JP7457783 A JP 7457783A JP H0471871 B2 JPH0471871 B2 JP H0471871B2
Authority
JP
Japan
Prior art keywords
crystal growth
crucible
single crystal
reflective layer
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58074577A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59199598A (ja
Inventor
Mitsuhiro Maruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KYUSHU DENSHI KINZOKU KK
Original Assignee
KYUSHU DENSHI KINZOKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KYUSHU DENSHI KINZOKU KK filed Critical KYUSHU DENSHI KINZOKU KK
Priority to JP7457783A priority Critical patent/JPS59199598A/ja
Publication of JPS59199598A publication Critical patent/JPS59199598A/ja
Publication of JPH0471871B2 publication Critical patent/JPH0471871B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP7457783A 1983-04-26 1983-04-26 結晶成長装置 Granted JPS59199598A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7457783A JPS59199598A (ja) 1983-04-26 1983-04-26 結晶成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7457783A JPS59199598A (ja) 1983-04-26 1983-04-26 結晶成長装置

Publications (2)

Publication Number Publication Date
JPS59199598A JPS59199598A (ja) 1984-11-12
JPH0471871B2 true JPH0471871B2 (enrdf_load_html_response) 1992-11-16

Family

ID=13551171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7457783A Granted JPS59199598A (ja) 1983-04-26 1983-04-26 結晶成長装置

Country Status (1)

Country Link
JP (1) JPS59199598A (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100450866B1 (ko) * 2001-11-30 2004-10-01 주식회사 실트론 잉곳 성장용 챔버의 커버
KR100964356B1 (ko) 2009-09-28 2010-06-17 퀄리플로나라테크 주식회사 실리콘 잉곳 성장 장치 및 실리콘 잉곳 성장 장치에 구비되는 진공 챔버용 몸체

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3650701A (en) * 1970-07-22 1972-03-21 Commissariat Energie Atomique Apparatus for growing crystalline bodies
GB1579276A (en) * 1976-08-23 1980-11-19 Borg Warner Heat exchanger for cooling exhaust gas
JPS5595319A (en) * 1979-01-12 1980-07-19 Wacker Chemitronic Pure semiconductor material* specially silicon precipitating device and method
DE3007377A1 (de) * 1980-02-27 1981-09-03 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zum tiegelfreien zonenschmelzen eines siliciumstabes
JPS5836998A (ja) * 1981-08-26 1983-03-04 Toshiba Ceramics Co Ltd 単結晶シリコン引上装置

Also Published As

Publication number Publication date
JPS59199598A (ja) 1984-11-12

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