JPH0471457B2 - - Google Patents

Info

Publication number
JPH0471457B2
JPH0471457B2 JP4969186A JP4969186A JPH0471457B2 JP H0471457 B2 JPH0471457 B2 JP H0471457B2 JP 4969186 A JP4969186 A JP 4969186A JP 4969186 A JP4969186 A JP 4969186A JP H0471457 B2 JPH0471457 B2 JP H0471457B2
Authority
JP
Japan
Prior art keywords
substrate
inspection
pattern
thin film
detection signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4969186A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62206433A (ja
Inventor
Noryuki Takamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP61049691A priority Critical patent/JPS62206433A/ja
Publication of JPS62206433A publication Critical patent/JPS62206433A/ja
Publication of JPH0471457B2 publication Critical patent/JPH0471457B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP61049691A 1986-03-07 1986-03-07 検査用基板 Granted JPS62206433A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61049691A JPS62206433A (ja) 1986-03-07 1986-03-07 検査用基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61049691A JPS62206433A (ja) 1986-03-07 1986-03-07 検査用基板

Publications (2)

Publication Number Publication Date
JPS62206433A JPS62206433A (ja) 1987-09-10
JPH0471457B2 true JPH0471457B2 (OSRAM) 1992-11-13

Family

ID=12838206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61049691A Granted JPS62206433A (ja) 1986-03-07 1986-03-07 検査用基板

Country Status (1)

Country Link
JP (1) JPS62206433A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2731914B2 (ja) * 1988-08-25 1998-03-25 ホーヤ株式会社 検査用基板およびその製造方法
KR100694597B1 (ko) 2005-07-28 2007-03-13 삼성전자주식회사 반도체 장치에서 패턴 결함 검출 방법
JP2009156574A (ja) * 2007-12-25 2009-07-16 Hitachi High-Technologies Corp 検査装置及び検査方法

Also Published As

Publication number Publication date
JPS62206433A (ja) 1987-09-10

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term