JPH0471387B2 - - Google Patents
Info
- Publication number
- JPH0471387B2 JPH0471387B2 JP57231166A JP23116682A JPH0471387B2 JP H0471387 B2 JPH0471387 B2 JP H0471387B2 JP 57231166 A JP57231166 A JP 57231166A JP 23116682 A JP23116682 A JP 23116682A JP H0471387 B2 JPH0471387 B2 JP H0471387B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- receiving element
- wear
- resistant material
- material layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 25
- 238000010030 laminating Methods 0.000 claims description 2
- 238000005286 illumination Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 108091008695 photoreceptors Proteins 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/024—Details of scanning heads ; Means for illuminating the original
- H04N1/028—Details of scanning heads ; Means for illuminating the original for picture information pick-up
- H04N1/03—Details of scanning heads ; Means for illuminating the original for picture information pick-up with photodetectors arranged in a substantially linear array
- H04N1/031—Details of scanning heads ; Means for illuminating the original for picture information pick-up with photodetectors arranged in a substantially linear array the photodetectors having a one-to-one and optically positive correspondence with the scanned picture elements, e.g. linear contact sensors
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Facsimile Heads (AREA)
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は一次元ラインセンサを用いる原稿読取
り装置に関し、特に一次元ラインセンサ上密着状
態で原稿を移動しながら読取りを行なうコンタク
ト方式原稿読取り装置に関する。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a document reading device using a one-dimensional line sensor, and more particularly to a contact-type document reading device that reads a document while moving it in close contact with the one-dimensional line sensor. .
従来、一次元ラインセンサを用いる原稿読取り
装置としては、長さ数cmの一次元ラインセンサに
縮小光学系を用いて原稿像を結像させて原稿の読
取りを行なうものが知られている。しかしなが
ら、この種の原稿読取り装置は結像のための光路
長が長く光学系の体積が大きいためにコンパクト
な読取装置の実現は不可能であつた。
Conventionally, as a document reading device using a one-dimensional line sensor, one is known that reads a document by forming a document image on a one-dimensional line sensor several centimeters in length using a reduction optical system. However, since this type of document reading device has a long optical path length for image formation and a large volume of the optical system, it has been impossible to realize a compact reading device.
一方、原稿巾と同じ長さの長尺一次元ラインセ
ンサを用いる等倍光学系を用いる場合において
は、光学系の体積は著しく減小でき、読取り装置
のコンパクト化が図れる。かかる等倍光学系を実
現する方法としては、集束性フアイバーを用いる
方法やコンタクトレンズアレイを用いる方法等が
知られている。又、こうしたフアイバーやレンズ
アレイを全く用いないで、一次元ラインセンサ上
密着状態で原稿を移動しながら読取りを行なうコ
ンタクト方式の原稿読取り方法（特開昭55−
74262号、特開昭55−75271号、特開昭56−45084
号、特開昭56−122172号）も本出願人の先出願に
係るものとして既に開発されている。 On the other hand, when using a same-magnification optical system using a long one-dimensional line sensor with the same length as the document width, the volume of the optical system can be significantly reduced, and the reading device can be made more compact. Known methods for realizing such a same-magnification optical system include a method using a focusing fiber and a method using a contact lens array. In addition, a contact-type document reading method (Japanese Patent Application Laid-Open No. 1983-1989) has been developed in which the document is read while moving it in close contact with a one-dimensional line sensor without using such fibers or lens arrays.
No. 74262, JP-A-55-75271, JP-A-56-45084
No. 56-122172) has also already been developed as related to the applicant's earlier application.
第１図は、上記コンタクト方式原稿読取り装置
の要部を一部破断して示す側断面図で、該装置を
概略説明するに、透明基板１１上に形成された一
次元ラインセンサを構成する複数個の受光素子１
２に、透明基板１１の照明窓１３を通つして入射
した光（この入射光に対しては受光素子１２は遮
光層１６によつて遮光されている）で原稿１４を
照明し、その反射光を受光素子１２で受けるよう
に構成され、不図示の電極配線を介して読み取り
信号を取り出すものである。したがつて、原稿１
４と受光素子１２間の間隔は、通常0.1mm程度と
して４〜８本／mmの読取り解像力が得られるが、
このような解像力を確保するためには、上記間隔
は厳密に制御されなければならない。該間隔の制
御は、透明耐摩耗材層１５を受光素子１２の上面
に被覆形成することによつて行なわれる。 FIG. 1 is a partially cutaway side sectional view showing the main part of the contact type original reading device. To briefly explain the device, a plurality of one-dimensional line sensors forming a one-dimensional line sensor formed on a transparent substrate 11 are shown in FIG. photodetector 1
2, the original 14 is illuminated with light that has entered through the illumination window 13 of the transparent substrate 11 (the light-receiving element 12 is shielded from light by the light-shielding layer 16 from this incident light), and its reflection is detected. It is configured so that light is received by a light receiving element 12, and a read signal is extracted through electrode wiring (not shown). Therefore, manuscript 1
4 and the light receiving element 12 is usually about 0.1 mm, and a reading resolution of 4 to 8 lines/mm can be obtained.
In order to ensure such resolution, the above-mentioned spacing must be strictly controlled. The spacing is controlled by coating the upper surface of the light-receiving element 12 with a transparent wear-resistant material layer 15.
ところで、上記コンタクト方式原稿読取り装置
においては、原稿１４が耐摩耗材層１５上をすべ
り移動（副走査）して順次読取りが行なわれるた
め耐摩耗性の高い材料であつても、摩耗が徐々に
進行し、耐摩耗材層１５の表面に微細な凹凸（荒
れ）ができて光の散乱がおこる。このために、受
光素子１２で得られるSN比（Ｓ／Ｎ）が劣化し
解像力も低下するという問題を生ずる。 By the way, in the above contact type document reading device, the document 14 slides on the wear-resistant material layer 15 (sub-scanning) and is sequentially read, so even if the material is highly wear-resistant, wear progresses gradually. However, fine irregularities (roughness) are formed on the surface of the wear-resistant material layer 15, causing light scattering. This causes a problem in that the signal-to-noise ratio (S/N) obtained by the light-receiving element 12 deteriorates and the resolution also decreases.
本発明の目的は、上記の問題点を解決した高性
能のコンタクト方式原稿読取り装置を提供するこ
とにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a high-performance contact type document reading device that solves the above problems.
本発明による原稿読取り装置は、原稿に対向し
て配される受光素子列、該受光素子列と原稿との
間に設けられ、その一部に原稿から受光素子列へ
の光の入射を許す受光窓を有する遮光層および前
記受光素子列と原稿との間に設けられた耐摩耗材
層からなり、前記原稿の一部領域からの光を前記
受光素子列で検出するコンタクト方式原稿読取り
装置において、前記遮光層および耐摩耗材層が、
前記受光素子列側から順に、該受光素子列を覆う
第１の耐摩耗材層、遮光層および前記原稿の一部
領域に対向する部位に凹溝を設けた第２の耐摩耗
材層を積層することによつて形成されたことを特
徴とするものである。
A document reading device according to the present invention includes a light-receiving element array disposed facing the original, a light-receiving element provided between the light-receiving element array and the original, and a part of which allows light to enter the light-receiving element array from the original. In the contact type original reading device, the contact type document reading device includes a light-shielding layer having a window and an abrasion-resistant material layer provided between the light-receiving element array and the document, and the light-receiving element array detects light from a partial area of the document. The light shielding layer and the wear-resistant material layer are
Laminating in order from the light-receiving element row side a first wear-resistant material layer that covers the light-receiving element row, a light shielding layer, and a second wear-resistant material layer having grooves provided in a portion facing a partial area of the document. It is characterized by being formed by.
第２図ａ，ｂに示すコンタクト方式原稿読取り
装置の参考例について説明するに、まず透明基板
２１上にCr蒸着膜の遮光層２６を形成し、次い
でホトリソエツチング行なつて照明窓２３を形成
した。続いて導電性Cr蒸着膜の遮光層２６を被
覆するように全面にSiH4とN2混合ガスをREグロ
ー放電分解法によつて3μｍ厚のSiNH絶縁膜２７
を形成し、更にSiH4ガスをREグロー放電分解し
て0.5μｍ厚の非晶質シリコン膜を形成した。そこ
で再びホトリソエツチングによつて75μ□の半導
体部（非晶質シリコン）として残る受光素子２２
の列を形成し、更にAl金属を全面被覆しホトリ
ソエツチングによつて電極配線２２−１，２２−
２を形成した。続いて受光素子２２および電極配
線２２−１，２２−２の保護用に1μｍ厚のSiNH
絶縁膜２８を被覆形成した。最後に紫外線硬化型
ポリマー（アクリルウレタン樹脂：関西ペイント
社製）を70μｍ厚にデイツピング塗布乾燥後受光
素子列上に合わせて100μｍのワイヤーを張つて
紫外線を全幅にわたつて照射し、続いてポリマー
を溶解する溶剤として例えばメチル・エチル・ケ
トン（MEK）を用いて受光素子列上のポリマー
のみを洗い出し、照明窓２３および受光素子２２
列に対する照明光反射区域の耐摩耗材層２５の部
位に凹溝２９を形成した。
To explain the reference example of the contact type original reading device shown in FIGS. 2a and 2b, first, a light shielding layer 26 of a Cr vapor deposition film is formed on a transparent substrate 21, and then photolithography is performed to form an illumination window 23. did. Next, a SiNH insulating film 27 with a thickness of 3 μm is formed using a RE glow discharge decomposition method using a mixed gas of SiH 4 and N 2 over the entire surface so as to cover the light shielding layer 26 of the conductive Cr vapor deposited film.
was formed, and SiH 4 gas was further decomposed by RE glow discharge to form an amorphous silicon film with a thickness of 0.5 μm. Thereupon, the photoreceptor element 22 remains as a 75μ□ semiconductor portion (amorphous silicon) by photolithography again.
The electrode wiring 22-1, 22-
2 was formed. Next, a 1 μm thick SiNH film was applied to protect the light receiving element 22 and the electrode wirings 22-1 and 22-2.
An insulating film 28 was formed to cover it. Finally, ultraviolet curable polymer (acrylic urethane resin, manufactured by Kansai Paint Co., Ltd.) was applied to a thickness of 70 μm by day coating and dried. A wire of 100 μm was stretched over the light-receiving element array, and ultraviolet rays were irradiated over the entire width. For example, methyl ethyl ketone (MEK) is used as a dissolving solvent to wash out only the polymer on the light receiving element array, and the illumination window 23 and the light receiving element 22 are washed out.
Grooves 29 were formed in the wear-resistant material layer 25 in the illumination light reflecting areas for the rows.
以上のようにして得られた構成を有する参考例
装置によれば、原稿２４は照明窓２３および受光
素子列の部分が凹溝２９となつているので、受光
素子２２列に対する照明光反射区域では原稿２４
は凹溝２９の両側の耐摩耗材層２５，２５に橋架
状態で矢印方向に移動し、長期にわたる反覆多数
回の読取りに対しても安定したSN比と解像力が
得られた。 According to the reference example device having the configuration obtained as described above, the original 24 has the concave groove 29 in the illumination window 23 and the light receiving element row, so that the illumination light reflecting area for the light receiving element 22 row is Manuscript 24
moved in the direction of the arrow in a bridging state to the wear-resistant material layers 25, 25 on both sides of the groove 29, and a stable SN ratio and resolution were obtained even for repeated readings over a long period of time.
受光素子２２列に対する照明光反射区域の耐摩
耗材層部位に凹溝を形成するには、上記した方法
に限られるものではなく、該当する部位を残して
100μｍ厚程度のフイルムやガラスを張付ける方
法や、機械的に凹溝切削する等種々の方法を採用
することができ、要は該当する部位に凹溝を形成
して、該部位における移動原稿と耐摩耗材層間の
摩擦摺接をなくすることで所期の目的を達成する
ことができる。 To form grooves in the wear-resistant material layer portion of the illumination light reflecting area for the 22 rows of light-receiving elements, the method is not limited to the above-mentioned method.
Various methods can be used, such as pasting a film or glass with a thickness of about 100 μm or mechanically cutting grooves.The key is to form grooves in the relevant areas and to separate the moving documents in those areas. The desired objective can be achieved by eliminating frictional sliding contact between the wear-resistant material layers.
第３図は、本発明の実施例を示すもので、図中
３１は透明基板、３２は受光素子、３３は照明
窓、３４は原稿、３５は硬化ポリマーからなる耐
摩耗材層、３７，３８はSiNH絶縁層である。以
上は第２図に示す参考例とほぼ同様な構成である
が第３図に示す実施例においては、耐摩耗材層３
５の上にCr等の金属蒸着による遮光層３６′を設
け、該遮光層３６′の所要部位に照明窓３３′を形
成した。さらに、第２図について説明したと同様
にして凹溝３９を形成した耐摩耗材層３５′を前
記遮光層３６′上に設ける。この実施例において
は受光素子３２の列がそれぞれ照明窓３３および
３３′を有する二つの遮光層３６、３６′間に配置
されているので第２図に示す参考例に比して解像
力を向上せしめるのに効果的である。 FIG. 3 shows an embodiment of the present invention, in which 31 is a transparent substrate, 32 is a light receiving element, 33 is an illumination window, 34 is an original, 35 is a wear-resistant material layer made of a hardened polymer, and 37 and 38 are It is a SiNH insulating layer. The above configuration is almost the same as the reference example shown in FIG. 2, but in the example shown in FIG. 3, the wear-resistant material layer 3
A light-shielding layer 36' formed by vapor deposition of a metal such as Cr was provided on the light-shielding layer 36', and illumination windows 33' were formed at desired portions of the light-shielding layer 36'. Furthermore, a wear-resistant material layer 35' having grooves 39 formed therein is provided on the light shielding layer 36' in the same manner as described with reference to FIG. In this embodiment, the row of light receiving elements 32 is arranged between two light shielding layers 36 and 36' having illumination windows 33 and 33', respectively, so that the resolution is improved compared to the reference example shown in FIG. It is effective.
以上の説明によつて明らかなように、本発明に
よれば、受光素子列側から順に、受光素子列を覆
う第１の耐摩耗材層、遮光層および原稿の一部領
域に対向する部位に凹溝を設けた第２の耐摩耗材
層を積層したのでSN比および解像力を向上せし
めるとともに長期間の使用によつても性能の低下
を来たすことなく従来のこの種装置に比較して優
れたコンタクト方式原稿読取り装置を提供するも
のである。
As is clear from the above description, according to the present invention, in order from the light-receiving element row side, the first wear-resistant material layer covering the light-receiving element row, the light-shielding layer, and the portion facing the part of the document are recessed. A second layer of wear-resistant material with grooves is laminated to improve the signal-to-noise ratio and resolution, and the contact method is superior to conventional devices of this type without degrading performance even after long-term use. The present invention provides a document reading device.
第１図は従来のコンタクト方式原稿読取り装置
の要部を一部破断して示す側断面図、第２図ａ，
ｂはコンタクト方式原稿読取り装置の参考例を示
し、ａは要部を一部破断して示す側断面図ｂは同
じく平面図である。第３図は本発明の実施例を示
す第２図ａと同様な側断面図である。
１１……透明基板、１２……受光素子、１３…
…照明窓、１４……原稿、１５……透明耐摩耗材
層、１６……遮光層、２１……透明基板、２２…
…受光素子、２２−１，２２−２……電極配線、
２３……照明窓、２４……原稿、２５……透明耐
摩耗材層、２６……遮光層、２７，２８……
SiNH絶縁膜、２９……凹溝、３１……透明基
板、３２……受光素子、３３，３３′……照明窓、
３４……原稿、３５，３５′……透明耐摩耗材層、
３６，３６′……遮光層、３７，３８……SiNH
絶縁層、３９……凹溝。
Fig. 1 is a partially cutaway side sectional view showing the main parts of a conventional contact type document reading device, Fig. 2a,
b shows a reference example of a contact type original reading device, a is a side sectional view showing a partially broken main part, and b is a plan view as well. FIG. 3 is a side sectional view similar to FIG. 2a showing an embodiment of the present invention. 11... Transparent substrate, 12... Light receiving element, 13...
...Illumination window, 14... Original, 15... Transparent wear-resistant material layer, 16... Light shielding layer, 21... Transparent substrate, 22...
... Light receiving element, 22-1, 22-2 ... Electrode wiring,
23... Illumination window, 24... Document, 25... Transparent wear-resistant material layer, 26... Light shielding layer, 27, 28...
SiNH insulating film, 29... Concave groove, 31... Transparent substrate, 32... Light receiving element, 33, 33'... Illumination window,
34... Original, 35, 35'... Transparent wear-resistant material layer,
36, 36'... Light shielding layer, 37, 38... SiNH
Insulating layer, 39...concave groove.
Claims (1)
素子列と原稿との間に設けられ、その一部に原稿
から受光素子列への光の入射を許す受光窓を有す
る遮光層および前記受光素子列と原稿との間に設
けられた耐摩耗材層からなり、前記原稿の一部領
域からの光を前記受光素子列で検出するコンタク
ト方式原稿読取り装置において、 前記遮光層および耐摩耗材層が、前記受光素子
列側から順に、該受光素子列を覆う第１の耐摩耗
材層、遮光層および前記原稿の一部領域に対向す
る部位に凹溝を設けた第２の耐摩耗材層を積層す
ることによつて形成されたことを特徴とするコン
タクト方式原稿読取り装置。[Scope of Claims] 1. A light-receiving element array arranged to face the original; a light-receiving window provided between the light-receiving element array and the original, and allowing light to enter the light-receiving element array from the original; and a wear-resistant material layer provided between the light-receiving element array and the document, the contact-type document reading device detecting light from a partial area of the document with the light-receiving element array, wherein the light-shielding and a wear-resistant material layer, in order from the light-receiving element row side, a first wear-resistant material layer covering the light-receiving element row, a light-shielding layer, and a second wear-resistant material layer provided with a concave groove in a portion facing a partial area of the document. A contact type document reading device characterized in that it is formed by laminating layers of wear-resistant material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57231166A JPS59122274A (en) | 1982-12-28 | 1982-12-28 | Contact type original reader |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57231166A JPS59122274A (en) | 1982-12-28 | 1982-12-28 | Contact type original reader |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59122274A JPS59122274A (en) | 1984-07-14 |
| JPH0471387B2 true JPH0471387B2 (en) | 1992-11-13 |
Family
ID=16919344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57231166A Granted JPS59122274A (en) | 1982-12-28 | 1982-12-28 | Contact type original reader |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59122274A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62262563A (en) * | 1986-05-08 | 1987-11-14 | Nec Corp | Contact type image sensor |
| US5097304A (en) * | 1986-10-07 | 1992-03-17 | Canon Kabushiki Kaisha | Image reading device with voltage biases |
| DE3789846T2 (en) * | 1986-10-07 | 1994-09-22 | Canon Kk | Image reading system. |
| US4805032A (en) * | 1987-04-20 | 1989-02-14 | Ricoh Company, Ltd. | Total contact type photoelectric conversion device and optical reader using the same |
| JPH0747874Y2 (en) * | 1987-07-22 | 1995-11-01 | 沖電気工業株式会社 | Contact image sensor |
| US4943839A (en) * | 1987-08-19 | 1990-07-24 | Ricoh Company, Ltd. | Contact type image sensor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5439590A (en) * | 1977-09-05 | 1979-03-27 | Nippon Telegr & Teleph Corp <Ntt> | Photo electric converter |
| JPS5645084A (en) * | 1979-09-20 | 1981-04-24 | Nippon Telegr & Teleph Corp <Ntt> | Manufacturing of light-electricity converter |
-
1982
- 1982-12-28 JP JP57231166A patent/JPS59122274A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5439590A (en) * | 1977-09-05 | 1979-03-27 | Nippon Telegr & Teleph Corp <Ntt> | Photo electric converter |
| JPS5645084A (en) * | 1979-09-20 | 1981-04-24 | Nippon Telegr & Teleph Corp <Ntt> | Manufacturing of light-electricity converter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59122274A (en) | 1984-07-14 |
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