JPH0470748U - - Google Patents
Info
- Publication number
- JPH0470748U JPH0470748U JP11361590U JP11361590U JPH0470748U JP H0470748 U JPH0470748 U JP H0470748U JP 11361590 U JP11361590 U JP 11361590U JP 11361590 U JP11361590 U JP 11361590U JP H0470748 U JPH0470748 U JP H0470748U
- Authority
- JP
- Japan
- Prior art keywords
- container
- detection means
- semiconductor wafer
- wafer storage
- state inside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990113615U JP2573205Y2 (ja) | 1990-10-30 | 1990-10-30 | 半導体ウェハ収納容器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990113615U JP2573205Y2 (ja) | 1990-10-30 | 1990-10-30 | 半導体ウェハ収納容器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0470748U true JPH0470748U (en, 2012) | 1992-06-23 |
| JP2573205Y2 JP2573205Y2 (ja) | 1998-05-28 |
Family
ID=31861221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990113615U Expired - Lifetime JP2573205Y2 (ja) | 1990-10-30 | 1990-10-30 | 半導体ウェハ収納容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2573205Y2 (en, 2012) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004519391A (ja) * | 2001-02-22 | 2004-07-02 | フィリップス エレクトロニクス ノース アメリカ コーポレイション | 相対湿度検出による電極パッドの使用不能時判断方法 |
| JP2004527899A (ja) * | 2001-01-10 | 2004-09-09 | エンテグリス カイマン リミテッド | 内部環境モニタを含む可搬式コンテナ |
| JP2006234608A (ja) * | 2005-02-25 | 2006-09-07 | Sumika Chemical Analysis Service Ltd | 基板搬送容器内空間の汚染状態の評価方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58203866A (ja) * | 1982-05-24 | 1983-11-28 | フロイント産業株式会社 | 乾燥保存容器 |
| JPS5997300A (ja) * | 1982-11-27 | 1984-06-05 | Matsushita Electric Ind Co Ltd | 振動センサ製造装置 |
-
1990
- 1990-10-30 JP JP1990113615U patent/JP2573205Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58203866A (ja) * | 1982-05-24 | 1983-11-28 | フロイント産業株式会社 | 乾燥保存容器 |
| JPS5997300A (ja) * | 1982-11-27 | 1984-06-05 | Matsushita Electric Ind Co Ltd | 振動センサ製造装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004527899A (ja) * | 2001-01-10 | 2004-09-09 | エンテグリス カイマン リミテッド | 内部環境モニタを含む可搬式コンテナ |
| JP2004519391A (ja) * | 2001-02-22 | 2004-07-02 | フィリップス エレクトロニクス ノース アメリカ コーポレイション | 相対湿度検出による電極パッドの使用不能時判断方法 |
| JP2006234608A (ja) * | 2005-02-25 | 2006-09-07 | Sumika Chemical Analysis Service Ltd | 基板搬送容器内空間の汚染状態の評価方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2573205Y2 (ja) | 1998-05-28 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |