JPH0470748U - - Google Patents
Info
- Publication number
- JPH0470748U JPH0470748U JP11361590U JP11361590U JPH0470748U JP H0470748 U JPH0470748 U JP H0470748U JP 11361590 U JP11361590 U JP 11361590U JP 11361590 U JP11361590 U JP 11361590U JP H0470748 U JPH0470748 U JP H0470748U
- Authority
- JP
- Japan
- Prior art keywords
- container
- detection means
- semiconductor wafer
- wafer storage
- state inside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
Landscapes
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990113615U JP2573205Y2 (ja) | 1990-10-30 | 1990-10-30 | 半導体ウェハ収納容器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990113615U JP2573205Y2 (ja) | 1990-10-30 | 1990-10-30 | 半導体ウェハ収納容器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0470748U true JPH0470748U (US20110009641A1-20110113-C00116.png) | 1992-06-23 |
JP2573205Y2 JP2573205Y2 (ja) | 1998-05-28 |
Family
ID=31861221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990113615U Expired - Lifetime JP2573205Y2 (ja) | 1990-10-30 | 1990-10-30 | 半導体ウェハ収納容器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2573205Y2 (US20110009641A1-20110113-C00116.png) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004519391A (ja) * | 2001-02-22 | 2004-07-02 | フィリップス エレクトロニクス ノース アメリカ コーポレイション | 相対湿度検出による電極パッドの使用不能時判断方法 |
JP2004527899A (ja) * | 2001-01-10 | 2004-09-09 | エンテグリス カイマン リミテッド | 内部環境モニタを含む可搬式コンテナ |
JP2006234608A (ja) * | 2005-02-25 | 2006-09-07 | Sumika Chemical Analysis Service Ltd | 基板搬送容器内空間の汚染状態の評価方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58203866A (ja) * | 1982-05-24 | 1983-11-28 | フロイント産業株式会社 | 乾燥保存容器 |
JPS5997300A (ja) * | 1982-11-27 | 1984-06-05 | Matsushita Electric Ind Co Ltd | 振動センサ製造装置 |
-
1990
- 1990-10-30 JP JP1990113615U patent/JP2573205Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58203866A (ja) * | 1982-05-24 | 1983-11-28 | フロイント産業株式会社 | 乾燥保存容器 |
JPS5997300A (ja) * | 1982-11-27 | 1984-06-05 | Matsushita Electric Ind Co Ltd | 振動センサ製造装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004527899A (ja) * | 2001-01-10 | 2004-09-09 | エンテグリス カイマン リミテッド | 内部環境モニタを含む可搬式コンテナ |
JP2004519391A (ja) * | 2001-02-22 | 2004-07-02 | フィリップス エレクトロニクス ノース アメリカ コーポレイション | 相対湿度検出による電極パッドの使用不能時判断方法 |
JP2006234608A (ja) * | 2005-02-25 | 2006-09-07 | Sumika Chemical Analysis Service Ltd | 基板搬送容器内空間の汚染状態の評価方法 |
JP4512505B2 (ja) * | 2005-02-25 | 2010-07-28 | 株式会社住化分析センター | 基板搬送容器内空間の汚染状態の評価方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2573205Y2 (ja) | 1998-05-28 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |