JPH0469767U - - Google Patents
Info
- Publication number
- JPH0469767U JPH0469767U JP11186190U JP11186190U JPH0469767U JP H0469767 U JPH0469767 U JP H0469767U JP 11186190 U JP11186190 U JP 11186190U JP 11186190 U JP11186190 U JP 11186190U JP H0469767 U JPH0469767 U JP H0469767U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- contact pressure
- probed
- pressure sensing
- support shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 23
Landscapes
- Measuring Leads Or Probes (AREA)
Description
第１図は、本考案の実施例１を示す断面図、第
２図は、本考案の実施例２を示す断面図、第３図
は、本考案に係る圧電素子の一例を示す断面図で
ある。
１……プローブ、２……プローブ探針部、３…
…ばね、４……圧電素子、５……支軸、６……被
探針部位、７……電極板、８……絶縁薄板。
FIG. 1 is a sectional view showing a first embodiment of the present invention, FIG. 2 is a sectional view showing a second embodiment of the present invention, and FIG. 3 is a sectional view showing an example of a piezoelectric element according to the present invention. be. 1... Probe, 2... Probe tip, 3...
... Spring, 4 ... Piezoelectric element, 5 ... Support shaft, 6 ... Probe site, 7 ... Electrode plate, 8 ... Insulating thin plate.
Claims (1)
被探針部位に接触させて該被探針部位の電気的特
性を計測する接触圧感知プローブであつて、 支軸は、昇降するもので、プローブを支持する
ものであり、 プローブは、プローブ探針部を有し、 プローブ探針部は、支軸に支持されたプローブ
に上下動可能に保持され、かつ下方に付勢された
もので、被探針部位に接触させるものであり、 圧電素子は、プローブ探針部にて押圧され、該
プローブ探針部の被探針部位に対する接触圧を感
知するものであることを特徴とする接触圧感知プ
ローブ。 (2) 支軸と、プローブと、圧電素子とを有し、
被探針部位に接触させて該被探針部位の電気的特
性を計測する接触圧感知プローブであつて、 支軸は、昇降するもので、プローブを支持する
ものであり、 プローブは、プローブ探針部が一体に形成され
、支軸に上下動可能に支持され、かつ、下方に付
勢されたもので、被探針部位にプローブ探針部を
接触させるものであり、 圧電素子は、プローブにて押圧され、該プロー
ブのプローブ探針部の被探針部位に対する接触圧
を感知するものであることを特徴とする接触圧感
知プローブ。 (3) 前記圧電素子は、対をなす電極板を有し、 対をなす電極板は、プローブ探針部が被探針部
位に接触した際の接触圧に対応して電気的に導通
するものであることを特徴とする請求項第(1)項
、第(2)項記載の接触圧感知プローブ。[Claims for Utility Model Registration] (1) Having a spindle, a probe, and a piezoelectric element,
A contact pressure sensing probe that measures the electrical characteristics of a probed region by contacting the probed region, the support shaft is one that moves up and down and supports the probe, The probe has a needle part, and the probe tip part is held in a vertically movable manner by a probe supported on a support shaft, and is biased downward, and is brought into contact with the probed site, and includes a piezoelectric element. A contact pressure sensing probe is characterized in that it is pressed by a probe tip and senses the contact pressure of the probe tip against a probed site. (2) It has a support shaft, a probe, and a piezoelectric element,
A contact pressure sensing probe that measures the electrical characteristics of a probed region by contacting the probed region, the support shaft is one that moves up and down and supports the probe, The needle part is integrally formed, is supported on a support shaft so as to be able to move up and down, and is biased downward to bring the probe tip part into contact with the probed area. 1. A contact pressure sensing probe, characterized in that the contact pressure sensing probe is pressed by a probe and senses the contact pressure of a probe tip portion of the probe against a probed site. (3) The piezoelectric element has a pair of electrode plates, and the pair of electrode plates is electrically conductive in response to contact pressure when the probe tip contacts the probed site. The contact pressure sensing probe according to claims (1) and (2), characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11186190U JPH0469767U (en) | 1990-10-25 | 1990-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11186190U JPH0469767U (en) | 1990-10-25 | 1990-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0469767U true JPH0469767U (en) | 1992-06-19 |
Family
ID=31859344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11186190U Pending JPH0469767U (en) | 1990-10-25 | 1990-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0469767U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06102302A (en) * | 1992-09-18 | 1994-04-15 | Fujitsu Ltd | Test device for thin film substrate |
-
1990
- 1990-10-25 JP JP11186190U patent/JPH0469767U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06102302A (en) * | 1992-09-18 | 1994-04-15 | Fujitsu Ltd | Test device for thin film substrate |
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