JPH0469547A - Device and method for body surface information detection - Google Patents

Abstract

PURPOSE:To detect surface information efficiently at a high speed by providing a light emitting means, an optical scanning means, 1st - 3rd detecting means, a signal processing means, and a control means and outputting a diffused light detection signal and a reflected light detection signal or a surface color detection signal and a height detection signal S3 at the same time according to reflected light from a body. CONSTITUTION:The reflected light L2 from the body 19 is imaged by the 1st optical means 13A of the 1st detecting means and split by a light splitting means 13B. The 1st divided reflected light L21 is cut off partially by a light shield means 13C and 1st reflected light L21 from the means 13C is detected as the scattered light detection signal S1 by the 1st photodetecting means 13D. Further, the reflected light L2 from the body 19 is split by the light splitting means 13B of the 1st detecting means 14 and part of the 2nd reflected light L22 passes through a partial opening means 14A. At this time, reflected light L22 from the partial opening means 14 is imaged by the 2nd optical means 14B and reflected light L22 is detected as the reflected light detection signal or surface color detection signal S2 by plural 2nd photodetecting means 14D.

Description

[Detailed description of the invention] [Table of contents] Overview Industrial field of application Prior art (Figure 8) Means for solving the problem to be solved by the invention (Figures 1 and 2) Working examples b) Description of the first embodiment (Figures 3 to 5) (ii)
Explanation of the second embodiment (6th session) (in) Explanation of the third embodiment (Fig. 7) Effects of the invention [Summary] Object surface information detection device, especially light reflectance, light diffusivity, high Regarding the device that detects the surface information of an object such as the surface color, the detection system for the reflected light (return light) from the object is devised to detect the object's light reflectance, light diffusivity, and height1. The purpose is to simultaneously detect objects such as objects, find any correlation between such information, and output surface information quickly and efficiently.
a light scanning means for deflecting and scanning the light; a first detection means for outputting a diffused light detection signal based on the reflected light from the object; and a first detection means for outputting a reflected light detection signal or a surface color detection signal based on the reflected light. a second detection means for outputting a height detection signal based on the reflected light; a third detection means for outputting a height detection signal based on the reflected light; and a third detection means for outputting the diffused light detection signal 1 reflected light detection signal or surface color detection signal and height detection signal. Controlling input/output of a signal processing means for processing a signal and outputting a surface detection signal, the light generation means, the light scanning means, the first detection means, the second detection means, the third detection means, and the signal processing means. In the first device, the first detection means includes a first optical means for forming an image of the reflected light, and a first optical means for dividing the imaged reflected light. a light dividing means for partially blocking the divided first reflected light; and a first light detecting means for detecting the first reflected light from the light blocking means; The detection means includes partial aperture means for partially passing the divided second reflected light, second optical means for forming an image of the second reflected light from the partial aperture means, and second optical means for forming an image of the second reflected light from the partial aperture means;
comprising a plurality of second light detection means for detecting reflected light of the first device, the second device being the first device,
a first optical means in which the detection means forms an image of the reflected light;
a first spatial filter that passes a part of the imaged reflected light and changes the direction of the reflected light; and a first light detection means that detects the changed direction of the reflected light; The second detection means includes a second optical means for forming an image of the reflected light that has passed through the first spatial filter, and a plurality of second light detection means for detecting the reflected light, The third device is a first device, wherein the first detection means includes a first optical means for forming an image of the reflected light, a part of the imaged reflected light is blocked, and , a second spatial filter that allows the reflected light to pass through, and a first light detection means that detects the blocked reflected light, and the second detection means detects the reflected light that has passed through the second spatial filter. The second to image
and a plurality of second light detection means for detecting the reflected light.

[Industrial application field]

The present invention relates to an object surface information detection apparatus and an object surface information detection method, and more specifically, an apparatus and method for detecting object surface information such as light reflectance, light diffusivity, height and surface color. It is something that takes place in between.

In recent years, with the automation of industry due to the spread of computers,
2. Description of the Related Art In the assembly and inspection process of ICs (semiconductor integrated circuit devices), object inspection devices are used to inspect the presence, surface color, positional deviation, etc. of mounted components on printed circuit boards.

By the way, when detecting surface information of an object, a reflected light detection device detects differences in light reflectance on the surface, a diffused light detection device detects the diffused light, and a height detection device detects the height. A device having a single function such as a surface color detection device for detecting the surface color of the surface color is used. For example, the mounting state of electronic components, wiring, etc. formed on a printed circuit board can be determined by detecting surface information such as light reflectance, light diffusion rate, height, and surface color. Being inspected. In such a case, when inspecting a loft unit in which a large amount of the same inspected object flows through the manufacturing process, a method using a single-function device may be used.

However, there are cases where it is desired to judge the quality of a small object such as a specific IC by integrating surface information such as light reflectance, light diffusivity, height, and surface color. In such a case, it is possible to process the surface information from each detection device centrally by going through the detection steps related to each individual device in order, but it takes time to process the data, and the inspection process is slow. The problem is that it lacks promptness.

Therefore, we devised a detection system to measure the light reflectance and light diffusivity of the object.
What is desired is an apparatus and method that can simultaneously detect height and surface color information, find any correlation between these pieces of information, and output surface information quickly and efficiently.

[Prior Art] FIGS. 8(a) to 8(c) are configuration diagrams of a conventional object surface information detection device.

FIG. 5A shows a configuration diagram of a detection device that detects the light reflectance and diffused light of an object such as a printed circuit board 5.

In the same figure (a), the detection device includes a laser light source IA,
Beam expander IB, mirror IC.

An optical scanning system consisting of a half mirror ID, a rotating polygon mirror 2A, a scanning lens 2B, and an optical mirror 7-2C, a lens 3A,
It is equipped with a photodetection system consisting of a pinhole plate 3B and an optical sensor 3C.

The functions of the device are as follows: First, when a laser beam L12 is generated from a laser light source IA, the laser beam L12 is widened by a beam expander IB. Further, the wide-angle laser beam L12 is deflected by a mirror IC, and the deflected laser beam L12 is divided by a half mirror ID.

The divided laser beam L12 is deflected and scanned by the rotating polygon mirror 2A and the scanning lens 2B, and the deflected and scanned laser beam L12 is deflected by the mirror 2C and reaches the printed circuit board 5. Here, the reflected light L2 from the printed circuit board 5
2 is a scanning lens 2B, a rotating polygon mirror 2A, and a half mirror.
It returns by ID and is imaged by lens 3A,
A part of the reflected light 22 passes through the pinhole plate 3B. The reflected light L22 that has passed is detected by the optical sensor 3C.

Thereby, the light reflectance of the printed circuit board 5 can be detected as the reflected light detection signal S23. Furthermore, in the photodetection system, by setting a light shielding plate 3D as shown in the broken line circle in the figure in place of the pinhole plate 3B, the diffused light of the printed circuit board 5 can be detected as a diffused light detection signal. .

FIG. 2B shows a configuration diagram of a detection device that detects height information of the printed circuit board 5. As shown in FIG.

In the same figure (b), the detection device is a half mirror ID.
The optical scanning system, lens 5A and PSD (Pos.
ition 5ensitive Detector
).

The function of the device is as follows: First, when the laser beam L12 is generated from the laser beam fIIA, the laser beam L12 is widened by the beam expander IB. Furthermore, the wide-angle laser beam LI2 is deflected by a mirror IC, and the deflected laser beam L12 is divided by a half mirror ID. The divided laser beam L12 is deflected and scanned by the rotating polygon mirror 2A and the scanning lens 2B, and the deflected and scanned laser beam L12 is deflected by the mirror 2C and reaches the printed circuit board 5. Here, the reflected light L from the printed circuit board 5
23 is imaged from the oblique θ direction via the lens 3A, and the reflected light L23 is detected by the PSD 5B as luminance information 11+12 height information (11-12)/(11+12).

Thereby, the height information of the printed circuit board 5 can be detected as the height detection signal S32.

FIG. 2C shows a configuration diagram of a detection device for detecting the surface color of the printed circuit board 5. As shown in FIG.

In the same figure (c), the detection device includes the above-mentioned optical scanning system,
Blue reflection filter Fl, green reflection filter F2, mirror 3E
and a detection system consisting of three optical sensors 3F to 3H.

The function of the device is that, first, when a laser light LI2 is generated from a laser light source IA, the laser light L12 is widened by a beam expander IB. Furthermore, the wide-angle laser beam L12 is deflected by a mirror IC, and the deflected laser beam L12 is divided by a half mirror ID. The divided laser beam L12 is deflected and scanned by the rotating polygon mirror 2A and the scanning lens 2B, and the deflected and scanned laser beam L12 is deflected by the mirror 2C and reaches the printed circuit board 5. Here, the reflected light L2 from the printed circuit board 5
4 is a scanning lens 2B, a rotating polygon mirror 2A, and a half mirror.
It is fed back by the ID and enters the blue reflection filter Fl. At this time, only the blue color is reflected and detected by the optical sensor 3F.

Further, the reflected light L24 that has passed through the blue reflection filter F1 is incident on the green reflection filter F2. At this time, only the green color is reflected and detected by the optical sensor 3G. Furthermore, the reflected light L24 that has passed through the green reflection filter F2 is reflected by the mirror 3E.
, and only the red color is detected by the optical sensor 3H.

As a result, the surface color information (red luminance information R1 green luminance information G and blue luminance information) of the printed circuit board 5 is transmitted to each sensor 3F.
It can be detected as the surface color detection signal S24 from ~3H.

[Problem to be solved by the invention]

By the way, according to the conventional example, when inspecting the presence/absence, surface color, positional shift, etc. of mounted components on a printed circuit board, a reflected light detection device, a diffused light detection device, a height detection device, a surface color detection device, etc. are used. A device with a single function is used.

For example, the mounting state of electronic components and wiring formed on a printed circuit board can be inspected for their presence or absence and positional deviation by detecting surface information such as light reflectance, light diffusivity, height and surface color. has been done. A method using such a single-function device is suitable for inspecting loft units in which a large amount of objects to be inspected that have gone through the same manufacturing process flow.

However, when inspecting a relatively small amount of object such as a specific IC, and when it is impossible to judge whether it is good or bad without comprehensively judging the surface information, there is a method using a single-function device. This may cause some inconvenience. In other words, when such a request is made, each of the above-mentioned detection devices performs detection processing of the object's light reflectance, light diffusion rate, height 9 surface color, etc. in order, and the surface information from the detection device is processed. One possible method is to centralize information processing and make comprehensive decisions.

In such a case, the time required to set the object to be detected on the detection device,
There is a problem in that the inspection process lacks speed because it takes time to move it to another detection device and time to process the surface information from each detection device.

The present invention has been created in view of the problems of the conventional example, and has been devised to detect the reflected light (return light) from an object to detect the light reflectance and light diffusivity of the object.

An object of the present invention is to provide an object surface information detection device that can simultaneously detect height 1 surface color information, find any correlation between the information, and output surface information quickly and efficiently.

[Means for Solving the Problems] FIGS. 1 and 2 (a) to (e) are principle diagrams of an object surface information detection device and an object surface information detection method according to the present invention, and a first diagram thereof. The principle diagrams of the second detection means are shown respectively.

As shown in FIG. 1, the first device includes a light generating means 11 that irradiates light L1 onto an object 19, a light scanning means 12 that deflects and scans the light L1, and a light beam L1 reflected from the object 19.
2, and a second detection means 14 that outputs a reflected light detection signal or surface color detection signal S2 based on the reflected light L2.
, a third detection means 15 that outputs a height detection signal S3 based on the reflected light L2, and the diffused light detection signal S11.
a signal processing means 16 for processing the reflected light detection signal or the surface color detection signal S2 and the height detection signal S3 and outputting the surface detection signal S4; and the light generation means 11. Optical scanning means 12
．． First detection means 13 Second detection means 14. Third detection means 15 and.

It is characterized by comprising a control means 17 for controlling input and output of the signal processing means 16, in the first device, a moving means 18 for moving the object 19 is provided, and the control means 17 In the first device, the first detection means 13 includes a first optical means for forming an image of the reflected light L2, as shown in FIG. 2(a). 13A, a light dividing means 13B for dividing the imaged reflected light L2, a light shielding means 13C for partially shielding the divided first reflected light L21, and a first light beam from the light shielding means 13C. The first detecting reflected light L21
The second detection means 14 comprises a light detection means 13D.
a partial aperture means 14A that partially passes the divided second reflected light L22; and a second optical means 14 that forms an image of the second reflected light L22 from the partial aperture means 14A.
B, and a plurality of second light detection means 14D for detecting the second reflected light L22, the second device being a first device, and the second light detection means 14D detecting the second reflected light L22. 13
As shown in FIG. 2(b), a first optical means 13A for forming an image of the reflected light L2, and a first optical means 13A for forming an image of the reflected light L2,
A first beam that transmits a part of the reflected light L2 and changes the direction of the reflected light L2.
spatial filter 1.3E, and the redirected reflected light L2.
The first photodetecting means 13D detects the second photodetecting means 13D.
a second optical means 14B for forming an image of the reflected light L2 that has passed through the first spatial filter 13E; and a plurality of second light detection means 14D for detecting the reflected light L2.
The third device is characterized in that in the first device, the first detection means 13 detects the reflected light L as shown in FIG. 2(C).
a first optical means 13A, a second spatial filter 13F that blocks a part of the imaged reflected light L2 and passes the reflected light L2; It consists of a first light detection means 13D that detects the reflected light L2, and the second detection means 14 is connected to the second spatial filter 1.
Second optical means 1 for forming an image of the reflected light L2 that has passed through the 3F
4B, and a plurality of second light detection means 14D for detecting the reflected light L2; In the third device, the first. The second spatial filters 1.3E and 1.3F are shown in FIG. 2(b).

As shown in (c), the first spatial filter 1.3E of the second device is inclined at an arbitrary angle θ with respect to the optical axis C of the reflected light L2. As shown in FIG. 2(d), the opening 20A through which the reflected light L2 passes has an elliptical shape, and the opening 20A has an elliptical shape.
The length l in the longitudinal direction with respect to the width direction d of 0A is d/sin
The second spatial filter 13F of the third device has a light blocking portion 20B that blocks the reflected light L2, as shown in FIG. 2(e). has an elliptical shape, and the light shielding portion 20B
The length in the longitudinal direction with respect to the width direction d! is d/sin θ
The method includes irradiating the object 19 with the light L1, and
The light L1 is subjected to a deflection scanning process, and the reflected light detection process 1 is subjected to a surface color detection process and a height detection process based on the reflected light L2 from the object I9, and the diffused light detection process 8 is reflected light. Detection processing The above object is achieved by performing acquisition processing of surface information of the object 19 based on surface color detection processing and height detection processing.

[For production]

According to the first device of the present invention, as shown in FIG. 1, the light generating means 11. Optical scanning means 12. First detection means 13.
Second detection means 14. Third detection means 15. A signal processing means 16 and a control means 17 are provided.

For example, when the light L1 is emitted from the light generating means 11, the light L1 is first deflected and scanned by the light scanning means 12, and is irradiated onto the object 19 whose movement is controlled. This results in
Based on the reflected light L2 from the object 19, the first detection means 13 outputs a diffused light detection signal S1, the second detection means 14 outputs a reflected light detection signal or surface color detection signal s2, and the third detection means 14 outputs a reflected light detection signal or surface color detection signal s2. A height detection signal s3 is simultaneously output from the detection means 15 of.

That is, the reflected light L2 from the object I9 is imaged by the first optical means 13A of the first detection means I3, and the imaged reflected light L2 is divided by the light splitting means 13B.

Further, the divided first reflected light L2I is partially blocked by the light shielding means I3C, and the first reflected light L2I from the light shielding means 13C is
The reflected light L21 is detected as a diffused light detection signal S1 by the first light detection means 13D. Further, the reflected light L2 from the object 19 is transmitted to the light splitting means 13B of the first detection means I4.
The divided second reflected light L22 partially passes through the partial aperture means 14A. At this time, the second reflected light L22 from the partial aperture means 14A is imaged by the second optical means 14B, and the second reflected light L22 is used as a reflected light detection signal or surface color detection signal s2 to form a plurality of signals. 2
The light is detected by the light detection means 14D.

Therefore, instead of using single-function devices sequentially as in the conventional example, by finding an arbitrary correlation between information such as the light reflectance, light diffusivity, height, and surface color of the object detected simultaneously, it is possible to detect the object. It becomes possible to efficiently and quickly detect surface information of a specific IC, etc. whose quality cannot be determined without comprehensive judgment of the surface information.

This significantly reduces the time required to send the object to be detected, such as the object 19, to the detection device, the travel time to move it to another detection device, and the data processing time to process the surface information from each detection device, compared to the conventional example. It is possible to achieve a significant reduction and speed up the inspection process.

Further, according to the second device of the present invention, which is the first device, the first optical means 13A, the first spatial filter 13E
and a first detection means 1 consisting of a first light detection means 13D.
3, and a second detection means I4 consisting of a second optical means 14B and a plurality of second light detection means 14D.

For example, the reflected light L2 from the object 19 is transmitted to the first optical means 1.
3A, a part of the imaged reflected light L2 passes through the first spatial filter 13E, and the reflected light L2 is deflected by the first spatial filter 13E. In this case, the first spatial filter 13E is provided to be inclined at an arbitrary angle θ with respect to the optical axis C of the reflected light L2, and the opening 20A through which the reflected light L2 passes has an elliptical shape. The length l in the longitudinal direction with respect to the width direction d of the opening 20A
is set to the relationship d/sinθ. Further, the reflected light L2 whose direction has been changed is detected by the first light detection means 1.3D as a diffused light detection signal S1. Further, the reflected light L2 that has passed through the first spatial filter 13E is imaged by the second optical means 14B of the second detection means 14, and the reflected light L2 is generated as a plurality of reflected light detection signals or surface color detection signals S2. is detected by the second light detection means 14D.

For this reason, the light splitting means 13B and the light shielding means 1 of the first device
3C and the partial aperture means 14A as the first spatial filter 13
Since it becomes possible to replace the light beam L2 with E, it becomes possible to simplify the components of the optical system that detects the reflected light L2 (return light) from the object 19.

This makes it possible to reduce costs in addition to the advantages of the first device.

Furthermore, according to the third device of the present invention, the first device includes the first optical means 13A, the second spatial filter 13
F. First detection means 1 consisting of first light detection means 130
3, second optical means 14B, and second light detection means 14D.
A second detection means 14 is provided.

For example, the reflected light L2 from the object 19 is transmitted to the first optical means 1.
3A, a part of the imaged reflected light L2 is blocked, and the reflected light L2 is passed through the second spatial filter 1.
Pass through 3F. In this case, the second spatial filter 1.3F
is provided to be inclined at an arbitrary angle θ with respect to the optical axis C of the reflected light L2, and blocks the reflected light L2.
B has an elliptical shape, and the length l in the longitudinal direction is set to be d/sin θ with respect to the width direction d of the light shielding portion 20B.

Further, the blocked reflected light L2 is transmitted to the first light detection means I3.
Detected by D. In addition, the second spatial filter 13F
The reflected light L2 that has passed through is imaged by the second optical means 14B, and the reflected light L2 is transmitted to a plurality of second optical detection means +4D.
Detected by

Therefore, similarly to the second device, the light splitting means 13B, the light shielding means 13C, and the partial aperture means 14A of the first device
Since it becomes possible to replace the second spatial filter 13F with one second spatial filter 13F, it becomes possible to simplify the components of the optical system that detects the reflected light L2 (return light) from the object 19.

This makes it possible to achieve cost reduction in addition to the advantages of the first device, similar to the second device.

According to the method of the present invention, the object 19 is
surface information has been acquired and processed.

For this reason, it is possible to efficiently and quickly detect the surface information of a specific IC, etc., whose quality cannot be determined without comprehensive judgment of the object's surface information, without using sequential single-function devices as in the conventional example. It becomes possible to do so.

This makes it possible to speed up the inspection process.

[Example] Next, an example of the present invention will be described with reference to the drawings.

3 to 7 are diagrams illustrating an object surface information detection device and an object surface information detection method according to an embodiment of the present invention.

(i) Description of the first embodiment FIG. 3 shows a configuration diagram of an object surface information detection device according to the first embodiment of the present invention. In the figure, 21 is a laser beam irradiation unit which is an example of the light generating means 11, including a laser light source 21A, a beam expander 21B,
It consists of a mirror 21C and a /'l-fmirror 21D.

The function of the laser beam irradiation unit 21 is to first widen the white laser beam Lll generated by the laser light source 21A with the beam expander 21B, and then change the direction of the wide-angle laser beam Lll with the mirror 21C. The laser beam L12 is divided by a half mirror 21D, and the laser beam L12 that has passed through the mirror 21D is incident on the rotating polygon mirror 22A.

A laser beam scanning unit 22 is an embodiment of the optical scanning means 12, and is composed of a rotating polygon mirror 22A, a scanning lens 22B, and a mirror 22C. The function of the laser beam scanning unit 22 is to deflect and scan the laser beam L12 that has passed through the mirror 21D using the rotating polygon mirror 22A, to deflect the deflected and scanned laser beam L12 using the mirror 22C, and to use it as an object to be detected. This is to irradiate the printed circuit board 29.

23 is a first feedback light detection unit which is an embodiment of the first detection means 13, and includes a lens 23A which becomes the first optical means 13A, and a half mirror 23 which becomes the light splitting means 13B.
B, a light-shielding spatial filter 23C serving as a light-blocking means 13C and a first optical sensor 23D serving as a first light-detecting means 13D;
Consists of. Note that the optical axis of the first feedback light detection unit 23 is located at the half mirror 2 with respect to the optical axis C related to the reflected light L21.
3B so that they are perpendicular to each other. 1st
As shown in FIG. 4, the function of the feedback light detection unit 23 is to first detect reflected light (feedback light) L from the printed circuit board 29.
21 is divided by a half mirror 21D to form a lens 23
When incident on A, the reflected light L21 is split by the half mirror 23B, and one reflected light L21 is sent to the filter 2.
3C, and the other reflected light L21 is made to enter the second feedback light detection unit 24. Thereby, the reflected light L21 that has entered the light-shielding spatial filter 23C is detected by the first optical sensor 23D. Here, the light-blocking spatial filter 23C includes a light-blocking portion 23E that blocks part of the reflected light L21.
is provided, has a circular shape, and is aligned with the optical axis C of the reflected light L21.

Thereby, the diffused light information of the printed circuit board 29 can be detected as the diffused light detection signal 51=Id.

24 is a second feedback light detection unit which is an example of the second detection means 14, and includes a pinhole plate 24A which becomes the partial aperture means 14A, and a lens 2 which becomes the second optical means 14B.
4B, a blue reflection filter Fl serving as a plurality of second light detection means 14D, a green reflection filter F2° mirror 24C and a second
- consists of fourth optical sensors 24D to 24F. In addition, the second
The optical axis of the feedback light detection unit 24 is aligned with the optical axis C related to the reflected light L21.

As shown in FIG. 4, the function of the second feedback light detection unit 24 is that the reflected light L21 from the half mirror 23B is detected by the pinhole plate 24. , A, the pinhole 24G
The reflected light L21 that has passed through is incident on the blue reflection filter Fl. At this time, only the blue light is reflected and the second light sensor 2
Detected by 4D. Further, the reflected light L21 that has passed through the blue reflection filter F1 is incident on the green reflection filter F2. At this time, only the green color is reflected and the third light sensor 24
Detected by E. Further, the reflected light L21 that has passed through the green reflective filter F2 is reflected by the mirror 24C, and only red light is detected by the fourth optical sensor 24F. Note that the pinhole 24G has a circular shape, and the optical axis C of the reflected light L21
is aligned to.

Thereby, the surface color detection signal or reflected light detection signal S3-IR, rG, IB, which is the surface color information (red luminance information R1 green luminance information G and blue luminance information) of the printed circuit board 29, can be detected.

25 is a third feedback light detection unit which is an example of the third detection means 15, and includes an imaging lens 25A and a P S
D (Position 5)
tector) Consists of 25B.

As shown in FIG. 4, the function of the third feedback light detection unit 25 is that the reflected light L21 from the printed circuit board 29 is
The reflected light l5 is imaged from the direction through the lens 25A.
21 is the luminance information 11-12. by the PSD 25B. Height information is detected as (II-T2)/(11+12).

Thereby, the height information of the printed circuit board 29 can be detected as the height detection signal S3-11.12.

26 is a signal processing circuit which is an example of the signal processing means 16, and based on the microcomputer 27, the diffused light detection signal Sl, the reflected light detection signal or the surface color detection signal S2 is processed.
and the surface detection signal S by processing the height detection signal S3.
This outputs 4. The details of the signal processing will be explained with reference to FIG.

Reference numeral 28 denotes a stage moving device which is an example of the moving means 18, and includes an XY stage 28 on which a printed circuit board 29 is placed.
This controls the movement of A.

27 is a microcomputer which is an embodiment of the control means 17, and the laser beam irradiation unit 21, the first to third
It controls input/output of the feedback light detection unit 23, 2425 and the stage moving device 28.

FIG. 5 is a diagram illustrating a signal processing circuit according to each embodiment of the present invention.

In the figure, 26 is a signal processing circuit, which includes A/D conversion circuits 26A to 26F and an image memory 26G. The function of the circuit is to first detect each detection signal 1d11 12, iR, I from the first to third feedback light detection units 23 to 25.
G and IB are subjected to analog/digital conversion processing by A/D conversion circuits 26A to 26F. Here, the detection signal T
d is converted into i-bit data by the A/D conversion circuit 26A and input as an address to the memory conversion table of the image memory 26G. In addition, the detection signal 11. T2 is A
The data is converted into j-bit data by the /D conversion circuits 26B and 26C, and the address is similarly input to the memory conversion table. Furthermore, the detection signals IR, IG and [B are A/D
It is converted into focus data by the conversion circuit 26A,
The address is input to the memory conversion table.

At this time, the contents of the table are
7 and is rewritten by arithmetic processing.

For example, in the case of detecting only the height information of the metal wiring formed on the printed circuit board 29 having light diffusivity, the first calculation process is performed by calculating the light diffusion detection signal Id using a preset first constant. (threshold level, etc.) and the height information (If-12) / (11+12) is greater than or equal to the second constant, n-bit output data "1" is output. Ru. In other cases, output data r□ is output.

The second calculation process is performed on a printed circuit board 29 having light diffusing properties.
In the case where two or more types of metal wiring are formed and the surface colors are red and blue, for example, when detecting only the red wiring area, the light diffusion detection signal 1d is the first one.
The surface color detection signals IR, IC, and I
B is in the relationship TR/(IR+IC+IB), and the third
is greater than or equal to the constant of
and whether the surface color detection signal IR is larger than the fourth constant;
Alternatively, if they are equivalent, n-bit output data "1" is output. In other cases, the output data "
0" is output.

The third calculation process is performed on a printed circuit board 29 having light diffusing properties.
In the case where two or more types of metal wiring are formed and the surface has a smooth state and a rough state, for example, when detecting only the smooth wiring area, the light diffusion detection signal Td is smaller than a preset first constant (threshold level, etc.) similarly to the first calculation process, and the height detection signal ■1.12. Surface color detection signals lR91G and IB are (IR+IC;+IB)/(11+I2+IR+IG+
Is it in the relationship IB) and is greater than the fifth constant?
Or, if they are equivalent, and the surface color detection signal I R + I C + l B is larger than the sixth constant, or if they are equivalent, the n-focus output data "1" is output. .In other cases, output data "Oj" is output.

This makes it possible to obtain data output after performing arbitrary arithmetic processing between each detection signal.

In this manner, according to the apparatus of the first embodiment of the present invention, the laser light irradiation unit 21. Laser beam scanning unit 2
2. First to third feedback light detection units 23 to 25. A signal processing circuit 26 and a microcomputer 27 are provided.

Therefore, when the white laser beam Lll is emitted from the laser beam irradiation unit 21, first, the laser beam scanning unit 2
2, the light Lll is deflected and scanned, and is irradiated onto the printed circuit board 29 whose movement is controlled. As a result, based on the reflected light L21 from the printed circuit board 29, the first feedback light detection unit 23 outputs the diffused light detection signal 5I=Id, and the second feedback light detection unit 24 outputs the reflected light detection signal or the surface Color detection signals 52=IR, IC, and IB are output, and the third feedback light detection unit 25 simultaneously outputs a height detection signal S3=+1.12.

With this, it is possible to signal any correlation between information such as the light reflectance, light diffusivity, height, surface color, etc. of the printed circuit board 29 detected simultaneously, without using a single-function device sequentially as in the conventional example. By determining this using the processing circuit 26 and the microcomputer 27, it becomes possible to determine whether the object is good or bad using specific information about the surface information of the object.

This reduces the time it takes to set a detection target such as the printed circuit board 29 on a detection device, the travel time to move it to another detection device, and the data processing time to process surface information from each detection device, compared to the conventional example. This will result in a significant reduction, making it possible to speed up inspection processing.

(ii) Explanation of the second embodiment FIGS. 6(a) and 6(b) show the configuration V of the eleventh and second feedback light detection units and the first spatial filter according to the second embodiment of the present invention. The plan view of each is shown.

In the same figure (a), the difference from the detection unit of the first embodiment is that the detection unit of the second embodiment uses reflected light L2.
] is the first. It is characterized in that the means for dividing the second feedback light detection unit into 23 and 24 is simplified.

That is, the first feedback light detection unit 23 detects the reflected light L
A lens 23A that images 21 and the imaged reflected light L
A first spatial filter 1.3E that allows a part of the reflected light L2 to pass through and deflects the reflected light L2;
It consists of a first optical sensor 23D that detects 21. Here, as shown in FIG. 6(a), the first spatial filter 13E is arranged at an angle θ, for example, with respect to the optical axis C of the reflected light L21.
It is installed at an angle of −45°. As a result, the optical axis of the first feedback light detection unit 23 is aligned with the reflected light L.
It can be made orthogonal to the optical axis C according to 21.

Further, as shown in FIG. 6(b), the first spatial filter 13E has an opening (light passing region) 20A through which the reflected light L21 passes, and has an elliptical shape, and the width direction of the opening 20A is The relationship is set such that the length l in the longitudinal direction is d/sin θ with respect to d. The opening 20A reflects the reflected light L.
21 may be allowed to pass therethrough, and it is not necessarily necessary to provide a physical through-hole. Furthermore, the area other than the light passing area is a light reflecting area.

The second feedback light detection unit 24 does not include the pinhole plate 24A of the first embodiment, and consists of a lens 24B, a blue reflection filter Fl, a green reflection filter F2 mirror 24C, and optical sensors 24D to 24F. Note that the optical axis of the second feedback light detection unit 24 is aligned with the optical axis C related to the reflected light L21.

Regarding the function of the second feedback light detection unit 24, the reflected light L21 transmitted through the opening 20A of the first spatial filter 13E is incident on the blue reflection filter F1. The subsequent steps are the same as those in the first embodiment, so the explanation will be omitted.

Thereby, the diffused light information of the print base Fi, 29 can be detected as the diffused light detection signal 51=Id. Further, the surface color detection signals 53=IRIG, rB can be detected.

In this way, according to the device of the second embodiment of the present invention, the first feedback light detection unit 23 consisting of the lens 23A, the first spatial filter 13E and the tap sensor 23D;
A second feedback light detection unit 7) 24 consisting of a lens 24B, each filter Fl, F2, a mirror 24C, and optical sensors 24D to 24F is provided, so that the reflected light L21 from the printed circuit board 29 is reflected by the lens 23A. A part of the imaged reflected light L12 passes through the first spatial filter 13E, and the reflected light L21 is deflected by the first spatial filter 13H. Further, the reflected light L21 whose direction has been changed is the diffused light detection signal S.
1 and is detected by the optical sensor 23D. Furthermore, the reflected light L21 that has passed through the first spatial filter 13E is
The reflected light L21 is imaged by the lens 24B of the feedback light detection unit 24, and the reflected light L21 is detected by the three optical sensors 24D as a reflected light detection signal or surface color detection signal S2.

With this, the half mirror 2 of the device according to the first embodiment
3B Light blocking spatial filter 23C and pinhole plate 2
4A can be replaced with the first spatial filter 13E, the reflected light L21 from the printed circuit board 29 (
This makes it possible to simplify the components of the optical system that detects the feedback light.

Thereby, in addition to the advantages of the first device, it is possible to reduce the cost of the detection device.

(iii) Explanation of the third embodiment FIGS. 7(a) and 7(b) show the first embodiment according to the third embodiment of the present invention. A configuration diagram of the second feedback light detection unit and the second feedback light detection unit.
3A and 3B respectively show plan views of spatial filters.

In the same figure (a), the difference from the detection unit of the first embodiment is that the detection unit of the third embodiment, like the detection unit of the second embodiment, transmits the reflected light L21 to the first. Second
It is characterized in that the means for dividing into the feedback light detection units 2324 is simplified.

That is, the first feedback light detection unit 23 detects the reflected light L
A lens 23A that images 21 and the imaged reflected light L
a second spatial filter 13F that blocks a part of the reflected light L21 and changes the direction of the reflected light L21;
It consists of an optical sensor 23D that detects 1. Here, as shown in FIG. 7(a), the second spatial filter 13F has an angle θ=45° with respect to the optical axis C of the reflected light L21.
It is installed at an angle. Thereby, the optical axis of the first feedback light detection unit 23 can be made perpendicular to the optical axis C of the reflected light L21.

Further, as shown in FIG. 7(b), in the second spatial filter 13F, a light shielding part (light reflection area) 20B that blocks the reflected light L21 has an elliptical shape, and the width direction of the light shielding part 20B is The relationship is set such that the length l in the long plane direction is d/sin θ with respect to d.

Note that in the second feedback light detection unit 24, the pinhole +ff124A is omitted as in the second embodiment, and the "
”・T24・by, (24B・Blue reflection)・”TIFl
, green reflection filter F2. It consists of a mirror 24C and optical sensors 24D to 24F. Regarding the function of the second feedback light detection unit 24, the reflected light L21 that has passed through the second spatial filter 13F is incident on the blue reflection filter Fl. The subsequent steps are the same as those in the first embodiment, so the explanation will be omitted.

Thereby, the diffused light information of the printed circuit board 29 can be detected as the diffused light detection signal 51=Id similarly to the second embodiment. Moreover, the surface color detection signal 53=IR,
IC and IB can be detected.

In this way, according to the device of the third embodiment of the present invention, the first feedback light detection unit 23 consisting of the lens 23A, the second spatial filter 13F and the main plug sensor 23D;
Lens 24B, each filter Fl, F2, mirror 24
C and a second feedback light detection unit 24 consisting of optical sensors 24D to 24F.

Therefore, the reflected light L21 from the printed circuit board 29 is imaged by the lens 23A, a part of the imaged reflected light L12 passes through the second spatial filter 13F, and the reflected light L21 is is deflected by a spatial filter 13F. Further, the reflected light L21 whose direction has been changed is the diffused light detection signal S.
1 and is detected by the optical sensor 23D. Furthermore, the reflected light L21 that has passed through the second spatial filter 13F is
The reflected light L21 is imaged by the lens 24B of the feedback light detection unit 24, and the reflected light L21 is detected by the three optical sensors 24D to 24F as a reflected light detection signal or surface color detection signal S2.

With this, the half mirror 2 of the device according to the first embodiment
3B, light blocking spatial filter 23C and pinhole plate 24
Since A can be replaced with the second spatial filter I3F, it is possible to simplify the optical system components that detect the reflected light L21 (return light) from the printed circuit board 29.

As a result, in addition to the advantages of the first device, it is possible to reduce the cost of the detection device as in the second embodiment.

It is.

[Effects of the Invention] As explained above, each device of the present invention includes a light generation means, a light scanning means, a first to third detection means, a signal processing means, and a control means, Based on the light, a diffused light detection signal 1, a reflected light detection signal, a surface color detection signal, and a height detection signal S3 can be output simultaneously.

Therefore, instead of using single-function devices sequentially as in the conventional example, surface information can be obtained by finding an arbitrary correlation between information such as light reflectance, light diffusivity, height, surface color, etc. of an object detected at the same time. can be detected efficiently and quickly.

Moreover, the second aspect of the present invention. According to the third device, the first and second
The spatial filter allows the functions of the light splitting means, the light shielding means, and the partial aperture means of the first device to be replaced by one function. This makes it possible to simplify the components of the optical system that detects reflected light (return light) from an object.

Thereby, the quality determination process using the specific information on the surface of the object can be made more efficient. Furthermore, it is possible to reduce the cost of the object surface information detection device.

[Brief explanation of the drawing]

FIG. 1 is a principle diagram of the object surface information detection device according to the present invention, and FIG. 2 is a diagram showing the principle of the object surface information detection device according to the present invention.
FIG. 3 is a diagram showing the principle of the second detection means; FIG. 3 is a configuration diagram of the object surface information detection device according to the first embodiment of the present invention; FIG. 4 is a diagram showing the principle of the second detection means; FIG. 5 is a diagram illustrating a signal processing circuit according to each embodiment of the present invention. FIG. 6 is a diagram illustrating a signal processing circuit according to a second embodiment of the present invention. FIG. 7 is a configuration diagram of the first and second feedback light detection units according to the third embodiment of the present invention, and FIG. 8 is a configuration diagram of the object surface according to the conventional example. FIG. 2 is a configuration diagram of an information detection device. (Explanation of symbols) 11... Light generation means, 12... Light scanning means, 13... First detection means, 14... Second detection means, 15... Third detection means , 16... Signal processing means, 17... Control means, 18... Moving means, 13A... First optical means, 13B... Light splitting means, 13C... Light shielding means, 13D. ...first light detection means, 13E...first spatial filter, 13F...second spatial filter, 14A...partial aperture means, 14B...second optical means, 14D-.・Second light detection means, 20A... opening, 20B... light shielding part, d... length in width direction, E... length in longitudinal direction, C... optical axis, Ll ...Light, L2...Reflected light, Sl...Diffused light detection signal, S2...Reflected light detection signal or surface color detection signal, S3...
...Height detection signal, S4...Surface detection signal.

Claims (9)

[Claims] (1) A light generating means (11) that irradiates the object (19) with light (L1), a light scanning means (12) that deflects and scans the light (L1), and a light beam (12) reflected from the object (19). a first detection means (13) that outputs a diffused light detection signal (S1) based on the reflected light (L2); and a first detection means (13) that outputs a reflected light detection signal or a surface color detection signal (S2) based on the reflected light (L2). 2 detection means (14), and a third detection means (15) that outputs a height detection signal (S3) based on the reflected light (L2).
and a signal processing means (16) for processing the diffused light detection signal (S1), the reflected light detection signal or surface color detection signal (S2), and the height detection signal (S3) to output a surface detection signal (S4). ), the light generating means (11), and the light scanning means (
12), first detection means (13), second detection means (1
4), third detection means (15) and signal processing means (16)
) A control means (17) for controlling input/output of the object surface information detecting device. (2) In the object surface information detection device according to claim 1,
An object surface information detection device characterized in that a moving means (18) for moving the object (19) is provided, and the control means (17) controls input and output of the moving means (18). (3) In the object surface information detection device according to claim 1,
The first detection means (13) comprises a first optical means (13A) for forming an image of the reflected light (L2), and a light splitting means (13B) for dividing the imaged reflected light (L2). , a light blocking means (13C) that partially blocks the divided first reflected light (L21), and a first light detection unit that detects the first reflected light (L21) from the light blocking means (13C). means(
13D), the second detection means (14) partially passes the divided second reflected light (L22), and the partial aperture means (14A);
A) from a second optical means (14B) that images the second reflected light (L22) and a plurality of second light detection means (14D) that detects the second reflected light (L22). An object surface information detection device characterized by: (4) The object surface information detection device according to claim 1,
The first detection means (13) is connected to a first optical means (13A) for forming an image of the reflected light (L2), and a first optical means (13A) for forming an image of the reflected light (L2); Reflected light (L2
), a first spatial filter (13E) that deflects the reflected light (L2), and a first light detection means (
13D), and the second detection means (14) detects the reflected light (L2) that has passed through the first spatial filter (13E).
) and a plurality of second optical detection means (14D) for detecting the reflected light (L2).
An object surface information detection device comprising: (5) In the object surface information detection device according to claim 1,
The first detection means (13) includes a first optical means (13A) that forms an image of the reflected light (L2), and a first optical means (13A) that blocks a part of the imaged reflected light (L2), and Reflected light (L2)
a second spatial filter (13F) that allows the light to pass through, and a first light detection means (13F) that detects the blocked reflected light (L2).
13D), and the second detection means (14) forms an image of the reflected light (L2) that has passed through the second spatial filter (13F); An object surface information detection device comprising a plurality of second light detection means (14D) for detecting L2). (6) In the object surface information detection device according to claims 4 and 5, the first and second spatial filters (13E, 13F
) is provided to be inclined at an arbitrary angle (θ) with respect to the optical axis (C) of the reflected light (L2). (7) The first object surface information detection device according to claim 4.
a spatial filter (13E), which filters the reflected light (L2
) through which the opening (20A) has an elliptical shape, and the longitudinal length (l) of the opening (20A) is set in a relationship such that d/sinθ with respect to the width direction d. An object surface information detection device. (8) The second object surface information detection device according to claim 5.
a spatial filter (13F), which filters the reflected light (L2
) has an elliptical shape, and the length in the longitudinal direction (
1) is set to the relationship d/sin θ. (9) The object (19) is irradiated with light (L1), the light (L1) is deflected and scanned, and the object (19) is
) performs diffuse light detection processing, reflected light detection processing, surface color detection processing, and height detection processing based on the reflected light (L2) from
A method for detecting surface information on an object, comprising acquiring surface information of the object (19) based on the diffused light detection process, reflected light detection process, surface color detection process, and height detection process.