JPH0467518A - Surface reforming of ceramic base material - Google Patents
Surface reforming of ceramic base materialInfo
- Publication number
- JPH0467518A JPH0467518A JP2178637A JP17863790A JPH0467518A JP H0467518 A JPH0467518 A JP H0467518A JP 2178637 A JP2178637 A JP 2178637A JP 17863790 A JP17863790 A JP 17863790A JP H0467518 A JPH0467518 A JP H0467518A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- organic
- superconductor thin
- noble metal
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 35
- 239000000463 material Substances 0.000 title abstract description 11
- 238000002407 reforming Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 claims abstract description 48
- 239000002887 superconductor Substances 0.000 claims abstract description 31
- 150000002736 metal compounds Chemical class 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 16
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000011259 mixed solution Substances 0.000 claims abstract description 14
- 229920005989 resin Polymers 0.000 claims abstract description 13
- 239000011347 resin Substances 0.000 claims abstract description 13
- 239000011230 binding agent Substances 0.000 claims abstract description 9
- 238000001035 drying Methods 0.000 claims abstract description 9
- 239000003960 organic solvent Substances 0.000 claims abstract description 8
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 8
- 229910052737 gold Inorganic materials 0.000 claims abstract description 7
- 239000010931 gold Substances 0.000 claims abstract description 7
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 6
- 238000010304 firing Methods 0.000 claims abstract description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 3
- 229910052709 silver Inorganic materials 0.000 claims abstract description 3
- 239000004332 silver Substances 0.000 claims abstract description 3
- 229910000510 noble metal Inorganic materials 0.000 claims description 32
- 239000000758 substrate Substances 0.000 claims description 24
- 238000000576 coating method Methods 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000012986 modification Methods 0.000 claims description 6
- 230000004048 modification Effects 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 239000010970 precious metal Substances 0.000 abstract 6
- 229910010293 ceramic material Inorganic materials 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- -1 Organic acid salts Chemical class 0.000 description 3
- 150000003058 platinum compounds Chemical class 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- XMGQYMWWDOXHJM-UHFFFAOYSA-N limonene Chemical compound CC(=C)C1CCC(C)=CC1 XMGQYMWWDOXHJM-UHFFFAOYSA-N 0.000 description 2
- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- 238000010023 transfer printing Methods 0.000 description 2
- 239000011882 ultra-fine particle Substances 0.000 description 2
- GYSCBCSGKXNZRH-UHFFFAOYSA-N 1-benzothiophene-2-carboxamide Chemical compound C1=CC=C2SC(C(=O)N)=CC2=C1 GYSCBCSGKXNZRH-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- HNNQYHFROJDYHQ-UHFFFAOYSA-N 3-(4-ethylcyclohexyl)propanoic acid 3-(3-ethylcyclopentyl)propanoic acid Chemical compound CCC1CCC(CCC(O)=O)C1.CCC1CCC(CCC(O)=O)CC1 HNNQYHFROJDYHQ-UHFFFAOYSA-N 0.000 description 1
- BTXXTMOWISPQSJ-UHFFFAOYSA-N 4,4,4-trifluorobutan-2-one Chemical compound CC(=O)CC(F)(F)F BTXXTMOWISPQSJ-UHFFFAOYSA-N 0.000 description 1
- YPIFGDQKSSMYHQ-UHFFFAOYSA-N 7,7-dimethyloctanoic acid Chemical compound CC(C)(C)CCCCCC(O)=O YPIFGDQKSSMYHQ-UHFFFAOYSA-N 0.000 description 1
- 235000007173 Abies balsamea Nutrition 0.000 description 1
- BQACOLQNOUYJCE-FYZZASKESA-N Abietic acid Natural products CC(C)C1=CC2=CC[C@]3(C)[C@](C)(CCC[C@@]3(C)C(=O)O)[C@H]2CC1 BQACOLQNOUYJCE-FYZZASKESA-N 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 239000004857 Balsam Substances 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- GHVNFZFCNZKVNT-UHFFFAOYSA-N Decanoic acid Natural products CCCCCCCCCC(O)=O GHVNFZFCNZKVNT-UHFFFAOYSA-N 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- 244000018716 Impatiens biflora Species 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- OBETXYAYXDNJHR-UHFFFAOYSA-N alpha-ethylcaproic acid Natural products CCCCC(CC)C(O)=O OBETXYAYXDNJHR-UHFFFAOYSA-N 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 229940072049 amyl acetate Drugs 0.000 description 1
- PGMYKACGEOXYJE-UHFFFAOYSA-N anhydrous amyl acetate Natural products CCCCCOC(C)=O PGMYKACGEOXYJE-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 239000010426 asphalt Substances 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 150000002343 gold Chemical class 0.000 description 1
- 150000002344 gold compounds Chemical class 0.000 description 1
- MNWFXJYAOYHMED-UHFFFAOYSA-M heptanoate Chemical compound CCCCCCC([O-])=O MNWFXJYAOYHMED-UHFFFAOYSA-M 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- UODXCYZDMHPIJE-UHFFFAOYSA-N menthanol Chemical compound CC1CCC(C(C)(C)O)CC1 UODXCYZDMHPIJE-UHFFFAOYSA-N 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 150000003057 platinum Chemical class 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000000341 volatile oil Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、超伝導体薄膜を形成させるセラミックス基材
の表面改質方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method for surface modification of a ceramic substrate for forming a superconductor thin film.
（従来技術とその問題点）
従来、セラミックス基材上に超伝導体薄膜を厚膜ペース
ト、有機超伝導体インク、スパッタリング、蒸着法によ
り形成させることか盛んに行われているか、超伝導体薄
膜を形成させるセラミックス基材はＴＳＺ等の超伝導体
と反応しない特殊なセラミックスを用いなければならず
、該特殊なセラミックスは高価で経済性に欠ける。(Prior art and its problems) Conventionally, superconductor thin films have been frequently formed on ceramic substrates by thick film paste, organic superconductor ink, sputtering, and vapor deposition methods. The ceramic base material used to form this must be a special ceramic that does not react with superconductors such as TSZ, and this special ceramic is expensive and lacks economic efficiency.
また、他の一般的なセラミックス基材では超伝導体薄膜
を直接、該セラミックス基材上に形成させると、超伝導
体薄膜として形成てきないという欠点かあった。In addition, other common ceramic substrates have the disadvantage that if a superconductor thin film is directly formed on the ceramic substrate, the superconductor thin film cannot be formed.
（発明の目的）
本発明は、上記従来法の欠点を解消するために成された
もので、有機貴金属化合物を含む混合溶液を用いて簡便
な塗布、乾燥、焼成という方法で貴金属薄膜を形成し、
一般的なセラミックス基材上に超伝導体薄膜を形成させ
ることのできるセラミックス基材の表面改質方法を提供
することを目的とする。(Objective of the Invention) The present invention has been made to eliminate the drawbacks of the conventional methods described above, and it forms a noble metal thin film by a simple method of coating, drying, and baking using a mixed solution containing an organic noble metal compound. ,
An object of the present invention is to provide a method for surface modification of a ceramic substrate, which allows a superconductor thin film to be formed on a general ceramic substrate.
（問題点を解決するための手段）
本発明は、セラミックス基材上に超伝導体薄膜を形成す
る方法において、超伝導体薄膜を形成する面側のセラミ
ックス基材上に有機貴金属化合物と有機バインダとして
の樹脂と有機溶剤を含む混合溶液を塗布、乾燥、焼成し
て、該セラミックス基材上に貴金属薄膜を形成させ超伝
導体薄膜形成用セラミックス基材とすることを特徴とす
るセラミックス基材の表面改質方法で、前記有機貴金属
化合物の貴金属か金、銀、白金、パラジウムから選ばれ
た１種以上を含むものであるセラミックス基材の表面改
質方法である。(Means for Solving the Problems) The present invention provides a method for forming a superconductor thin film on a ceramic substrate, in which an organic noble metal compound and an organic binder are placed on the ceramic substrate on the side on which the superconductor thin film is to be formed. A ceramic substrate characterized in that a mixed solution containing a resin and an organic solvent is applied, dried, and fired to form a noble metal thin film on the ceramic substrate to form a ceramic substrate for forming a superconductor thin film. This method is a method for surface modification of a ceramic base material containing one or more of the organic noble metal compounds selected from gold, silver, platinum, and palladium.
以下本発明の詳細について説明する。The details of the present invention will be explained below.
前記有機貴金属化合物と有機バインダとしての樹脂と有
機溶剤を含む混合溶液の有機貴金属化合物は貴金属の塩
化物と各種メルカプタン、硫化バルサム、ナフテン酸、
アビエチン酸、ステアリン酸、ネオデカン酸、デカン酸
、またはオクタン酸の有機酸と反応させて合成した有機
酸塩か、アセチルアセトンと貴金属の塩化物を反応させ
た貴金属錯体か用いられる。The organic noble metal compound of the mixed solution containing the organic noble metal compound, a resin as an organic binder, and an organic solvent contains a noble metal chloride, various mercaptans, sulfurized balsam, naphthenic acid,
Organic acid salts synthesized by reacting with organic acids such as abietic acid, stearic acid, neodecanoic acid, decanoic acid, or octanoic acid, or noble metal complexes produced by reacting acetylacetone with noble metal chlorides are used.
該有機酸塩か錯体とするのはそれぞれ熱分解温度か３０
０°Ｃ以下で貴金属金属に分解することかできるととも
に、有機バインダとしての樹脂と共通の有機溶剤で溶解
する二とかてき、しかも焼成すると不純物か残ることか
ないからである。The organic acid salt or the complex has a thermal decomposition temperature of 30°C, respectively.
This is because it can be decomposed into noble metals at temperatures below 0°C, it can be dissolved in the same organic solvent as the resin used as the organic binder, and it does not leave behind any impurities when fired.
また、必要により鉛、ビスマス、ケイ素、クロム、ホウ
素、アンチモン、バナジウム、カルシウム、マグネシウ
ム、マンガン、亜鉛、ジルコニウム、バリウム、ストロ
ンチウム、ランタン、およびニオブから成る群よりえら
ばれた１種または２種以上の金属の樹脂酸金属塩を加え
ることもてきるもので、上記の金属成分はセラミ・ノク
ス基材上に貴金属薄膜を形成する際に適量加えることで
貴金属薄膜の密着性を高めることかできる。In addition, if necessary, one or more selected from the group consisting of lead, bismuth, silicon, chromium, boron, antimony, vanadium, calcium, magnesium, manganese, zinc, zirconium, barium, strontium, lanthanum, and niobium. It is also possible to add metal resin acid metal salts, and the adhesion of the noble metal thin film can be improved by adding an appropriate amount of the above metal components when forming the noble metal thin film on the ceramic Nox substrate.
有機バインダとしての樹脂はエポキシ樹脂、アクリル樹
脂、アルキド樹脂、尿素樹脂、メラミン樹脂、ロジン誘
導体樹脂、テルペン樹脂およびアスファルトから成る群
から選び１種以上を貴金属薄膜を均一な厚みに形成する
ために塗布、乾燥時にダレ等のない適度の粘性を得られ
る特徴もある。The resin as an organic binder is selected from the group consisting of epoxy resin, acrylic resin, alkyd resin, urea resin, melamine resin, rosin derivative resin, terpene resin, and asphalt, and one or more resins are applied to form a noble metal thin film with a uniform thickness. It also has the characteristic of being able to obtain a suitable viscosity without sagging when drying.
また、有機溶媒としては、メンタノール、テルピネオー
ル、ブチルカルピトール、メチルエチルケトン、酢酸エ
チル、エチレングリコール、アミルアセテート、セルソ
ルブ、石油エーテル、クロロホルム、ジペンテン、四塩
化炭素、精油等より選んだ１種以上で前記有機貴金属化
合物と必要により加えられた樹脂金属塩と有機バインダ
としての樹脂を溶解して均一な溶液状にすることかでき
るものである。The organic solvent may be one or more selected from menthanol, terpineol, butylcarpitol, methyl ethyl ketone, ethyl acetate, ethylene glycol, amyl acetate, cellosolve, petroleum ether, chloroform, dipentene, carbon tetrachloride, essential oil, etc. A noble metal compound, a resin metal salt added as necessary, and a resin as an organic binder can be dissolved to form a uniform solution.
該有機貴金属化合物を含む混合溶液の成分割合はおおむ
ね、主成分としての有機貴金属化合物か１０〜６０ｗｔ
％で、有機バインダとしての樹脂が５〜２５ｗｔ％て、
有機溶媒か５〜５０ｗｔ％である。The component ratio of the mixed solution containing the organic noble metal compound is approximately 10 to 60 wt.
%, the resin as an organic binder is 5 to 25 wt%,
The organic solvent is 5 to 50 wt%.
上記の成分割合から成る有機貴金属化合物を含む混合溶
液を例えばスクリーン印刷て塗布、乾燥、焼成すると貴
金属薄膜として約０．２〜１．０μｍの厚みのものを得
ることかできる。When a mixed solution containing an organic noble metal compound having the above-mentioned component ratios is coated, for example, by screen printing, dried and baked, a noble metal thin film having a thickness of about 0.2 to 1.0 μm can be obtained.
また、乾燥温度は２５〜１２０°Ｃで、１０〜６０分間
て、焼成温度は６００〜１１００°Ｃて、１０〜６０分
間行えはよい。Further, the drying temperature may be 25 to 120°C for 10 to 60 minutes, and the firing temperature may be 600 to 1100°C for 10 to 60 minutes.
塗布方法についても前記スクリーン印刷法の他の方法で
あるディッピング、スプレ、筆塗法、転写印刷なとも可
能であり、何れかを用いればよく。As for the coating method, dipping, spraying, brush coating, and transfer printing, which are other methods than the screen printing method, are also possible, and any one of them may be used.
該有機貴金属化合物を含む混合溶液を用いて、塗布、乾
燥、焼成して従来法の欠点を解消することかできるのは
、該有機貴金属化合物を含む混合溶液か均一な溶液状で
あるため成分組成か均一で乾燥した場合でも部分凝集す
ることもなく、焼成した際には有機貴金属化合物である
ため熱分解しそれぞれか分子レベルに近い超微粒子かま
ず生成し、次いて金属薄膜になるため膨張、収縮の程度
か小さいことと、該超微粒子か生成するため金属化する
温度も低温で可能となるからで、セラミックス基材に対
し貴金属薄膜を均一に形成することかてきるからである
。The disadvantages of the conventional method can be overcome by coating, drying, and baking using a mixed solution containing the organic noble metal compound, because the mixed solution containing the organic noble metal compound is in a uniform solution state, so the composition of the components can be improved. It is homogeneous and does not partially agglomerate even when dried, and when fired, as it is an organic noble metal compound, it thermally decomposes, first producing ultrafine particles close to the molecular level, and then expanding to form a thin metal film. This is because the degree of shrinkage is small and the metallization temperature for producing the ultrafine particles can be kept at a low temperature, making it possible to uniformly form a noble metal thin film on a ceramic substrate.
なお、貴金属薄膜の厚みを調節するには有機貴金属化合
物の割合を調節するか、印刷条件等の塗布条件を変える
か、塗布、乾燥、焼成の操作を繰り返すことて可能であ
るか繰り返し回数は３回以下か好ましい、その理由は生
産性に欠けるからで、貴金属薄膜の厚みは０．２〜１．
０μｍであることか好ましく０．１μｍ以下では超伝導
体薄膜とセラミックス成分との反応を防ぐことかできず
、２．０μｍＪｌｌ上では効果に変わりなく経済性に欠
けるからである。In addition, in order to adjust the thickness of the noble metal thin film, it is possible to adjust the proportion of the organic noble metal compound, change the coating conditions such as printing conditions, or repeat the coating, drying, and baking operations.The number of repetitions is 3. The thickness of the noble metal thin film is preferably 0.2 to 1.5 times or less because it lacks productivity.
It is preferable that the thickness be 0 μm; if it is less than 0.1 μm, it will not be possible to prevent the reaction between the superconductor thin film and the ceramic component, and if it is above 2.0 μm Jll, it will not be economical, although it will not be effective.
以上により超伝導体薄膜を形成させるセラミックス基材
上に貴金属薄膜を形成させることて、般的セラミックス
基村上でも超伝導体薄膜を形成させることかできるもの
である。By forming a noble metal thin film on a ceramic substrate on which a superconductor thin film is to be formed as described above, a superconductor thin film can also be formed on a general ceramic substrate.
その理由は、例えば一般的セラミックスとしてアルミナ
上に超伝導体薄膜を直接形成させるとセラミックス成分
と反応して超伝導を示すペロブスカイト構造かくずれて
超伝導体とならず、これを防ぐためにアルミナ上に有機
白金化合物を含む混合溶液を用いて、塗布、乾燥、焼成
して白金薄膜を形成して表面改質したのち超伝導体薄膜
を形成するとペロブスカイト構造か保たれるからである
。The reason for this is that, for example, if a superconductor thin film is directly formed on alumina as a general ceramic, it will react with the ceramic components and the perovskite structure, which exhibits superconductivity, will collapse and not become a superconductor. This is because if a mixed solution containing an organic platinum compound is applied, dried, and fired to form a platinum thin film to modify the surface, and then a superconductor thin film is formed, the perovskite structure is maintained.
以下、本発明に係わる実施例を記載するか、該実施例は
本発明を限定するものではない。Hereinafter, examples related to the present invention will be described, but the examples are not intended to limit the present invention.
（実施例１）
９９．５％アルミナ基材（１０閣ｘｌＯ即×厚み０．６
３５ｍｍ）上に有機白金化合物を含む混合溶液として、
市販品の白金メタロオーガニック（日中貴金属工業製：
ＥＳ−１６）をスクリーン印刷法で塗布し、室温で１
０分間乾燥し、１２０°Ｃて１０分間加熱乾燥し、次い
で８５０°Ｃて１０分間焼成して、該９９．５％アルミ
ナ基材上に厚み０２μｍの白金薄膜を形成した。(Example 1) 99.5% alumina base material (10 cm x 10 x thickness 0.6
35 mm) as a mixed solution containing an organic platinum compound,
Commercially available platinum metallo organic (manufactured by Nichi-Kizoku Kogyo:
ES-16) was applied by screen printing method and 1
It was dried for 0 minutes, heated and dried at 120°C for 10 minutes, and then fired at 850°C for 10 minutes to form a platinum thin film with a thickness of 02 μm on the 99.5% alumina base material.
この白金薄膜を形成し表面改質した９９．５％アルミナ
基村上に超伝導体薄膜としてスパッタ法てＣｕ−Ｂｉ−
Ｙの複合酸化物を形成させたところ、超伝導を示すペロ
ブスカイト構造か保たれていた。This platinum thin film was formed on a surface-modified 99.5% alumina substrate, and a superconductor thin film was sputtered onto Cu-Bi-
When a Y complex oxide was formed, the perovskite structure, which exhibits superconductivity, was maintained.
（従来例）
実施例１て用いた９９．５％アルミナ基材上に直接実施
例１と同様に超伝導体薄膜を形成させたか、超伝導を示
すペロブスカイト構造は見られなかった。(Conventional Example) Either a superconductor thin film was directly formed on the 99.5% alumina base material used in Example 1 in the same manner as in Example 1, or a perovskite structure exhibiting superconductivity was not observed.
（実施例２）
実施例１て用いた有機白金化合物を含む混合溶液のかわ
りに有機金化合物を含む混合溶液として市販品の金メタ
ロオーガニック（日中貴金属工業製：ＡＰ２２２ＣＡ）
を転写印刷法により塗布し、室温で１０分間乾燥し、次
いで８５０°Ｃて１０分間焼成して厚み０．２５μｍの
金薄膜を形成した。(Example 2) In place of the mixed solution containing the organic platinum compound used in Example 1, a commercially available gold metallo organic (AP222CA, manufactured by Nichi-Kizoku Kogyo Co., Ltd.) was used as a mixed solution containing the organic gold compound.
was applied by a transfer printing method, dried at room temperature for 10 minutes, and then baked at 850°C for 10 minutes to form a gold thin film with a thickness of 0.25 μm.
この金薄膜を形成し表面改質した９９．５％アルミナ基
村上に超伝導体薄膜としてスパッタ法てＣｕ−Ｂｉ−Ｙ
の複合酸化物を形成させたところ、超伝導を示すペロブ
スカイト構造か保たれていた。This gold thin film was formed on a surface-modified 99.5% alumina substrate and sputtered as a superconductor thin film of Cu-Bi-Y.
When a composite oxide was formed, the perovskite structure, which exhibits superconductivity, was maintained.
（発明の効果）
本発明は、以上説明したように白金、金等の貴金属の薄
膜を塗布、乾燥、焼成という簡便な方法で形成して得ら
れた貴金属薄膜により、従来超伝導体薄膜を形成させる
ことのてきなかった一般的セラミックス基材の表面改質
し、超伝導体薄膜を形成することかでき利用範囲を拡大
することか可能で経済的にも極めて効果の高いものであ
ると言える。(Effects of the Invention) As explained above, the present invention is capable of forming a superconductor thin film using a noble metal thin film obtained by forming a thin film of a noble metal such as platinum or gold by a simple method of coating, drying, and firing. It can be said that the surface modification of general ceramic substrates, which has not been possible before, and the formation of superconductor thin films can expand the scope of use and are extremely effective economically.
Claims (2)
法において、超伝導体薄膜を形成する面側のセラミック
ス基材上に有機貴金属化合物と有機バインダとしての樹
脂と有機溶剤を含む混合溶液を塗布、乾燥、焼成して、
該セラミックス基材上に貴金属薄膜を形成させ超伝導体
薄膜形成用セラミックス基材とすることを特徴とするセ
ラミックス基材の表面改質方法。(1) In the method of forming a superconductor thin film on a ceramic substrate, a mixed solution containing an organic noble metal compound, a resin as an organic binder, and an organic solvent is placed on the ceramic substrate on the side on which the superconductor thin film is to be formed. Coating, drying, firing,
A method for surface modification of a ceramic substrate, which comprises forming a noble metal thin film on the ceramic substrate to obtain a ceramic substrate for forming a superconductor thin film.
パラジウムから選ばれた１種以上を含むものである請求
項１に記載のセラミックス基材の表面改質方法。(2) The noble metal of the organic noble metal compound is gold, silver, platinum,
The method for surface modification of a ceramic substrate according to claim 1, which contains one or more selected from palladium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2178637A JPH0467518A (en) | 1990-07-06 | 1990-07-06 | Surface reforming of ceramic base material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2178637A JPH0467518A (en) | 1990-07-06 | 1990-07-06 | Surface reforming of ceramic base material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0467518A true JPH0467518A (en) | 1992-03-03 |
Family
ID=16051942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2178637A Pending JPH0467518A (en) | 1990-07-06 | 1990-07-06 | Surface reforming of ceramic base material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0467518A (en) |
-
1990
- 1990-07-06 JP JP2178637A patent/JPH0467518A/en active Pending
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