JPH0238964A - Production of thin film oxygen sensor - Google Patents
Production of thin film oxygen sensorInfo
- Publication number
- JPH0238964A JPH0238964A JP63189890A JP18989088A JPH0238964A JP H0238964 A JPH0238964 A JP H0238964A JP 63189890 A JP63189890 A JP 63189890A JP 18989088 A JP18989088 A JP 18989088A JP H0238964 A JPH0238964 A JP H0238964A
- Authority
- JP
- Japan
- Prior art keywords
- ink
- thin film
- platinum
- coating
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 48
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 21
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 21
- 239000001301 oxygen Substances 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 80
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 40
- 239000007784 solid electrolyte Substances 0.000 claims abstract description 28
- 238000000034 method Methods 0.000 claims abstract description 17
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 16
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 9
- 239000010408 film Substances 0.000 abstract description 16
- 238000001035 drying Methods 0.000 abstract description 13
- 239000011248 coating agent Substances 0.000 abstract description 12
- 238000000576 coating method Methods 0.000 abstract description 12
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 abstract description 8
- 229910001928 zirconium oxide Inorganic materials 0.000 abstract description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 7
- 238000007650 screen-printing Methods 0.000 abstract description 7
- 230000004043 responsiveness Effects 0.000 abstract description 3
- 238000001354 calcination Methods 0.000 abstract 4
- 229910000510 noble metal Inorganic materials 0.000 abstract 1
- 230000002194 synthesizing effect Effects 0.000 abstract 1
- RSWGJHLUYNHPMX-UHFFFAOYSA-N 1,4a-dimethyl-7-propan-2-yl-2,3,4,4b,5,6,10,10a-octahydrophenanthrene-1-carboxylic acid Chemical compound C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 17
- 239000000758 substrate Substances 0.000 description 13
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 6
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 238000010304 firing Methods 0.000 description 4
- 239000005373 porous glass Substances 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 150000003057 platinum Chemical class 0.000 description 3
- 239000010970 precious metal Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerol Natural products OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- -1 glycerin ester Chemical class 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 150000002314 glycerols Chemical class 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 150000003746 yttrium Chemical class 0.000 description 1
- 150000003754 zirconium Chemical class 0.000 description 1
Landscapes
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、固体電解質型薄膜酸素センサの多孔質薄膜白
金電極と薄膜ジルコニア固体電解質を製造する方法に関
するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a method for manufacturing a porous thin film platinum electrode and a thin zirconia solid electrolyte for a solid electrolyte thin film oxygen sensor.
（従来技術とその問題点）
従来、固体電解質型薄膜酸素センサの白金薄膜電極は真
空蒸着法で３μｍ程度の膜厚を形成し、固体電解質とし
てのジルコニア薄膜はスパッタリングでやはり３μｍ程
度の膜厚を長時間かけて形成させている。この方法では
特殊な製造装置が必要でその形成原理上歩留りが悪く、
高価な貴金属を有効に利用出来ない点や工業生産性に欠
けるなどの問題がある。(Prior art and its problems) Conventionally, the platinum thin film electrode of a solid electrolyte thin film oxygen sensor was formed to a thickness of about 3 μm by vacuum evaporation, and the zirconia thin film as a solid electrolyte was also formed to a thickness of about 3 μm by sputtering. It takes a long time to form. This method requires special manufacturing equipment and has a low yield due to its formation principle.
There are problems such as inability to utilize expensive precious metals effectively and lack of industrial productivity.
他にペーストを用いる方法もあるが、膜厚１０μｍ以上
で酸素センサとしての性能とくに応答性が悪い問題があ
る。Another method is to use a paste, but there is a problem that the performance as an oxygen sensor, especially the response, is poor when the film thickness is 10 μm or more.
（発明の目的）
本発明は、固体電解質型薄膜酸素センサの多孔質薄膜白
金電極と薄膜ジルコニア固体電解電解質形成における上
記従来の諸問題を解決するためになされたもので、有機
白金インクと有機ジルコニウムインクを用い簡便な方法
で薄膜を形成でき、省貴金属化を計りしかも応答性を高
めるための薄膜形成方法で０．１〜５μｍの薄膜を形成
する方法を提供することを目的とする。(Object of the Invention) The present invention was made to solve the above-mentioned conventional problems in forming a porous thin film platinum electrode and a thin film zirconia solid electrolyte for a solid electrolyte thin film oxygen sensor. An object of the present invention is to provide a method for forming a thin film of 0.1 to 5 μm by a simple method using ink, saving precious metals, and improving responsiveness.
（問題点を解決するための手段）
本発明は、固体電解質型薄膜酸素センサの多孔質薄膜白
金電極を有機白金インクを用いて形成し、薄膜ジルコニ
ア固体電解質を有機ジルコニウムインクを用いて形成す
ることを特徴とする酸素センサの製造方法である。(Means for Solving the Problems) The present invention provides a method for forming a porous thin film platinum electrode of a solid electrolyte type thin film oxygen sensor using an organic platinum ink, and forming a thin film zirconia solid electrolyte using an organic zirconium ink. This is a method of manufacturing an oxygen sensor characterized by the following.
以下本発明をより詳細に説明する。The present invention will be explained in more detail below.
（１）多孔質アルミナ基板または多孔質ガラス基板上に
有機白金インクをスクリーン印刷、筆塗り、ディッピン
グ、スプレー、スピンコーティング、スタンプ法等の各
種の一般的方法で塗布し、室温で１（１−１５分間乾燥
した後、１００〜２２０℃で１０〜１５分間加熱乾燥す
る。次に７００〜１０００℃で１０〜１５分間焼成して
白金の多孔質薄膜を形成させることできる。(1) Organic platinum ink is applied onto a porous alumina substrate or a porous glass substrate by various common methods such as screen printing, brush painting, dipping, spraying, spin coating, and stamping. After drying for 15 minutes, it is heated and dried at 100-220°C for 10-15 minutes.Next, it is baked at 700-1000°C for 10-15 minutes to form a porous thin film of platinum.
該多孔質アルミナ基板及び多孔質ガラス基板は酸素セン
サ用として一般的に用いられているもので問題はない。The porous alumina substrate and the porous glass substrate are commonly used for oxygen sensors, and there is no problem.
白金の多孔質薄膜を形成するために塗布する有機白金イ
ンクは、樹脂酸の白金塩と他の樹脂酸の金属塩とバイン
ダとしてのロジン誘導体樹脂及び溶剤で合成されたもの
で、その合成割合は、樹脂酸の白金塩を１０〜３０重量
％、他の樹脂酸の金属塩として樹脂酸鉛、樹脂酸ビスマ
ス、樹脂酸ケイ素及び樹脂酸アンチモンで０．３〜３重
１％、ロジン誘導体樹脂には例えばロジンのグリセリン
エステル、ロジンのペンタエリストール、エステル等で
１−１０重量％及び溶剤（残部）は例えばテルペンアル
コール等各成分に共通した有機溶媒を用い混合し溶解し
て合成する。The organic platinum ink applied to form a porous thin film of platinum is synthesized from a platinum salt of a resin acid, a metal salt of another resin acid, a rosin derivative resin as a binder, and a solvent, and the synthesis ratio is , 10-30% by weight of platinum salt of resin acid, 0.3-1% by weight of lead resinate, bismuth resinate, silicon resinate and antimony resinate as metal salts of other resin acids, and rosin derivative resin. is synthesized by mixing and dissolving 1 to 10% by weight of rosin glycerin ester, rosin pentaerythol, ester, etc., and the solvent (remainder) using an organic solvent common to each component, such as terpene alcohol.
上記の割合で合成された有機白金インクを用いてスクリ
ーン印刷により塗布し、乾燥、焼成したときの白金薄膜
の厚さは０．０５〜０．３μｍであり、任意の膜厚を得
るには膜形成工程を繰り返せば簡単にでき、合成された
有機白金インクは液体であり、あらゆる形状の基体上に
塗布することができ、膜厚も安定したものが得られる。The thickness of the platinum thin film when applied by screen printing using the organic platinum ink synthesized at the above ratio, dried, and fired is 0.05 to 0.3 μm. It can be easily achieved by repeating the formation process, and the synthesized organic platinum ink is liquid and can be applied to substrates of any shape, providing a stable film thickness.
また１回の膜形成工程で膜厚を厚くしたい場合は、樹脂
酸の白金塩の割合を高めれば可能である。Furthermore, if it is desired to increase the film thickness in one film forming step, this can be achieved by increasing the proportion of the platinum salt of the resin acid.
該白金の多孔質薄膜としては０．１〜１μｍが好ましい
とされており、上記に示した合成割合の有機白金インク
で数回、膜形成工程を繰り返せば十分目的とする膜厚を
得られる。しかも繰り返し塗布、乾燥、焼成工程を行っ
ても薄膜にとビ割れを生ずることはなく、この方法で得
られた薄膜を拡大して観察すると均一な多孔質のもので
あった。The porous thin film of platinum is said to preferably have a thickness of 0.1 to 1 μm, and the desired film thickness can be sufficiently obtained by repeating the film forming process several times using the organic platinum ink having the synthesis ratio shown above. Moreover, even after repeated coating, drying, and firing steps, no cracking occurred in the thin film, and when the thin film obtained by this method was observed under magnification, it was found to be uniformly porous.
尚、該有機白金インクに合成されている白金以外の樹脂
酸の金属塩は基板の成分により割合及び金属成分を変え
ることも密着性を高める場合等で可能である。Note that the ratio and metal component of the metal salt of a resin acid other than platinum synthesized in the organic platinum ink may be changed depending on the components of the substrate in order to improve adhesion.
（２）多孔質アルミナ基板または多孔質ガラス基板上に
白金の多孔質薄膜を形成させた後、有機ジルコニウムイ
ンクを上記有機白金インクを塗布する方法と同様に塗布
し、室温で１０−１５分間乾燥し、１００〜２２０℃テ
１Ｏ−１５分間加熱乾燥スる。次ニア００〜１１００℃
で１０〜１５分間焼成して固体電解質薄膜を形成する。(2) After forming a porous thin film of platinum on a porous alumina substrate or a porous glass substrate, apply organic zirconium ink in the same manner as the organic platinum ink described above, and dry for 10-15 minutes at room temperature. Then heat and dry at 100-220°C for 15 minutes. Next near 00~1100℃
The solid electrolyte thin film is formed by firing for 10 to 15 minutes.
ここで用いる有機ジルコニウムインクは、樹脂酸のジル
コニウム塩５〜２０重１％、樹脂酸のイツトリウム塩０
．５〜１０重量％、他の樹脂酸の金属塩は樹脂酸ケイ素
、樹脂酸ホウ素、樹脂酸ビスマス及び樹脂酸アルミニウ
ムで０．３〜３重贋％、ロジン誘導体樹脂にはガムロジ
ン等で１〜２０重１％及び溶剤（残部）はグリセリンエ
ステル等で各成分の共通した有機溶媒を用い混合し溶解
して合成する。The organic zirconium ink used here contains 5 to 20% by weight of zirconium salt of resin acid and 0% of yttrium salt of resin acid.
．． 5 to 10% by weight, other metal salts of resin acids are silicon resin acid, boron resin acid, bismuth resin acid, and aluminum resin acid, 0.3 to 3%, and rosin derivative resins include gum rosin, etc., 1 to 20%. The weight 1% and the solvent (remainder) are glycerin esters and the like, which are synthesized by mixing and dissolving them using a common organic solvent for each component.
上記の割合で合成された有機ジルコニウムインクを用い
てスクリーン印刷により塗布し、乾燥、焼成したときの
酸化ジルコニウム（酸化イツトリウムを含む）薄膜の厚
さは０．０５〜０．１μｍであり、任意の膜厚を得るた
めには膜形成工程を繰り返せば簡単にでき、合成された
有機ジルコニウムインクは液体であり、上記有機白金イ
ンク同様、あらゆる形状の基体上に塗布することができ
、Ｍ厚も安定したものが得られる。The thickness of the zirconium oxide (including yttrium oxide) thin film when applied by screen printing using the organic zirconium ink synthesized at the above ratio, dried and fired is 0.05 to 0.1 μm, and any The film thickness can be easily obtained by repeating the film formation process, and the synthesized organic zirconium ink is a liquid, so like the organic platinum ink above, it can be applied to any shape of substrate, and the M thickness is also stable. You get what you get.
該酸化ジルコニウム固体電解質薄膜は、固体電解質とし
ての酸化ジルコニウムに安定剤として酸化イツトリウム
を３〜８％モル加えたものが一般的であるが酸化イツ）
ＩＪウムを均一に分散させることが従来の方法ではむ
ずかしく、よって膜厚を数μｍ以上にしていたが、経済
的に不満な面があり、本性による薄膜は酸化ジルコニウ
ム中に酸化イツ） ＩＪウムが均一分散されており、０
．５〜１μｍで十分固体電解質として安定したものが得
られる。The zirconium oxide solid electrolyte thin film is generally made by adding 3 to 8% mole of yttrium oxide as a stabilizer to zirconium oxide as a solid electrolyte.
Conventional methods have found it difficult to uniformly disperse IJium, so the thickness of the film has been made to be several micrometers or more, but this is economically unsatisfactory. Uniformly distributed, 0
．． If the thickness is 5 to 1 μm, a sufficiently stable solid electrolyte can be obtained.
（３）多孔質アルミナ基板、または多孔質ガラス基板上
に多孔質白金薄膜を形成し、その上に酸化ジルコニウム
の固体電解質薄膜を形成した後、再度多孔質白金薄膜を
（１）とまったく同様に行い、形成することにより固体
電解質薄膜酸素センサを製造することができる。(3) After forming a porous platinum thin film on a porous alumina substrate or a porous glass substrate and forming a solid electrolyte thin film of zirconium oxide on it, a porous platinum thin film is formed again in exactly the same manner as in (1). By performing and forming a solid electrolyte thin film oxygen sensor, a solid electrolyte thin film oxygen sensor can be manufactured.
以下本発明に係わる固体電解質薄膜酸素センサの多孔質
白金薄膜および酸化ジルコニウム固体電解質薄膜製造方
法実施例を記載するが、該実施例は本発明を限定するも
のではない。Examples of the method for manufacturing a porous platinum thin film and a zirconium oxide solid electrolyte thin film of a solid electrolyte thin film oxygen sensor according to the present invention will be described below, but these examples are not intended to limit the present invention.
（実施例）
図は固体電解質型薄膜酸素センサの部分拡大断面図であ
る。(Example) The figure is a partially enlarged sectional view of a solid electrolyte thin film oxygen sensor.
アルミナ平板状多孔質基板１の表面に有機白金インクを
スクリーン印刷により塗布し、室温で１０分間乾燥し、
次に２００℃で１０分間加熱乾燥した後、１０００℃で
１０分間焼成し、塗布、乾燥、焼成工程を５回繰り返し
行って０．５μｍの多孔質白金薄膜２を形成した。Organic platinum ink was applied to the surface of the alumina flat porous substrate 1 by screen printing, and dried at room temperature for 10 minutes.
Next, after heating and drying at 200° C. for 10 minutes, baking was performed at 1000° C. for 10 minutes, and the coating, drying, and baking steps were repeated five times to form a porous platinum thin film 2 of 0.5 μm.
次に有機ジルコニウムインクを用いてスクリーン印刷に
より塗布し、室温で１０分間乾燥し、次に２００℃で１
０分間加熱乾燥した後、１０００℃で１０分間焼成し、
塗布、乾燥、焼成工程を５回繰り返し行って０．５μｍ
の酸化ジルコニウムの固体電解質薄膜３を形成した。さ
らにこの上に多孔質白金薄膜を同じ有機白金インクを用
いて同様に塗布、乾燥、焼成工程を５回繰り返して０．
５μｍの多孔質白金薄膜２′を形成し、固体電解質薄膜
酸素センサを製造した。It was then applied by screen printing using organic zirconium ink, dried for 10 minutes at room temperature, and then heated to 200°C for 10 minutes.
After heating and drying for 0 minutes, baking at 1000°C for 10 minutes,
Coating, drying, and baking steps were repeated 5 times to achieve a thickness of 0.5 μm.
A solid electrolyte thin film 3 of zirconium oxide was formed. Furthermore, a porous platinum thin film was coated on top of this using the same organic platinum ink, and the same steps of drying and firing were repeated five times.
A porous platinum thin film 2' having a thickness of 5 μm was formed to manufacture a solid electrolyte thin film oxygen sensor.
ここで用いた有機白金インクと有機ジルコニウムインク
は表−１の成分と割合で合成した。The organic platinum ink and organic zirconium ink used here were synthesized using the components and ratios shown in Table 1.
作製した酸素センサの応答性を、比較例きし７て白金無
電解メツキ法で作製したものと比べたところ、下記の表
−２のような結果を得た。The responsiveness of the produced oxygen sensor was compared with that of Comparative Example 7, which was produced by the platinum electroless plating method, and the results shown in Table 2 below were obtained.
図は固体電解質型薄膜酸素センサの部分拡大断面図であ
る。
■・・・アルミナ平板状多孔質基板、２．２′・・・多
孔質白金薄膜、３・・・酸化ジルコニウムの固体電解質
薄膜。
（発明の効果）
本発明は、固体電解質薄膜酸素センサの製造方法で多孔
質白金薄膜と薄膜ジルコニア固体電解質を、従来問題と
されていた欠点を解決するために有機白金インクと有機
ジルコニアインクを合成し、その塗布、乾燥、焼成の薄
膜形成方法により高価な貴金属を約１／１０に省貴金属
化でき、小型で経済的でしかも応答性の良い酸素センサ
を製造することが可能になったことは利用価値を大いに
高めることができよう。The figure is a partially enlarged sectional view of a solid electrolyte thin film oxygen sensor. ■... Alumina flat porous substrate, 2.2'... Porous platinum thin film, 3... Zirconium oxide solid electrolyte thin film. (Effects of the Invention) The present invention synthesizes a porous platinum thin film and a thin film zirconia solid electrolyte in a method for manufacturing a solid electrolyte thin film oxygen sensor, and synthesizes an organic platinum ink and an organic zirconia ink in order to solve the conventional drawbacks. However, by using the thin film forming method of coating, drying, and firing, it is possible to reduce the amount of expensive precious metals by about 1/10, making it possible to manufacture small, economical, and highly responsive oxygen sensors. The utility value could be greatly increased.
Claims (1)
を有機白金インクを用いて形成し、薄膜ジルコニア固体
電解質を有機ジルコニウムインクを用いて形成すること
を特徴とする酸素センサの製造方法。1. A method for manufacturing an oxygen sensor, which comprises forming a porous thin film platinum electrode of a solid electrolyte type thin film oxygen sensor using an organic platinum ink, and forming a thin film zirconia solid electrolyte using an organic zirconium ink.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63189890A JP2648341B2 (en) | 1988-07-29 | 1988-07-29 | Manufacturing method of thin film oxygen sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63189890A JP2648341B2 (en) | 1988-07-29 | 1988-07-29 | Manufacturing method of thin film oxygen sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0238964A true JPH0238964A (en) | 1990-02-08 |
| JP2648341B2 JP2648341B2 (en) | 1997-08-27 |
Family
ID=16248893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63189890A Expired - Lifetime JP2648341B2 (en) | 1988-07-29 | 1988-07-29 | Manufacturing method of thin film oxygen sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2648341B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03165253A (en) * | 1989-11-24 | 1991-07-17 | Matsushita Electric Ind Co Ltd | Oxygen sensor |
| KR100900092B1 (en) * | 2007-06-29 | 2009-05-28 | 서울산업대학교 산학협력단 | Preparation method of oxygen sensor |
| JP2009125256A (en) * | 2007-11-22 | 2009-06-11 | Kandado:Kk | Quiet sleep pillow |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55160844A (en) * | 1979-04-05 | 1980-12-15 | Bosch Gmbh Robert | Electrochemically measuring sensor for oxygen content in gas* specially exhaust gas of internal combustion engine |
| JPS5614149A (en) * | 1979-07-16 | 1981-02-10 | Nissan Motor Co Ltd | Forming method for solid-state electrolyte thin film for oxygen sensor |
| JPS62227477A (en) * | 1986-03-31 | 1987-10-06 | Kawai Musical Instr Mfg Co Ltd | Production of zirconia membrane |
-
1988
- 1988-07-29 JP JP63189890A patent/JP2648341B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55160844A (en) * | 1979-04-05 | 1980-12-15 | Bosch Gmbh Robert | Electrochemically measuring sensor for oxygen content in gas* specially exhaust gas of internal combustion engine |
| JPS5614149A (en) * | 1979-07-16 | 1981-02-10 | Nissan Motor Co Ltd | Forming method for solid-state electrolyte thin film for oxygen sensor |
| JPS62227477A (en) * | 1986-03-31 | 1987-10-06 | Kawai Musical Instr Mfg Co Ltd | Production of zirconia membrane |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03165253A (en) * | 1989-11-24 | 1991-07-17 | Matsushita Electric Ind Co Ltd | Oxygen sensor |
| KR100900092B1 (en) * | 2007-06-29 | 2009-05-28 | 서울산업대학교 산학협력단 | Preparation method of oxygen sensor |
| JP2009125256A (en) * | 2007-11-22 | 2009-06-11 | Kandado:Kk | Quiet sleep pillow |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2648341B2 (en) | 1997-08-27 |
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