JPH046592U - - Google Patents

Info

Publication number
JPH046592U
JPH046592U JP4247490U JP4247490U JPH046592U JP H046592 U JPH046592 U JP H046592U JP 4247490 U JP4247490 U JP 4247490U JP 4247490 U JP4247490 U JP 4247490U JP H046592 U JPH046592 U JP H046592U
Authority
JP
Japan
Prior art keywords
rotor
casing
rotating shaft
molecular pump
turbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4247490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4247490U priority Critical patent/JPH046592U/ja
Publication of JPH046592U publication Critical patent/JPH046592U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP4247490U 1990-04-23 1990-04-23 Pending JPH046592U (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4247490U JPH046592U (en, 2012) 1990-04-23 1990-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4247490U JPH046592U (en, 2012) 1990-04-23 1990-04-23

Publications (1)

Publication Number Publication Date
JPH046592U true JPH046592U (en, 2012) 1992-01-21

Family

ID=31554053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4247490U Pending JPH046592U (en, 2012) 1990-04-23 1990-04-23

Country Status (1)

Country Link
JP (1) JPH046592U (en, 2012)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5270409A (en) * 1975-12-06 1977-06-11 Pfeiffer Vakuumtechnik Turbomolecular pumps
JPS61215495A (ja) * 1985-03-22 1986-09-25 Mitsubishi Heavy Ind Ltd タ−ボ分子ポンプ
JPS62135743A (ja) * 1985-12-10 1987-06-18 Mitsubishi Heavy Ind Ltd バランシング方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5270409A (en) * 1975-12-06 1977-06-11 Pfeiffer Vakuumtechnik Turbomolecular pumps
JPS61215495A (ja) * 1985-03-22 1986-09-25 Mitsubishi Heavy Ind Ltd タ−ボ分子ポンプ
JPS62135743A (ja) * 1985-12-10 1987-06-18 Mitsubishi Heavy Ind Ltd バランシング方法

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