JPH0463039U - - Google Patents
Info
- Publication number
- JPH0463039U JPH0463039U JP10668690U JP10668690U JPH0463039U JP H0463039 U JPH0463039 U JP H0463039U JP 10668690 U JP10668690 U JP 10668690U JP 10668690 U JP10668690 U JP 10668690U JP H0463039 U JPH0463039 U JP H0463039U
- Authority
- JP
- Japan
- Prior art keywords
- strain
- force sensor
- generating body
- silicon single
- crystal plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000004088 simulation Methods 0.000 description 2
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
Description
第１図は本考案の力覚センサー４０の断面図、
第２図はその平面図で、イは凹部がチツプの四辺
に平行な４本の溝で形成した場合、ロは同じく四
角形の溝で形成した場合、ハは同じく円形の溝で
形成した場合の平面図、第３図は従来のプリフオ
ームでチツプをダイボンドし、端子としてコンタ
クトピンを使用した力覚センサーの断面図、第４
図は同じく端子としてＦＰＣを使用した力覚セン
サーで、イは平面図、ロは断面図、第５図は従来
の拡散型力覚センサーの断面図、第６図はＸ，Ｙ
軸方向の変形シミユレーシヨン図、第７図はＺ軸
方向の押張力の変形シミユレーシヨン図、第８図
はＸ軸用ブリツジ回路図、第９図はＹ軸用ブリツ
ジ回路図、第１０図はＺ軸用ブリツジ回路図であ
る。
４０……力覚センサー、４１……起歪体、４３
……チツプ、４６……凹部。
FIG. 1 is a cross-sectional view of the force sensor 40 of the present invention.
Figure 2 is a plan view of the same. A shows the case where the concave part is formed by four grooves parallel to the four sides of the chip, B shows the case where the concave part is formed by the same square groove, and C shows the case where the concave part is formed by the same circular groove. The top view and Figure 3 are cross-sectional views of a force sensor in which the chip is die-bonded with a conventional preform and contact pins are used as terminals.
The figure also shows a force sensor using FPC as a terminal, A is a plan view, B is a cross-sectional view, Fig. 5 is a cross-sectional view of a conventional diffused force sensor, and Fig. 6 is an X, Y
Figure 7 is a simulation diagram of deformation in the axial direction. Figure 7 is a simulation diagram of pushing and tensioning force in the Z-axis direction. Figure 8 is a bridge circuit diagram for the X-axis. Figure 9 is a bridge circuit diagram for the Y-axis. Figure 10 is a diagram for the Z-axis. FIG. 40... Force sensor, 41... Strain body, 43
... Chip, 46 ... recess.
Claims (1)
歪体に接合してなる三次元力覚センサーにおいて
、前記起歪体のダイアフラムに接合した前記シリ
コン単結晶板よりなるチツプの周辺部分の前記起
歪体に凹部を設けたことを特徴とする三次元力覚
センサーの起歪体構造。 In a three-dimensional force sensor formed by bonding a silicon single-crystal plate on which a diffusion strain gauge is formed to a strain-generating body, the strain-induced strain of a peripheral portion of a chip made of the silicon single-crystal plate bonded to a diaphragm of the strain-generating body is provided. A strain-generating body structure of a three-dimensional force sensor characterized by having a recessed part in the body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10668690U JPH0463039U (en) | 1990-10-09 | 1990-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10668690U JPH0463039U (en) | 1990-10-09 | 1990-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0463039U true JPH0463039U (en) | 1992-05-29 |
Family
ID=31852874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10668690U Pending JPH0463039U (en) | 1990-10-09 | 1990-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0463039U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63242694A (en) * | 1987-03-31 | 1988-10-07 | 三菱電機株式会社 | Semiconductor-device card |
| JPH02146133A (en) * | 1988-11-28 | 1990-06-05 | Fujitsu Ltd | Magneto-optical disk medium |
-
1990
- 1990-10-09 JP JP10668690U patent/JPH0463039U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63242694A (en) * | 1987-03-31 | 1988-10-07 | 三菱電機株式会社 | Semiconductor-device card |
| JPH02146133A (en) * | 1988-11-28 | 1990-06-05 | Fujitsu Ltd | Magneto-optical disk medium |
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