JPH0462478A - Manufacture of airtight terminal - Google Patents

Manufacture of airtight terminal

Info

Publication number
JPH0462478A
JPH0462478A JP17392690A JP17392690A JPH0462478A JP H0462478 A JPH0462478 A JP H0462478A JP 17392690 A JP17392690 A JP 17392690A JP 17392690 A JP17392690 A JP 17392690A JP H0462478 A JPH0462478 A JP H0462478A
Authority
JP
Japan
Prior art keywords
jig
carbon
sealing
glass
outer ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17392690A
Other languages
Japanese (ja)
Inventor
Shigeyuki Hamada
濱田 重行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Original Assignee
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Semiconductor Manufacturing Co Ltd, Kansai Nippon Electric Co Ltd filed Critical Renesas Semiconductor Manufacturing Co Ltd
Priority to JP17392690A priority Critical patent/JPH0462478A/en
Publication of JPH0462478A publication Critical patent/JPH0462478A/en
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Manufacturing Of Electrical Connectors (AREA)

Abstract

PURPOSE:To prevent the environment from becoming worse owing to cementation and carbon powder scattering by using a carbon-based jig which has at least it surface layer part made of glassy carbon as a sealing jig. CONSTITUTION:Metallic outside rings 2 for many airtight terminals are supplied to the top surface of a low jig 1b before an upper jig 1a is superposed, and while the jig 1b is vibrated, the outside rings 2 are fitted in respective recessed parts 12b of the jig 1b and set in a specific array state. Even when the outside rings 2 are thus set by vibrating the jig 1b, the surface layer part 10b of the jig 1b is formed of the glassy carbon with good wear resistance, so little carbon powder is produced by wear. After the setting of the outside rings 2 and the insertion of glass and lead wires 4 are completed, the sealing jig 1 is heated at high temperature to fuse the glass 3, thereby obtaining airtight terminals by sealing the lead wires 4 airtightly. Even when the high-temperature heating is thus carried out, nearly no floating carbon is produced, so the hardness of the outside rings 2 hardly increase owing to cementation.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、衝撃センサ用等の気密端子の製造方法に関す
る。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing an airtight terminal for use in impact sensors and the like.

〔従来の技術〕[Conventional technology]

従来より、気密端子を製造する場合には、グラファイト
製の封着治具に気匣端子用の金属外環をセットして該金
り外環のリード挿通孔にタフレット状のカラスとり−)
・線を挿入し、これを高温の加熱炉に入れてガラスをt
j融させること:こよりリード線を気密的にカラス封着
する方法が一般に採用されている。
Conventionally, when manufacturing airtight terminals, a metal outer ring for air-filled terminals is set in a graphite sealing jig, and a tufflet-shaped crow hole is inserted into the lead insertion hole of the metal outer ring.
・Insert the wire and place it in a high temperature heating furnace to heat the glass.
j) Melting: Generally, a method is adopted in which the twisted lead wire is hermetically sealed in a glass.

しかし・ながら、封着治具としてグラファイト製のもの
を使用して気密端子を製造すると、次のような問題があ
った。
However, when a hermetic terminal is manufactured using a graphite sealing jig, the following problems arise.

〔発明が解決し・ようとする課題〕[Problem that the invention attempts to solve]

即ち、グラファイト製の到着治具を用いると、高温加熱
時に到着治具から発生し・た遊顛疾素が金属外環に浸透
する所謂「浸炭現象」を生しるため、金属外環のl\−
ス材質がステンレスである場合には、この浸炭現象によ
って金属外環の表層部の硬度が大きくなる。二のようこ
こ金属外環の硬度が大きくなると、金属外環の表面に他
の部品等をレーザー溶接する際、急激な温度上昇によっ
て金属外環にクラックか発生し、気密不良:こなるとい
う問題かあった。
That is, when a graphite arrival jig is used, the so-called "carburization phenomenon" occurs in which free particles generated from the arrival jig during high-temperature heating penetrate into the metal outer ring. \−
When the base material is stainless steel, this carburization phenomenon increases the hardness of the surface layer of the metal outer ring. Second, if the hardness of the metal outer ring increases, when laser welding other parts to the surface of the metal outer ring, the sudden temperature rise will cause cracks to occur in the metal outer ring, resulting in poor airtightness. There was.

また、クラファイト製の到着治具は多孔質で比較的脆く
耐磨耗性;こ劣るため、まJ@治具を振動させながら多
数の金属外環を封着治具の各凹部に嵌込んでセットする
とき、その摩擦で封着治具の表面が削り取られ、発生し
・たカーボン粉が円囲に飛散して作業環境を悪化させる
という問題があり、封着治具の耐用期間も短いという問
題があった。
In addition, the arriving jig made of graphite is porous, relatively brittle, and has poor abrasion resistance; therefore, a large number of metal outer rings are fitted into each recess of the sealing jig while vibrating the jig. When setting the sealing jig, there is a problem that the surface of the sealing jig is scraped off by the friction, and the generated carbon powder is scattered around the circle, worsening the working environment, and the service life of the sealing jig is also short. There was a problem.

〔課題を解決するための手段〕[Means to solve the problem]

上記課題を解決するため、本発明は、封着治具に気vE
端子用の金属外環をセットして該金属外環のり一ト挿通
孔にガラスとリード線を挿入し、加熱によりガラスを溶
融させてリード線を封着したのち、金属部材に他の金属
部材をレーザ溶接する気密端子の製造方法において、上
記封着治具として、少なくともその表層部がガラス状カ
ーボンよりなるカー、ナ;ン系治具を用いることを特徴
とする。
In order to solve the above problems, the present invention provides a sealing jig with
Set the metal outer ring for the terminal, insert the glass and lead wire into the glue insertion hole of the metal outer ring, melt the glass by heating and seal the lead wire, and then attach the metal member to the other metal member. A method of manufacturing an airtight terminal by laser welding is characterized in that the sealing jig is a carbon-based jig, at least the surface layer of which is made of glassy carbon.

〔作 用〕[For production]

ガラス状カーボン:よグラファイトと異なり、緻密質て
耐磨耗性に優)またものであるため、高温加熱時に遊離
炭素を発生したり磨耗;こよ:)カーボン粉を発生した
りすることは殆とない。従って、封着治具として少なく
とも表層部が上記のようなガラス状カーボンよりなるカ
ーボン系治具を使用すると、高温加熱時の浸炭現象やカ
ーホン粉飛散による環境悪化を防止することができる。
Glassy carbon: Unlike graphite, it is dense and has excellent abrasion resistance, so it rarely generates free carbon or abrasion carbon powder when heated at high temperatures. do not have. Therefore, when a carbon-based jig whose surface layer at least is made of glassy carbon as described above is used as a sealing jig, it is possible to prevent environmental deterioration due to carburization phenomenon and scattering of carphone powder during high-temperature heating.

〔実施例〕〔Example〕

以下、図面を参照しながら本発明の実施例を詳述する。 Embodiments of the present invention will be described in detail below with reference to the drawings.

第1図は本発明の気密端子の製造方法の一実施例を説明
する断面図、第2図は本発明の製造方法:こよって得ら
れる気密端子の一例を示す斜視図である。
FIG. 1 is a sectional view illustrating an embodiment of the method for manufacturing an airtight terminal of the present invention, and FIG. 2 is a perspective view showing an example of the airtight terminal obtained by the manufacturing method of the invention.

第1図において1は本発明に使用される封着冶具を示し
ており、この封着治具1は上部治具1aと下部治具1b
と底部治具ICとて構成されている。これらの治具1a
、lb、lcはいずれもカラス状カーボンよりなる表、
1部10a、10b。
In FIG. 1, 1 indicates a sealing jig used in the present invention, and this sealing jig 1 includes an upper jig 1a and a lower jig 1b.
and a bottom jig IC. These jigs 1a
, lb, and lc are all made of glass-like carbon,
Part 1 10a, 10b.

10bを備えたグラファイト製のカーホン系治具てあっ
て、上部治具1aには多数のリート線遊挿孔孔11aか
、また底部治具1bに:まス窓端子用の金属外環2を嵌
め込む多数の凹部12bとり一ト線遊挿孔11bが形成
されている。
The upper jig 1a has a large number of loose wire insertion holes 11a, and the bottom jig 1b has a metal outer ring 2 for a window terminal. A large number of recesses 12b into which the wire is fitted are formed with loose insertion holes 11b.

ガラス状カーボンよりなる表層部10a、10b、10
cは、例えば炭化水素ガスや炭化水素化合物等の有機化
合物の不完全熱分解化合物を溶剤に溶解した溶液をカー
ボン系治具1a、lb、ICの表面に塗布して不活性雰
囲気下で加熱するか、或いはカーボン系治具1 a、 
 1 b、1 cの表層部に特殊な樹脂処理を施す等の
手段により形成されたものであって、極めて緻密な層で
あり且つ耐磨耗性に優れた層である。そのため、これら
のカーボン系治具1a、lb、lcは高温加熱時に遊離
炭素を発生することが殆となく、また、摩擦等によって
カーボン粉を生しることも殆どないものである。
Surface layer portions 10a, 10b, 10 made of glassy carbon
In c, for example, a solution prepared by dissolving an incompletely thermally decomposed compound of an organic compound such as a hydrocarbon gas or a hydrocarbon compound in a solvent is applied to the surface of the carbon-based jig 1a, lb, or IC and heated in an inert atmosphere. Or carbon-based jig 1a,
It is formed by applying a special resin treatment to the surface layer portions of 1b and 1c, and is an extremely dense layer with excellent abrasion resistance. Therefore, these carbon-based jigs 1a, lb, and lc hardly generate free carbon during high-temperature heating, and hardly generate carbon powder due to friction or the like.

本発明の製造方法は、上記のような上部治具1a、下部
治具1b、底部治具ICよりなる到着冶具1を用いて、
次の要領で実施される。まず、第1図において上部治具
1aを重ねる前:こ、多数の策畜端子用の金属外環2を
下部治具1bの上面に供給し、下部治具1bを振動させ
ながら前後左右;こ揺動させ、金属外環2を下部治具1
bの各凹部12b:こ嵌込んて所定の整列状態にセット
する。
The manufacturing method of the present invention uses the arriving jig 1 consisting of the upper jig 1a, the lower jig 1b, and the bottom jig IC as described above.
It will be implemented as follows. First, before stacking the upper jig 1a in Fig. 1, a large number of metal outer rings 2 for the terminals are supplied onto the upper surface of the lower jig 1b, and the lower jig 1b is vibrated back and forth and left and right. Rock the metal outer ring 2 to the lower jig 1.
Each recess 12b of b: Fit into the recess 12b and set in a predetermined alignment state.

二のように下部治具1bを振動させて金属外環2をセッ
トしても、下部治具1bの表層部10bが前述のことき
耐磨耗性の良好なガラス状カーホンで形成されているた
め、摩擦によって下部治具1bの上面が削り取られてカ
ーボン粉を発生することは殆どない。従って、カーボン
粉が周囲に飛散して作業環境を悪化させる心配:よない
Even if the metal outer ring 2 is set by vibrating the lower jig 1b as shown in 2, the surface layer 10b of the lower jig 1b is made of the glass-like carphone with good abrasion resistance. Therefore, the upper surface of the lower jig 1b is rarely scraped off due to friction and carbon powder is hardly generated. Therefore, there is no need to worry about carbon powder scattering around and worsening the working environment.

金属外環2のセットか完了すると、タブレット状のガラ
ス3とリート線4をそれぞれ整列治具(図示せず〉から
各金属外環2のリート線挿通孔2a;こ落とし込んで挿
入し1、図示のように上部治具1aを下部治具1bの上
;二重ね合わせる。二の金属外環21よ第2図−二示す
ような長方形をしたステンレス類のもので、該金属外環
2には複数のり一ト挿通孔2aが穿孔されており、また
円囲:こはキャップ等を寛畜:こ接合するための段部2
bが形成されている。なお、金属外環とし、では二の実
施例以外の種々のキオ質及U形状のものを使用できるこ
とは言うまでもない。
When the setting of the metal outer ring 2 is completed, insert the tablet-shaped glass 3 and the Riet wire 4 by dropping them into the Riet wire insertion hole 2a of each metal outer ring 2 from an alignment jig (not shown). The upper jig 1a is double-screwed on the lower jig 1b as shown in FIG. A plurality of glue insertion holes 2a are drilled, and a stepped portion 2 is provided for connecting caps, etc.
b is formed. It is needless to say that the metal outer ring can be of various types other than those in the second embodiment and of a U-shape.

金属外環2のセットとガラス3及びリード線4の挿入が
完了すると、封着治具1を高温加熱炉に入れて約100
0℃前後の高温で加熱してガラス3を溶融させ、リート
線4を気密的にガラス封着して気密端子を得る。このよ
うに高温で加熱しても、上部治具1a、下部治具1b、
底部治具1cの表層部10a、10b、10cがいずれ
も緻密なガラス状カーボンで形成され、遊離炭素の発生
が殆とないため浸炭現象によってステンレス製の金属外
環2の硬度が大きくなることは殆どない。
When the setting of the metal outer ring 2 and the insertion of the glass 3 and lead wires 4 are completed, the sealing jig 1 is placed in a high-temperature heating furnace for approximately 100 minutes.
The glass 3 is melted by heating at a high temperature of around 0° C., and the Riet wire 4 is hermetically sealed with the glass to obtain an airtight terminal. Even when heated at high temperatures in this way, the upper jig 1a, the lower jig 1b,
The surface layers 10a, 10b, and 10c of the bottom jig 1c are all made of dense glassy carbon, and there is almost no generation of free carbon, so the hardness of the stainless steel metal outer ring 2 does not increase due to carburization. There aren't many.

従って、この製造方法で得られた気密端子の金属外環2
の表面:こ他の部品をレーザー溶接し・でも、金属外環
2にクラックが発生して気密不良を生し・る恐れは皆@
:こ等し・い。
Therefore, the metal outer ring 2 of the airtight terminal obtained by this manufacturing method
Surface: Even if other parts are laser welded, there is a risk that cracks will occur in the metal outer ring 2, resulting in poor airtightness.
: This is the same.

上記の実施例では、封着治具として、グラファイト製の
カーボン系上部治具1a、下部治具1b、底部治具1c
の表層部10a、10b、10cをカラス状カーボンで
形成し、たものを使用しているか、上部治具1a、下部
治具1b、底部治具1cの全体がガラス状カーボンより
なる封着治具を使用してもよいことは言うまでもない。
In the above embodiment, the sealing jigs include a graphite carbon-based upper jig 1a, a lower jig 1b, and a bottom jig 1c.
A sealing jig in which the surface layer parts 10a, 10b, and 10c are made of glass-like carbon, or the upper jig 1a, the lower jig 1b, and the bottom jig 1c are entirely made of glass-like carbon. Needless to say, you can also use .

〔発明の効果〕〔Effect of the invention〕

以上の説明から明らかなように、本発明の製造方法では
、高温加熱時の浸炭現象による金属外環の硬度の増大が
ないため、金属外環の表面に他の部品をレーザー溶接し
てもクラックを生し・ることがなく、また摩擦によるカ
ーホン粉の発生かないので良好な作業環境を維持する二
とができ、圭」着治具の耐用期間も長くなるため経済的
に有利であるといった効果を奏する。
As is clear from the above explanation, in the manufacturing method of the present invention, the hardness of the metal outer ring does not increase due to carburization phenomenon during high-temperature heating, so even if other parts are laser welded to the surface of the metal outer ring, there will be no cracks. It also maintains a good working environment because it does not generate carbon powder due to friction, and it is economically advantageous because the service life of the attachment jig is extended. play.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の気密端子の製造方法の一実施例を説明
する断面図、第2図:ま本発明の製造方法によって得ら
れる気密端子の一例を示す斜視図である。 1・・・封着治具、 1a・・・上部治具、 1b・・・下部治具、 1c・・・底部治具、 10a、10b、10cm−・表層部、2・・・金属外
環、 2a・・・リート挿通孔、 3・・・ガラス、 4・・・リード線。
FIG. 1 is a sectional view illustrating an embodiment of the method for producing an airtight terminal of the present invention, and FIG. 2 is a perspective view showing an example of an airtight terminal obtained by the method of producing an airtight terminal of the present invention. 1...Sealing jig, 1a...Upper jig, 1b...Lower jig, 1c...Bottom jig, 10a, 10b, 10cm--Surface layer part, 2...Metal outer ring , 2a...Lead insertion hole, 3...Glass, 4...Lead wire.

Claims (1)

【特許請求の範囲】[Claims] (1)封着治具に気密端子用の金属外環をセットして該
金属外環のリード挿通孔にガラスとリード線を挿入し、
加熱によりガラスを溶融させてリード線を封着したのち
、金属部材に他の金属部材をレーザ溶接する気密端子の
製造方法において、上記封着治具として、少なくともそ
の表層部がガラス状カーボンよりなるカーボン系治具を
用いることを特徴とする気密端子の製造方法。
(1) Set the metal outer ring for the airtight terminal in the sealing jig, insert the glass and lead wire into the lead insertion hole of the metal outer ring,
In a method for manufacturing an airtight terminal in which a lead wire is sealed by melting glass by heating and then another metal member is laser welded to the metal member, the sealing jig has at least its surface layer made of glassy carbon. A method for manufacturing an airtight terminal, characterized by using a carbon-based jig.
JP17392690A 1990-06-29 1990-06-29 Manufacture of airtight terminal Pending JPH0462478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17392690A JPH0462478A (en) 1990-06-29 1990-06-29 Manufacture of airtight terminal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17392690A JPH0462478A (en) 1990-06-29 1990-06-29 Manufacture of airtight terminal

Publications (1)

Publication Number Publication Date
JPH0462478A true JPH0462478A (en) 1992-02-27

Family

ID=15969637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17392690A Pending JPH0462478A (en) 1990-06-29 1990-06-29 Manufacture of airtight terminal

Country Status (1)

Country Link
JP (1) JPH0462478A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5056879A (en) * 1973-09-14 1975-05-17
JPS5935547U (en) * 1982-08-30 1984-03-06 「くれ」野 正一 Anchor bolt planting device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5056879A (en) * 1973-09-14 1975-05-17
JPS5935547U (en) * 1982-08-30 1984-03-06 「くれ」野 正一 Anchor bolt planting device

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