Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac IncfiledCriticalUlvac Inc
Priority to JP2849884ApriorityCriticalpatent/JPS60173430A/ja
Publication of JPS60173430ApublicationCriticalpatent/JPS60173430A/ja
Publication of JPH0462010B2publicationCriticalpatent/JPH0462010B2/ja
G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature