JPH0461330B2 - - Google Patents

Info

Publication number
JPH0461330B2
JPH0461330B2 JP61138555A JP13855586A JPH0461330B2 JP H0461330 B2 JPH0461330 B2 JP H0461330B2 JP 61138555 A JP61138555 A JP 61138555A JP 13855586 A JP13855586 A JP 13855586A JP H0461330 B2 JPH0461330 B2 JP H0461330B2
Authority
JP
Japan
Prior art keywords
integrator
light
excimer
light source
exposure apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61138555A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62294202A (ja
Inventor
Kazufumi Ogawa
Masaru Sasako
Masataka Endo
Takeshi Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP61138555A priority Critical patent/JPS62294202A/ja
Priority to US07/061,266 priority patent/US4841341A/en
Publication of JPS62294202A publication Critical patent/JPS62294202A/ja
Publication of JPH0461330B2 publication Critical patent/JPH0461330B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP61138555A 1986-06-13 1986-06-13 インテグレ−タ−およびそれを用いた露光装置 Granted JPS62294202A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP61138555A JPS62294202A (ja) 1986-06-13 1986-06-13 インテグレ−タ−およびそれを用いた露光装置
US07/061,266 US4841341A (en) 1986-06-13 1987-06-12 Integrator for an exposure apparatus or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61138555A JPS62294202A (ja) 1986-06-13 1986-06-13 インテグレ−タ−およびそれを用いた露光装置

Publications (2)

Publication Number Publication Date
JPS62294202A JPS62294202A (ja) 1987-12-21
JPH0461330B2 true JPH0461330B2 (enrdf_load_stackoverflow) 1992-09-30

Family

ID=15224880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61138555A Granted JPS62294202A (ja) 1986-06-13 1986-06-13 インテグレ−タ−およびそれを用いた露光装置

Country Status (1)

Country Link
JP (1) JPS62294202A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3627355B2 (ja) * 1996-02-22 2005-03-09 ソニー株式会社 スキャン式露光装置
DE102011008192A1 (de) * 2011-01-10 2012-07-12 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Umwandlung von Laserstrahlung in Laserstahlung mit einem M-Profil
CN104136163B (zh) * 2012-02-10 2016-02-03 Limo专利管理有限及两合公司 用于对工件的表面进行激光加工或者用于对工件外侧面或内侧面上的涂层进行后处理的设备

Also Published As

Publication number Publication date
JPS62294202A (ja) 1987-12-21

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