JPH0460568U - - Google Patents

Info

Publication number
JPH0460568U
JPH0460568U JP10240190U JP10240190U JPH0460568U JP H0460568 U JPH0460568 U JP H0460568U JP 10240190 U JP10240190 U JP 10240190U JP 10240190 U JP10240190 U JP 10240190U JP H0460568 U JPH0460568 U JP H0460568U
Authority
JP
Japan
Prior art keywords
vacuum chamber
main body
body case
vacuum pump
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10240190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10240190U priority Critical patent/JPH0460568U/ja
Publication of JPH0460568U publication Critical patent/JPH0460568U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP10240190U 1990-09-28 1990-09-28 Pending JPH0460568U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10240190U JPH0460568U (OSRAM) 1990-09-28 1990-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10240190U JPH0460568U (OSRAM) 1990-09-28 1990-09-28

Publications (1)

Publication Number Publication Date
JPH0460568U true JPH0460568U (OSRAM) 1992-05-25

Family

ID=31846627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10240190U Pending JPH0460568U (OSRAM) 1990-09-28 1990-09-28

Country Status (1)

Country Link
JP (1) JPH0460568U (OSRAM)

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