JPH0460554U - - Google Patents

Info

Publication number
JPH0460554U
JPH0460554U JP10241190U JP10241190U JPH0460554U JP H0460554 U JPH0460554 U JP H0460554U JP 10241190 U JP10241190 U JP 10241190U JP 10241190 U JP10241190 U JP 10241190U JP H0460554 U JPH0460554 U JP H0460554U
Authority
JP
Japan
Prior art keywords
insulator
plasma cvd
cvd apparatus
discharge
ring shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10241190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10241190U priority Critical patent/JPH0460554U/ja
Publication of JPH0460554U publication Critical patent/JPH0460554U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP10241190U 1990-09-28 1990-09-28 Pending JPH0460554U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10241190U JPH0460554U (OSRAM) 1990-09-28 1990-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10241190U JPH0460554U (OSRAM) 1990-09-28 1990-09-28

Publications (1)

Publication Number Publication Date
JPH0460554U true JPH0460554U (OSRAM) 1992-05-25

Family

ID=31846645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10241190U Pending JPH0460554U (OSRAM) 1990-09-28 1990-09-28

Country Status (1)

Country Link
JP (1) JPH0460554U (OSRAM)

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