JPH0460538B2 - - Google Patents

Info

Publication number
JPH0460538B2
JPH0460538B2 JP60079145A JP7914585A JPH0460538B2 JP H0460538 B2 JPH0460538 B2 JP H0460538B2 JP 60079145 A JP60079145 A JP 60079145A JP 7914585 A JP7914585 A JP 7914585A JP H0460538 B2 JPH0460538 B2 JP H0460538B2
Authority
JP
Japan
Prior art keywords
mirror
wavefront
interferometer
input
input beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60079145A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6134430A (ja
Inventor
Moshuchansukii Riuingusuton Piitaa
Kurisutofuaa Sheruton Jiin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Space and Mission Systems Corp
Original Assignee
TRW Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TRW Inc filed Critical TRW Inc
Publication of JPS6134430A publication Critical patent/JPS6134430A/ja
Publication of JPH0460538B2 publication Critical patent/JPH0460538B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP7914585A 1984-04-13 1985-04-12 アクテイブミラ−波面センサ Granted JPS6134430A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US59987184A 1984-04-13 1984-04-13
US599871 1984-04-13

Publications (2)

Publication Number Publication Date
JPS6134430A JPS6134430A (ja) 1986-02-18
JPH0460538B2 true JPH0460538B2 (enExample) 1992-09-28

Family

ID=24401437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7914585A Granted JPS6134430A (ja) 1984-04-13 1985-04-12 アクテイブミラ−波面センサ

Country Status (3)

Country Link
EP (1) EP0158505B1 (enExample)
JP (1) JPS6134430A (enExample)
DE (1) DE3571501D1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MXPA03005113A (es) * 2000-12-08 2004-01-29 Visx Inc Programa de tratamiento de ablacion cornea basado en frente de ondas directo.
JP4613340B2 (ja) * 2001-04-04 2011-01-19 株式会社ニコン 被検光学系の焦点位置の測定方法
JP4713185B2 (ja) * 2005-03-11 2011-06-29 株式会社日立ハイテクノロジーズ 異物欠陥検査方法及びその装置
EP2184596B1 (en) * 2007-08-27 2018-11-14 Nikon Corporation Wavefront aberration measuring device and method and wavefront aberration adjusting method
JP2012102157A (ja) 2010-11-05 2012-05-31 Nok Kluber Kk 潤滑剤組成物
DE102012214610A1 (de) * 2012-08-16 2013-09-12 Carl Zeiss Smt Gmbh Messvorrichtung zur interferometrischen Vermessung einer Teleskopoptik
CN105785609B (zh) * 2016-04-28 2023-04-07 长春理工大学 基于透射式液晶空间光调制器波前校正的方法及装置
US11718808B2 (en) 2019-06-26 2023-08-08 Nok Klueber Co., Ltd. Lubricant composition
US11796797B2 (en) * 2020-03-09 2023-10-24 Lockheed Martin Corporation Wavefront error correction of a conformal optical component using a planar lens
CN113900250B (zh) * 2021-10-19 2023-07-18 中国科学院光电技术研究所 一种自适应光学系统变形镜与哈特曼波前传感器对准方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1471386A (en) * 1974-06-28 1977-04-27 Perkin Elmer Corp Interferometer for testing telescope optics
US4030831A (en) * 1976-03-22 1977-06-21 The United States Of America As Represented By The Secretary Of The Navy Phase detector for optical figure sensing
US4295741A (en) * 1979-08-30 1981-10-20 United Technologies Corporation Two-wavelength phase control system
US4355900A (en) * 1980-08-08 1982-10-26 The United States Of America As Represented By The Secretary Of The Air Force Self-calibrating interferometer
US4346999A (en) * 1980-09-29 1982-08-31 Rockwell International Corporation Digital heterodyne wavefront analyzer

Also Published As

Publication number Publication date
JPS6134430A (ja) 1986-02-18
EP0158505A2 (en) 1985-10-16
EP0158505B1 (en) 1989-07-12
EP0158505A3 (en) 1985-11-21
DE3571501D1 (en) 1989-08-17

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