JPH0459531A - Separating device for sheetform member - Google Patents

Abstract

PURPOSE:To feed sheetform members in a state to reliably separate them one by one by pressing a separating claw, formed in an L-shape and having a stage part formed on the inner side, against the end surface of the corner part of each of a number of sheetform members laminated in the direction of thickness, and moving the separating claw on a locus similar to the bending locus of the sheetform member. CONSTITUTION:A stage part 60 having thickness approximately equal to a thickness 31a of a lead frame 31 being a sheetform member is formed in the one plane part 58 of the inner side of an L-shaped separating claw 56. The staged part 60 is brought into contact with a corner part 59 of each of the lead frames 31 laminated in the direction of thickness. The separating claw 56 is moved by a drive device, not shown, in a manner to be similar to the locus of the corner part 59 when the lead frame 31 is curved, and the lead frames 31 are separated one by one. When separation is completed, the separating claw 56 is returned to an initial position to repeat similar operation. The lead frame is failed in separation, the lead frame 31 is locked and held by the other plane part 61 of the L-shaped separating claw. This constitution reliably separates the lead frames 31 one by one to feed them.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a device for separating thin plate-like members, and is particularly used in the manufacture of semiconductor devices to cut out a large number of stacked lead frames one by one. The present invention relates to a lead frame separation device.

[Conventional technology]

In the manufacture of semiconductor devices, there is a pellet mounting process using a die bonder in which a semiconductor pellet is mounted on a land portion of a metal lead frame. Currently, in the loader section of the die bonder used in this pellet mounting process, a large number of stacked lead frames are cut out one by one and supplied to the die bonder.

As a separating device for a lead frame that constitutes a part of the loader section of the die bonder, for example, Japanese Patent Application Laid-Open No. 63-9754
There is the one disclosed in Japanese Patent Application No. 0, or a similar separation device having a separator unit shown in FIGS. 9 and 10.

Hereinafter, the separator units shown in FIGS. 9 and 10 will be explained in detail.
. . . are a large number of lead frames placed on a flat stocker (not shown), which are held upright while stacked one on top of the other in the thickness direction.

(2) is a separator unit placed above the lead frames (1), (1), and so on, and is used to hold a large number of stacked lead frames (1), (1), and so on.
Cut out each piece.

In this separator unit (2), (3) is a fixed base, and (4) is attached to the fixed base (3) via a ball slide (5) so as to be slidable in the vertical direction (in the direction of arrow A in the figure). It is a flat plate cam whose lower end surface is a tapered cam surface (6), (7) is the fixed base (3).
A driving cylinder fixed to the plate cam (4) is arranged such that the tip of the cylinder rod (7a) which projects downward can come into contact with the bracket (8) which integrally extends laterally from the lower end of the plate cam (4). do. (9) is a movable base that is attached to the lower end of the fixed base (3) via a ball slide (10) so as to be able to slide in a diagonal direction (in the direction of arrow B in the figure), and is fixed to the movable base (9). A tension spring (11) stretched between the bases (3) elastically urges the movable base (9) rearward. (12) is a cam follower that is rotatably supported on the upper end of the movable base (9), and is driven by the elastic force of the tension spring (11) to the cam surface (6) of the plate cam (4).
) in constant contact with the (13) is a movable base (9)
A movable block is rotatably mounted on the tip of the block with a bearing (14) as a fulcrum, and a tension spring (
15) elastically urges the movable block (13) downward. A separator (16) is integrally fixed to the free end of the movable block (13), and a number of fine separation grooves (17) are carved in the lower end surface of the separator.

Lead frame (
The cutting operation of 1) is as follows.

First, lead frames (1) (1) on the stocker...
The first lead frame (1) in the first position
The separator unit (2) is set so that the separation groove (17) of the separator (16) fits into the upper end of the separator unit (2). By operating the cylinder (7) from this state, the cylinder rod (7a) is projected downward, and the plate cam (4) is moved downward via the ball slide (5) via the bracket (8) that comes into contact with the cylinder rod (7a). Slide it to By sliding this plate cam (4) downward, its cam surface (6
) The cam follower (12) that comes into contact with the cam surface (6)
The movable base (9) is moved along the tension spring (11
) and slides forward along the direction of arrow B in the figure via the ball slide (10). At this time, the separator (16) in the movable block (13) is slightly lifted up and diagonally by the leading lead frame (1) fitted into the separation groove (17) against the elastic force of the tension spring (15). Slide the separator (1) downward and hook the upper end of the lead frame (1).
By the operation 6), the lead frame (1) is cut out one by one.

[Problem that the invention seeks to solve]

By the way, the above-mentioned lead frame (1) is manufactured by press working or etching processing, but the lead frame (1) produced by etching processing is particularly thin, and the processing condition of the end face is rough and uneven due to the etching processing. It's easy. Therefore, when the lead frames (1), (1), etc. are stacked and held upright on a stocker, the height of the lead frame (1) up to the position where it contacts the separator (16) is The variations made it extremely difficult to align them accurately, and separation errors were occurring frequently.

Furthermore, when the separator (16) is separated, the upper end of the lead frame (1) curves and deforms while drawing an arc with a predetermined radius of curvature, while the separator (16) is moved by the tension spring (15). Although it is lifted slightly against the elastic force, it slides diagonally downward in a straight line.As the upper end of the lead frame (1) moves in a different trajectory than the separator (16), the lead frame (1) moves in a straight line. When the frame (1) curves and deforms, the lead frame (1)
), the inner leads could get caught on the next lead frame (1) waiting on the stocker. This is because the lead frame (1) is a strip-shaped strip member. Yes, when placed on the stocker,
The lead frames (1), (1), etc. are usually arranged horizontally, and the lead frames (1)
)(1)... A separator (16) is placed above the lead frame (1) by the separator (16).
When (1)... was deformed in its lateral direction, the above-mentioned problems were particularly noticeable.

Therefore, the present invention has been devised in view of the above problems, and its purpose is to create a thin plate-like member that can be reliably cut out one by one without applying stress to the thin-plate member. The purpose of the present invention is to provide a separation device.

[Means to solve the problem]

The technical means for achieving the above object of the present invention is to hold a large number of thin plate-like members upright while stacking them in the thickness direction, and to curve and deform a part of the thin plate-like members using separation claws. A separating device for cutting out a thin plate-like member, wherein the separating claw enters a cutting operation from an initial state in which it comes into contact with an end face having a predetermined thickness of the thin plate-like member with a constant pressing force, and curves and deforms during the cutting operation. It has a movement trajectory that is almost similar to the movement trajectory of the end face of the thin plate-like member.

[Effect]

In the device for separating thin plate-like members according to the present invention, the cutting operation starts from an initial state in which the separating claw contacts the end face of the thin plate-like member having a predetermined thickness with a constant pressing force, so that the dimensional accuracy of the thin plate-like member is accurate. To reliably cut out a thin plate-like member one by one even if the thickness varies.

In addition, the separating claw has a movement trajectory that is almost similar to the movement trajectory of the end face of the thin plate-shaped member that curves and deforms during the cutting operation, so that the lead frame can be curved and deformed without applying stress, resulting in smooth cutting. Operation becomes possible.

〔Example〕

An embodiment in which the present invention is applied to a lead frame separation device used in the manufacture of semiconductor devices will be described with reference to FIGS. 1 to 8.

In the lead frame separation apparatus shown in FIGS. 1 to 3, (21) is a support frame (23) mounted on a base (22).
) (24), this stocker (21) is a support frame (23) (
The stocker (24) is mounted so as to be tiltable about the fulcrums (25) and (26) of the stocker (24), and is attached to the stocker (24) by screws using an arcuate elongated hole (27) provided in one of the support frames (24). 21) has a structure to hold it horizontally or tilted. (28a) - (28d) (29)
(30) is a support end plate vertically installed on the periphery of the stocker (21), and the support end plate (28a) is placed on the stocker (21).
) ~ (28d) (29) A large number of lead frames (31) (31
)... will be stored. This lead frame (31) (
31) are held upright on the stocker (21) in a state where a large number of them are stacked in the thickness direction. The lead frames (31) (31) are strip-shaped strip members manufactured by pressing or etching, and are placed on the stocker (21) in a horizontally elongated arrangement as shown. (32) is a separator unit provided via a support arm (33) extending from one end of the stocker (21).

In this separator unit (32), (34) is a fixed base attached to the tip of the support arm (33), and has a linear elongated hole (35) bored along the vertical direction.
By using the separator unit (
32) has a structure in which the position can be adjusted in the vertical direction. (3
6) is a parallel link unit that is attached to the upper end of the fixed base (34) via ball slides (37) (37) so as to be slidable in the horizontal direction (arrow direction a in the figure);
Movable base (38) of this parallel link unit (36)
and the fixed base (34).
9) elastically urges the movable base (38) toward the stocker side (40) is a first cylinder fixed to the fixed base (34), and its cylinder rod (40a
) with the tip of the bracket (4) projecting downward from the rear end of the movable base (38) of the parallel link unit (36).
1) so as to be able to come into contact with it. (42) is a parallel link mechanism provided on the movable base (38), and this is a first link lever that is rotatably supported on the movable base (38) about a fulcrum (43). (44), and a second link lever (46) rotatably supported on a movable base (3rd) about a fulcrum (45) and arranged parallel to the first link lever (44). , are arranged above the first and second link levers (44) and (46), and are connected to each other via the free ends of the first and second link levers (44) and (46) and bearings (47) and (48). It is composed of a connected third link lever (49). (5
0) is a second cylinder fixed on a movable base (38) via a mounting frame (51), and a rotary roller (53) is pivotally supported on the lower surface of a bracket (52) attached to the tip of the cylinder rod. and then press the third link lever (4).
9) so as to be able to come into contact with the side end surface of. The third link lever (49) is stretched between the movable base (38) and the end extending rearward from the connecting portion with the first and second link levers (44) (46) located at the center of the third link lever (49). The tension spring (54) biases the third link lever (49) so as to constantly contact the rotating roller (53) of the bracket (52) of the second cylinder (50).

(55) is a stopper that is screwed onto the mounting frame (51) so as to be able to protrude and retract, and its tip is arranged so that it can come into contact with the side end surface of the central connecting part of the third link lever (49). , adjust the end face of the lead frame (31) on the stocker (2 parts) and the original position of the separation claw (separator) to be described later. (56) is a separator which is a separating claw fixed to the end extending forward from the connection part of the third link lever (49), and has the shape and operation described below.
21) Upper lead frame (31) (31)...
This separator (56), which is cut out one by one, has a flat surface (58) connected to the tapered surface (57) on the side end surface of its tip, as shown in FIGS. 4 and 5. A recess (59) is provided at the rear end of the surface (58), and the pressing surface (6) of the lead frame (31) is connected to the recess (59) and is perpendicular to the flat surface (58).
0), and furthermore, when a separation error occurs, the lead frame (
31) is formed with a locking surface (61) for locking and holding, and is made of a hard material such as zirconia ceramic or cemented carbide to prevent chipping at the edges of each surface mentioned above. It is preferable that the separator (56
) is the dimension l between the flat surface (58) and the edge of the pressing surface (60), as will be described later. (31a) is in contact with the two-piece lead frame (3
It is set appropriately according to the thickness of the lead frame (31) so that the end surfaces (31a) of 1) do not come into contact with each other.

Next, the cutting operation of the lead frame (31) separating device having the above structure will be explained.

First, a large number of lead frames (31) (31)
... in the stocker (2
1) Stand and hold. When setting the lead frames (31, 31), etc. to the stocker (21), the stocker (21) is held horizontally or at an angle. When the stocker (21) is held horizontally, the -th lead frame (31) is attached to the support end plate (28a).
) to (28d) to align with the separator (56).
Lead frame from the opposite direction - (31) (31)
A means of pressing ... is required. On the other hand, when the stocker (21) is held at an angle, if it is tilted so that the -th lead frame (31) side is on the lower side, the dead weight of the lead frame (31) (31)... The first lead frame (31) is the support end plate (28a) ~
(28d), so there is no need for the above-mentioned pressing means.However, when cutting out the lead frame (31) using the separator (56), the stocker (
It is better to hold the first lead frame (31) horizontally than to hold it tilted.
It is more reliable and preferable to separate it from 1).

Lead frame (31) (31)
... is set on the stocker (21), and the separator (56) is placed on the -th lead frame (31).
) is aligned to the origin position. At this time, the 6th
As shown in the figure, the pressing surface (60) of the separator (56)
) is the end face (
31a) with a constant pressing force due to the elastic force of the tension spring (39). At this time, the cylinder rod (40a) of the first cylinder (40) is in the retracted position and does not come into contact with the bracket (41) extending from the movable base (38), forming a gap ( (See Figure 3).

The cutting operation of the lead frame (31) begins from the initial state in which the separator (56) described above is placed at the origin position. That is, by operating the second cylinder (50), the bracket (52) at the tip of the cylinder rod is projected, and the parallel link mechanism (42) is driven via the rotating roller (53) of the bracket (52). . Specifically, when the third link lever (49) is pressed by the bracket (52) of the second cylinder (50) via the rotating roller (53) against the elastic force of the tension spring (54), 1st
, the second link lever (44) (46) is the fulcrum (4
3) It rotates around (45), and the third link lever (49) connected thereto moves. At this time, the separator (
56) is moved in an arc by the parallel link mechanism (42). This creates a separator (56) as shown in Figure 7.
A lead frame (31) held by a pressing surface (60) of
is curved L7 with the edge portion of the support end plate (28a) of the stocker (21) as the center of curvature O (see Figure 1), and the end surface (31a) fits into the recess (59) of the separator (56) and gets lost. The second and subsequent lead frames (
31) (31)...It is cut out. In this arcuate movement of the separator (5G), its movement trajectory is almost similar to the movement trajectory of the end face (31a) of the lead frame (31), which is curved and deformed, and this is because the center of curvature of the lead frame (31) is 0 The separator (56) has the same curvature radius as the dimension from to the end surface (31a), that is, the curvature radius.
What is necessary is to design the parallel link S structure (42) so that it moves in a circular arc.

At the start of the above-mentioned cutting operation, the separator (56) starts the cutting operation with its pressing surface (60) pressing the end surface (31a) having a predetermined thickness of the lead frame (31). 31) Even if the lead frame (31) is thin like an etched product and there is some variation in length and height, the lead frame (31) can be held stably by the separator (56) without being affected by its dimensional accuracy. Therefore, the -th lead frame (31) can be cut out reliably. Furthermore, since the movement locus of the separator (56) is made to be almost close to the movement locus of the end face (31a) of the lead frame (31) that is curved, the lead frame (31) is curved and deformed without applying stress. This allows for smooth cutting operation. In particular, the horizontally arranged lead frame (31) (3
1) A separator (56) is placed on the side of the lead frame (31) by the separator (56).
This is even more noticeable since (31)... is curved in its longitudinal direction. Here, the above lead frame (
If the radius of curvature during the bending deformation of the lead frame (31) is increased, the possibility of the above-mentioned stress being applied will be further reduced as much as possible, but if it is made too large, the lead frame (31) that is in close contact with the lead frame (31) ) (31)・
...The degree of curved deformation when they are cut out is too small,
There is a tremor that makes it impossible to reliably separate the lead frame from the second lead frame (31). In this case, in order to appropriately increase the degree of the curved deformation of the lead frame (31) and ensure the separation with the second lead frame (31), the radius of curvature in the above curved deformation is set to be small to a certain extent. There is a need.

During the above-mentioned cutting operation, the end face (31a) of the lead frame (31), which has been curved and deformed, is fitted into the recess (59) of the pressing surface (60) of the separator (56), as shown in FIG. For some reason lead frame (31)
Even if the end surface (31a) of the lead frame (31a) comes off, the end surface (31a) of the lead frame (31) can be locked and held by the locking surface (61) of the separator (56) as shown by the broken line in the figure, and the pressing surface Even if a separation error occurs due to (60), there is no need to repeat the cutting operation from the beginning, and the above-mentioned locking surface (60)
Separation according to 1) becomes possible, and the index can be improved.

After the above cutting operation is completed, the first lead frame (31) is cut out while the second and subsequent lead frames (31) (31)... are held upright by appropriate means (not shown). the stocker (21) using a chuck mechanism etc.
) It is removed from above and transferred to a conveyor rail, etc., and supplied to the next process such as a die bonder. This lead frame (31
) There are various handling means after cutting out.

Finally, when returning the separator (56) from the cutting completion position to the origin position, the second cylinder (56)
0) is reversely operated to set the parallel link mechanism (42) to the initial state, and at the same time, by operating the first cylinder (40), its cylinder rod (40a) is protruded, and the bracket of the movable base (38) is (41) and press it to move the movable base (38) to the ball slide (
37) It is made to move backward against the elastic force of the tension spring (39) via (37). At this time, the separator (56)
As shown in FIG. 8, the flat surface (58) is in contact with the next lead frame (31), and from this state the first cylinder (40) is reversely operated to remove the separator (56). ) is moved forward to return to the initial state (see Figure 6).

By repeating the above-mentioned operations, the stocker (21
) on the lead frames (31) (31)... are sequentially cut out one by one by a separator (56) and supplied to the next process.

Incidentally, in the above embodiment, a lead frame separation device used in the manufacture of semiconductor devices has been described, but the present invention is not limited thereto, and can be applied to other thin plate members other than the above lead frame. Of course there are.

〔Effect of the invention〕

According to the device for separating thin plate-like members according to the present invention, the cutting operation starts from the initial state in which the separating claw contacts the end face of the thin plate-like member with a predetermined thickness with a constant pressing force. To reliably cut out thin plate-like members one by one even if dimensional accuracy varies. In addition, the separating claw has a movement trajectory that is almost similar to the movement trajectory of the end face of the thin plate-shaped member that curves and deforms during the cutting operation, so that the lead frame can be curved and deformed without applying stress, resulting in smooth cutting. Operation becomes possible. Therefore, it is possible to provide a separation device with improved index and high reliability with few separation errors, which has great practical value.

[Brief explanation of the drawing]

1 to 8 are for explaining one embodiment of the thin plate member separating device according to the present invention, FIG. 1 is a plan view showing the lead frame separating device, and FIG. 2 is a plan view showing the lead frame separating device. 3 is a front view of FIG. 1, FIG. 4 is an enlarged plan view of the separator of FIG. 1, FIG. 5 is a bottom view of the separator of FIG. 4, and FIGS. Each figure is a plan view showing a state in which a lead frame is cut out by a separator. FIG. 9 is a front view showing a separator unit of a conventional lead frame separation device, and FIG. 10 is a side view of FIG. 9. (31L---1 plate member (lead frame), (31
a) One end surface, (56)--separator. Figure 10 Patent applicant Nichiden Kikai Co., Ltd.
Physician Gangwon Province Written amendment (method) 1. Indication of the case 1990 Patent Review No. 169511 2. Title of the invention Separation device for thin plate-shaped members 3. Person making the amendment Relationship to the case Name of the patent applicant Nichiden Kikai Co., Ltd. 4, Agent address: 8th floor, Osaka Shoko Building, 1-15-26 Edobori, Nishi-ku, Osaka, Osaka Prefecture

Claims (1)

[Claims] (1) A thin plate member separation device that holds a large number of thin plate members stacked one on top of the other in the thickness direction and cuts out a part of the thin plate member by bending and deforming it with a separating claw, The separating claw enters a cutting operation from an initial state in which it comes into contact with the end face of the thin plate-like member with a certain thickness with a constant pressing force, and the movement trajectory of the end face of the thin plate-like member, which is curved and deformed during the cutting operation, is approximately similar to that of the separating claw. A separating device for thin plate-like members, characterized by having a moving trajectory.