JPH0459452U - - Google Patents
Info
- Publication number
- JPH0459452U JPH0459452U JP10303490U JP10303490U JPH0459452U JP H0459452 U JPH0459452 U JP H0459452U JP 10303490 U JP10303490 U JP 10303490U JP 10303490 U JP10303490 U JP 10303490U JP H0459452 U JPH0459452 U JP H0459452U
- Authority
- JP
- Japan
- Prior art keywords
- storage tank
- liquid storage
- processing liquid
- sample
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 17
- 238000004140 cleaning Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 2
- 229910052731 fluorine Inorganic materials 0.000 claims 2
- 239000011737 fluorine Substances 0.000 claims 2
- 230000003028 elevating effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
Landscapes
- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990103034U JPH0749411Y2 (ja) | 1990-09-27 | 1990-09-27 | 半導体耐久試験用の液槽式前処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990103034U JPH0749411Y2 (ja) | 1990-09-27 | 1990-09-27 | 半導体耐久試験用の液槽式前処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0459452U true JPH0459452U (enrdf_load_html_response) | 1992-05-21 |
JPH0749411Y2 JPH0749411Y2 (ja) | 1995-11-13 |
Family
ID=31847760
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990103034U Expired - Lifetime JPH0749411Y2 (ja) | 1990-09-27 | 1990-09-27 | 半導体耐久試験用の液槽式前処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0749411Y2 (enrdf_load_html_response) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0296634A (ja) * | 1988-10-03 | 1990-04-09 | Tabai Espec Corp | 液槽式環境試験装置 |
-
1990
- 1990-09-27 JP JP1990103034U patent/JPH0749411Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0296634A (ja) * | 1988-10-03 | 1990-04-09 | Tabai Espec Corp | 液槽式環境試験装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0749411Y2 (ja) | 1995-11-13 |
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